[Scan]
initial_time=2016-01-18T21:41:25
final_time=2016-01-18T21:41:45
ip_count=19
run=1024
dataset=8
scan=628
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08848E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=1.37721E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=1.93917E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=1.19269E-10
ql4_vset=
ql4_vmon=-9.14242E0
ql4_imon=-1.28055E-10
mult1=-7.04045E-9
mult2=-3.25436E-9
rf_tmon=-6.80419E-3
rf_agc=3.0336E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.71846E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68214E0
bslens_imon=2.33443E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=2.00527E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05189E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53989E1
cs_ef1b_imon=3.15461E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02383E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04699E1
cs_ea1_imon=1.09635E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37669E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03584E1
cs_ea2_imon=1.34411E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=3.04289E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.27296E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.27761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=2.41761E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17954E0
cs_ionrep_imon=9.43803E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=1.96818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.25953E-8
tplens_vset=1.4E-1
tplens_vmon=1.65146E0
tplens_imon=-3.30742E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25116E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27658E1
iondef2_imon=1.57276E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98123E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.08072E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28336E0
ionrepsh_imon=8.57795E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33268E1
lens5b_imon=2.17304E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48393E0
os_ea2_imon=-6.4221E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71468E1
cs_ef2a_imon=3.16506E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.36362E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10638E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11322E1
os_restr2_imon=3.41698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.28371E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.08531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74591E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69169E1
iondef4_imon=1.11152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.90222E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.53769E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-8.28332E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.67197E-1
window_imon=-7.02193E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39344E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.73911E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.65251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.31438E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46757E0
defgridb_imon=5.99064E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.42606E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08176E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63972E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31849E1
cs_fil1_imon=7.17286E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0014E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66423E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.02019E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8512E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16822E-1	-7.98106E-1	-9.1321E0	-9.14273E0	4.62532E-3	9.51052E-2	2.73051E1	-3.26838E1	-3.26083E1	2.66657E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99941E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16679E-1	-7.98225E-1	-9.132E0	-9.14266E0	4.673E-3	9.4986E-2	2.72984E1	-3.26664E1	-3.26389E1	2.68138E1	1.20174E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.17347E-1	-7.98273E-1	-9.13219E0	-9.14268E0	4.74453E-3	9.52959E-2	2.73532E1	-3.26851E1	-3.26301E1	2.69281E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16751E-1	-7.98392E-1	-9.132E0	-9.14273E0	4.76837E-3	9.52482E-2	2.73381E1	-3.26579E1	-3.26146E1	2.69199E1	1.19902E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16822E-1	-7.97987E-1	-9.13184E0	-9.14266E0	4.55379E-3	9.52005E-2	2.73045E1	-3.26543E1	-3.26242E1	2.69331E1	1.198E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.17108E-1	-7.98178E-1	-9.1316E0	-9.14264E0	4.26769E-3	9.52959E-2	2.73375E1	-3.26512E1	-3.2617E1	2.69067E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16917E-1	-7.9782E-1	-9.13188E0	-9.14252E0	4.57764E-3	9.52721E-2	2.73299E1	-3.26561E1	-3.26248E1	2.67775E1	1.20122E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16846E-1	-7.97987E-1	-9.13196E0	-9.14266E0	4.64916E-3	9.52721E-2	2.73261E1	-3.26458E1	-3.26296E1	2.68028E1	1.19705E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16751E-1	-7.98011E-1	-9.13198E0	-9.14273E0	4.79221E-3	9.49621E-2	2.73075E1	-3.26664E1	-3.26107E1	2.6855E1	1.19653E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.17251E-1	-7.98059E-1	-9.13174E0	-9.14276E0	4.76837E-3	9.4986E-2	2.73153E1	-3.26609E1	-3.26218E1	2.68695E1	1.20069E-7	2.5188E-3	2.5188E-3	6.28006E-3	3.00824E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.17251E-1	-7.98106E-1	-9.13162E0	-9.14249E0	4.64916E-3	9.5129E-2	2.73327E1	-3.26585E1	-3.26182E1	2.68611E1	1.20174E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.17275E-1	-7.9844E-1	-9.13177E0	-9.14247E0	4.72069E-3	9.52244E-2	2.73246E1	-3.26573E1	-3.26119E1	2.69489E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.98222E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.17084E-1	-7.98202E-1	-9.13191E0	-9.14247E0	4.45843E-3	9.49144E-2	2.73399E1	-3.26488E1	-3.26104E1	2.67854E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.17084E-1	-7.9813E-1	-9.13177E0	-9.14252E0	4.55379E-3	9.46522E-2	2.73291E1	-3.26741E1	-3.26386E1	2.69415E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.1706E-1	-7.98154E-1	-9.13157E0	-9.14254E0	4.26769E-3	9.48668E-2	2.73255E1	-3.26687E1	-3.26008E1	2.67734E1	1.20004E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.1706E-1	-7.98488E-1	-9.13177E0	-9.14261E0	4.3869E-3	9.47714E-2	2.72949E1	-3.26518E1	-3.262E1	2.68274E1	1.19819E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.03618E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.17156E-1	-7.98392E-1	-9.13157E0	-9.14249E0	4.55379E-3	9.48191E-2	2.73117E1	-3.26675E1	-3.26266E1	2.69734E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.03804E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16822E-1	-7.98416E-1	-9.13167E0	-9.14242E0	4.48227E-3	9.49621E-2	2.73252E1	-3.26443E1	-3.26354E1	2.68466E1	1.19819E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.02277E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16798E-1	-7.98106E-1	-9.13191E0	-9.14242E0	4.55379E-3	9.49621E-2	2.73316E1	-3.26744E1	-3.26107E1	2.69293E1	1.1979E-7	2.51393E-3	2.51393E-3	6.34982E-3	3.03637E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16894E-1	-7.98178E-1	-9.13146E0	-9.14242E0	4.76837E-3	9.50575E-2	2.74591E1	-3.27658E1	-3.25116E1	2.69169E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0148E-1