[Scan]
initial_time=2016-01-18T21:42:20
final_time=2016-01-18T21:42:40
ip_count=19
run=1024
dataset=8
scan=630
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.37966E-8
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=1.96759E-9
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=1.63257E-10
ql4_vset=
ql4_vmon=-9.1424E0
ql4_imon=-1.55723E-10
mult1=-9.89692E-9
mult2=-2.93619E-9
rf_tmon=-5.22741E-3
rf_agc=3.21079E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.65772E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6202E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=2.01518E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=3.15872E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02404E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0451E1
cs_ea1_imon=1.08149E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40736E0
lens1_imon=2.86888E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64869E1
os_ef1alow_imon=2.98356E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.37066E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=3.04229E-5
olens2_vset=9.7E-1
olens2_vmon=9.69577E-1
olens2_imon=1.25988E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.27323E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=2.43177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63508E1
os_ef1bup_imon=3.08295E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18839E0
cs_ionrep_imon=9.52651E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.93494E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01948E1
cs_anode1_imon=1.96948E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.26958E-8
tplens_vset=1.4E-1
tplens_vmon=1.66916E0
tplens_imon=-3.05966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.49029E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26993E1
iondef2_imon=1.58479E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98041E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.04016E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.1741E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47921E0
os_ea2_imon=-7.66089E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00467E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.17053E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07599E0
os_ef2alow_imon=-2.40429E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96072E-1
os_ef2bup_imon=-5.12542E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11112E1
os_restr2_imon=3.41241E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.32087E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.08E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73454E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.11283E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.86584E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.50285E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14346E0
cs_ionaccel_imon=-8.30005E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47365E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56446E1
einzel_imon=7.78862E-6
window_vset=0.0E0
window_vmon=2.69235E-1
window_imon=-7.91778E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39247E-4
mask2_vset=0.0E0
mask2_vmon=-1.86408E1
mask2_imon=-5.72837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.0914E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.46846E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.18342E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.22778E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33279E1
os_fil1_imon=9.42136E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08007E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63654E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31843E1
cs_fil1_imon=7.17736E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.04036E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65988E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19298E-2
os_fil2_imon=-2.39117E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.27726E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.25305E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.11315E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22148E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.85271E-1
res40_imon=-2.33479E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16774E-1	-7.97772E-1	-9.13188E0	-9.14235E0	4.14848E-3	9.51529E-2	2.73435E1	-3.26591E1	-3.26356E1	2.68556E1	1.19891E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.01104E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16727E-1	-7.97868E-1	-9.13169E0	-9.14254E0	4.52995E-3	9.4986E-2	2.73277E1	-3.26603E1	-3.26101E1	2.68606E1	1.20084E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.01209E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16655E-1	-7.97796E-1	-9.13203E0	-9.14276E0	4.48227E-3	9.51529E-2	2.73139E1	-3.26573E1	-3.25971E1	2.67642E1	1.19861E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01609E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16727E-1	-7.97892E-1	-9.13191E0	-9.14271E0	4.52995E-3	9.51529E-2	2.73063E1	-3.26537E1	-3.26119E1	2.68472E1	1.198E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.17013E-1	-7.98011E-1	-9.1321E0	-9.14288E0	4.76837E-3	9.51052E-2	2.73117E1	-3.26699E1	-3.26152E1	2.66848E1	1.20209E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00966E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.17013E-1	-7.98059E-1	-9.13212E0	-9.14285E0	4.45843E-3	9.49144E-2	2.72835E1	-3.26813E1	-3.26278E1	2.69349E1	1.20278E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16703E-1	-7.97963E-1	-9.13193E0	-9.14252E0	4.17233E-3	9.48429E-2	2.73231E1	-3.26494E1	-3.25966E1	2.67654E1	1.20174E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16774E-1	-7.97987E-1	-9.13177E0	-9.14273E0	4.36306E-3	9.47952E-2	2.73057E1	-3.26254E1	-3.26092E1	2.68767E1	1.19809E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16894E-1	-7.98035E-1	-9.13174E0	-9.14266E0	4.33922E-3	9.46999E-2	2.73249E1	-3.26392E1	-3.26332E1	2.68214E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16774E-1	-7.97987E-1	-9.13169E0	-9.14264E0	4.76837E-3	9.46999E-2	2.7308E1	-3.26543E1	-3.2603E1	2.68418E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16846E-1	-7.97915E-1	-9.13165E0	-9.14276E0	4.74453E-3	9.48906E-2	2.73216E1	-3.26567E1	-3.26154E1	2.68202E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.17013E-1	-7.97772E-1	-9.13174E0	-9.14264E0	4.72069E-3	9.47237E-2	2.73131E1	-3.26395E1	-3.26346E1	2.67872E1	1.19749E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16727E-1	-7.97725E-1	-9.13153E0	-9.14264E0	4.74453E-3	9.4676E-2	2.73249E1	-3.26585E1	-3.26122E1	2.68112E1	1.1966E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.99613E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16965E-1	-7.97844E-1	-9.13177E0	-9.14254E0	4.43459E-3	9.47237E-2	2.73045E1	-3.26452E1	-3.2605E1	2.68581E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9874E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16536E-1	-7.97844E-1	-9.13165E0	-9.14235E0	4.55379E-3	9.47714E-2	2.72919E1	-3.26554E1	-3.26392E1	2.6855E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16727E-1	-7.97892E-1	-9.132E0	-9.14252E0	4.60148E-3	9.46522E-2	2.73087E1	-3.26597E1	-3.26218E1	2.6822E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.97963E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.16274E-1	-7.97892E-1	-9.13239E0	-9.14257E0	4.673E-3	9.46283E-2	2.73222E1	-3.26555E1	-3.26119E1	2.67878E1	1.19757E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.97187E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16846E-1	-7.98106E-1	-9.13198E0	-9.14259E0	4.79221E-3	9.48429E-2	2.73345E1	-3.26651E1	-3.25906E1	2.68394E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16751E-1	-7.98059E-1	-9.1321E0	-9.14249E0	4.81606E-3	9.48906E-2	2.7347E1	-3.26732E1	-3.26077E1	2.68383E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16679E-1	-7.97892E-1	-9.13203E0	-9.1424E0	4.86374E-3	9.47952E-2	2.73454E1	-3.26993E1	-3.26104E1	2.68334E1	1.20004E-7	2.51096E-3	2.51096E-3	6.33977E-3	3.02253E-1