[Scan]
initial_time=2016-01-18T21:43:43
final_time=2016-01-18T21:44:03
ip_count=19
run=1024
dataset=8
scan=633
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08748E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=1.37585E-8
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=1.9497E-9
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=1.51873E-10
ql4_vset=
ql4_vmon=-9.14268E0
ql4_imon=-1.20926E-10
mult1=-1.00655E-8
mult2=-2.75654E-9
rf_tmon=-4.4223E-3
rf_agc=3.42228E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.67649E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69343E0
bslens_imon=2.41005E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19364E1
lens5a_imon=1.99563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53886E1
cs_ef1b_imon=3.16815E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02376E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04607E1
cs_ea1_imon=1.09567E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40937E0
lens1_imon=2.77318E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.98963E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.36259E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84269E1
cs_ef1a_imon=3.04802E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.2567E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11473E1
os_restr1_imon=4.2812E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14919E1
os_ea1_imon=2.39246E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63323E1
os_ef1bup_imon=3.08282E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2078E0
cs_ionrep_imon=9.53788E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93603E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01697E1
cs_anode1_imon=1.96117E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.25111E-8
tplens_vset=1.4E-1
tplens_vmon=1.68136E0
tplens_imon=-3.19035E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26452E1
iondef3_imon=1.51009E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.57261E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.982E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.03918E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26458E0
ionrepsh_imon=8.60198E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33546E1
lens5b_imon=2.17271E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7472E1
cs_ef2b_imon=3.13671E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46424E0
os_ea2_imon=-7.196E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00574E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71164E1
cs_ef2a_imon=3.17489E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07577E0
os_ef2alow_imon=-2.39093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97632E-1
os_ef2bup_imon=-5.07436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11329E1
os_restr2_imon=3.41479E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.29179E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01703E1
cs_anode2_imon=2.09029E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73424E1
iondef1_imon=1.10728E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67607E1
iondef4_imon=1.10599E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.00072E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.47322E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14386E0
cs_ionaccel_imon=-8.78926E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47507E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56667E1
einzel_imon=7.83754E-6
window_vset=0.0E0
window_vmon=2.63131E-1
window_imon=-6.84312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39245E-4
mask2_vset=0.0E0
mask2_vmon=-1.86537E1
mask2_imon=-5.23381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=7.62115E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.43443E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45558E0
defgridb_imon=6.15366E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33266E1
os_fil1_imon=9.43187E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07504E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63316E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31786E1
cs_fil1_imon=7.67949E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.42603E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65798E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18835E-2
os_fil2_imon=-2.43795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.31124E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30862E-1
cs_fil2_imon=-2.11359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12374E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22043E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.20466E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09285E-1
res40_imon=-2.32356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0934E0	-8.16321E-1	-7.98273E-1	-9.13179E0	-9.14237E0	4.29153E-3	9.55343E-2	2.73544E1	-3.26422E1	-3.2605E1	2.68244E1	1.20045E-7	2.51725E-3	2.51725E-3	6.3131E-3	2.99981E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09333E0	-8.16417E-1	-7.98202E-1	-9.13169E0	-9.14259E0	4.57764E-3	9.50575E-2	2.73387E1	-3.26651E1	-3.26416E1	2.68484E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16536E-1	-7.98202E-1	-9.13165E0	-9.14249E0	4.72069E-3	9.48906E-2	2.7319E1	-3.26469E1	-3.26225E1	2.68151E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.01347E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16512E-1	-7.98392E-1	-9.13169E0	-9.14249E0	4.36306E-3	9.48668E-2	2.73435E1	-3.26603E1	-3.25713E1	2.68328E1	1.20142E-7	2.51393E-3	2.51393E-3	6.30212E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16703E-1	-7.98726E-1	-9.13181E0	-9.14226E0	4.55379E-3	9.51052E-2	2.73448E1	-3.26464E1	-3.26188E1	2.68358E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16369E-1	-7.98702E-1	-9.13196E0	-9.14254E0	4.43459E-3	9.48429E-2	2.73034E1	-3.26776E1	-3.26254E1	2.68661E1	1.19913E-7	2.52099E-3	2.52099E-3	6.28552E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16512E-1	-7.98559E-1	-9.13184E0	-9.14254E0	4.50611E-3	9.48429E-2	2.73204E1	-3.2662E1	-3.25942E1	2.68911E1	1.20042E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.99343E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16345E-1	-7.98368E-1	-9.1321E0	-9.14221E0	4.43459E-3	9.54151E-2	2.73333E1	-3.26753E1	-3.26524E1	2.68034E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16464E-1	-7.98178E-1	-9.13212E0	-9.14257E0	4.12464E-3	9.51529E-2	2.73231E1	-3.26651E1	-3.2623E1	2.68785E1	1.20278E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.16441E-1	-7.97987E-1	-9.13219E0	-9.14257E0	4.12464E-3	9.52482E-2	2.73616E1	-3.27131E1	-3.259E1	2.67746E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.16488E-1	-7.97987E-1	-9.13191E0	-9.14252E0	4.22001E-3	9.4533E-2	2.73183E1	-3.26639E1	-3.26146E1	2.67974E1	1.20457E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.99613E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.16464E-1	-7.98154E-1	-9.13227E0	-9.14264E0	4.36306E-3	9.4986E-2	2.73577E1	-3.26536E1	-3.26211E1	2.68893E1	1.198E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09317E0	-8.16607E-1	-7.98512E-1	-9.13188E0	-9.14268E0	4.57764E-3	9.50098E-2	2.73075E1	-3.26531E1	-3.25794E1	2.67319E1	1.19872E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.00676E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.16655E-1	-7.9844E-1	-9.13234E0	-9.14252E0	4.95911E-3	9.47952E-2	2.72991E1	-3.26615E1	-3.26488E1	2.68665E1	1.198E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.9841E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09325E0	-8.16607E-1	-7.98535E-1	-9.13212E0	-9.14247E0	4.86374E-3	9.51052E-2	2.73314E1	-3.26792E1	-3.25936E1	2.67992E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98222E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16631E-1	-7.98535E-1	-9.13205E0	-9.14271E0	4.72069E-3	9.49144E-2	2.72947E1	-3.26643E1	-3.26286E1	2.6864E1	1.20113E-7	2.52058E-3	2.52058E-3	6.31761E-3	2.98454E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.16512E-1	-7.98416E-1	-9.13236E0	-9.14247E0	4.74453E-3	9.49144E-2	2.72933E1	-3.26496E1	-3.26148E1	2.68331E1	1.20301E-7	2.51675E-3	2.51675E-3	6.28967E-3	2.99353E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.16369E-1	-7.98368E-1	-9.13243E0	-9.14278E0	4.55379E-3	9.47237E-2	2.73303E1	-3.26747E1	-3.26416E1	2.67241E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01223E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.16536E-1	-7.98416E-1	-9.13224E0	-9.14266E0	4.88758E-3	9.49383E-2	2.73358E1	-3.26679E1	-3.2652E1	2.68989E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16631E-1	-7.98035E-1	-9.13174E0	-9.14268E0	4.60148E-3	9.51529E-2	2.73424E1	-3.26573E1	-3.26452E1	2.67607E1	1.20466E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.03286E-1