[Scan]
initial_time=2016-01-18T21:40:29
final_time=2016-01-18T21:40:49
ip_count=19
run=1024
dataset=8
scan=626
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09317E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=1.37395E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=1.98338E-9
ql3_vset=
ql3_vmon=-9.13208E0
ql3_imon=1.49953E-10
ql4_vset=
ql4_vmon=-9.1424E0
ql4_imon=-1.35553E-10
mult1=-1.34971E-8
mult2=-3.14178E-9
rf_tmon=3.74292E-3
rf_agc=4.36858E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.73665E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66055E0
bslens_imon=2.47327E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=2.00815E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05232E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53898E1
cs_ef1b_imon=3.14944E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02297E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05013E1
cs_ea1_imon=1.09101E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39276E0
lens1_imon=2.62754E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64702E1
os_ef1alow_imon=2.98589E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03286E1
cs_ea2_imon=1.3404E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84288E1
cs_ef1a_imon=3.02968E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.26539E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11248E1
os_restr1_imon=4.28756E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14828E1
os_ea1_imon=2.40189E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.08507E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23006E0
cs_ionrep_imon=9.47763E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91953E2
cs_nozzle_imon=1.93556E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=1.97165E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.26512E-8
tplens_vset=1.4E-1
tplens_vmon=1.67755E0
tplens_imon=-3.14514E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27306E1
iondef3_imon=1.50018E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.57143E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98394E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.00149E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2876E0
ionrepsh_imon=8.41981E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.18409E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74713E1
cs_ef2b_imon=3.13559E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57654E0
os_ea2_imon=-7.73635E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00586E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7117E1
cs_ef2a_imon=3.17077E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07577E0
os_ef2alow_imon=-2.40964E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13226E-1
os_ef2bup_imon=-5.17167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11155E1
os_restr2_imon=3.41217E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.30479E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01984E1
cs_anode2_imon=2.09179E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72895E1
iondef1_imon=1.10974E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67541E1
iondef4_imon=1.10374E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.9469E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.52345E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13264E0
cs_ionaccel_imon=-8.63956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56779E1
einzel_imon=7.83754E-6
window_vset=0.0E0
window_vmon=2.52527E-1
window_imon=-6.69342E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82668E2
mask1_imon=2.39241E-4
mask2_vset=0.0E0
mask2_vmon=-1.86463E1
mask2_imon=-5.7952E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.50524E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.66413E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.0902E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39436E0
defgridb_imon=6.15359E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33248E1
os_fil1_imon=9.43387E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08427E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63569E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31843E1
cs_fil1_imon=6.45692E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.6194E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66058E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.2907E-2
os_fil2_imon=-2.41923E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19038E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.21757E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29786E-1
cs_fil2_imon=-2.28201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22123E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20414E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.65424E-1
res40_imon=-2.47327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16178E-1	-7.98488E-1	-9.1315E0	-9.14235E0	4.45843E-3	9.49621E-2	2.73187E1	-3.26661E1	-3.26207E1	2.67821E1	1.19991E-7	2.51952E-3	2.51952E-3	6.30171E-3	3.01609E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16369E-1	-7.98225E-1	-9.13146E0	-9.14237E0	4.55379E-3	9.50575E-2	2.73165E1	-3.26711E1	-3.26068E1	2.68226E1	1.1974E-7	2.52025E-3	2.52025E-3	6.29157E-3	3.00348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16536E-1	-7.98202E-1	-9.13198E0	-9.14259E0	4.48227E-3	9.50336E-2	2.73201E1	-3.26386E1	-3.2596E1	2.68851E1	1.19766E-7	2.51915E-3	2.51915E-3	6.29624E-3	2.99083E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16584E-1	-7.98154E-1	-9.13193E0	-9.14259E0	4.52995E-3	9.48668E-2	2.73252E1	-3.26655E1	-3.26124E1	2.68388E1	1.2026E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.97901E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16536E-1	-7.98202E-1	-9.1321E0	-9.14283E0	4.62532E-3	9.48429E-2	2.73267E1	-3.26819E1	-3.26086E1	2.68382E1	1.19749E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00453E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-2.09325E0	-8.16703E-1	-7.9844E-1	-9.13219E0	-9.14292E0	4.52995E-3	9.48429E-2	2.73165E1	-3.26585E1	-3.26206E1	2.67818E1	1.19713E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.16727E-1	-7.98559E-1	-9.13215E0	-9.14261E0	4.76837E-3	9.48429E-2	2.73225E1	-3.26903E1	-3.26086E1	2.67191E1	1.20069E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-8.16703E-1	-7.98392E-1	-9.13179E0	-9.14257E0	5.00679E-3	9.50575E-2	2.73297E1	-3.26879E1	-3.26146E1	2.70518E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.16298E-1	-7.97939E-1	-9.13184E0	-9.14264E0	4.74453E-3	9.48191E-2	2.73098E1	-3.26667E1	-3.25959E1	2.68418E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09333E0	-8.16631E-1	-7.98416E-1	-9.13198E0	-9.14283E0	4.673E-3	9.4986E-2	2.73473E1	-3.26695E1	-3.25728E1	2.68712E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9978E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.16202E-1	-7.98059E-1	-9.13196E0	-9.14254E0	4.74453E-3	9.48906E-2	2.73219E1	-3.27107E1	-3.26476E1	2.67746E1	1.19705E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09333E0	-8.16798E-1	-7.97868E-1	-9.13193E0	-9.1429E0	4.64916E-3	9.47952E-2	2.73488E1	-3.26396E1	-3.26178E1	2.69497E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.97963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.16703E-1	-7.97987E-1	-9.13196E0	-9.14295E0	4.673E-3	9.48906E-2	2.73388E1	-3.26744E1	-3.26168E1	2.70518E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09325E0	-8.16631E-1	-7.98249E-1	-9.13217E0	-9.14259E0	4.76837E-3	9.47952E-2	2.73652E1	-3.26506E1	-3.2602E1	2.69079E1	1.19872E-7	2.52362E-3	2.52362E-3	6.31299E-3	3.00144E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09271E0	-8.16655E-1	-7.98082E-1	-9.13208E0	-9.1428E0	4.81606E-3	9.47714E-2	2.73305E1	-3.26543E1	-3.2629E1	2.6958E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
1.9E1	0.0E0	2.0E0	7.68E2	5.29E2	-2.09441E0	-8.16631E-1	-7.98178E-1	-9.1321E0	-9.14257E0	4.76837E-3	9.47237E-2	2.73351E1	-3.26658E1	-3.26254E1	2.66773E1	1.19749E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09333E0	-8.16798E-1	-7.98106E-1	-9.13239E0	-9.14268E0	4.69685E-3	9.49621E-2	2.73582E1	-3.2636E1	-3.26425E1	2.66537E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09348E0	-8.16679E-1	-7.9813E-1	-9.132E0	-9.14233E0	4.76837E-3	9.5129E-2	2.7334E1	-3.26809E1	-3.2603E1	2.66706E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09309E0	-8.1687E-1	-7.98011E-1	-9.13205E0	-9.14237E0	4.62532E-3	9.52005E-2	2.72985E1	-3.26687E1	-3.26488E1	2.69037E1	1.20004E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09317E0	-8.16989E-1	-7.98249E-1	-9.13208E0	-9.1424E0	4.62532E-3	9.51529E-2	2.72895E1	-3.26723E1	-3.27306E1	2.67541E1	1.20414E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1