[Scan]
initial_time=2016-01-18T21:44:38
final_time=2016-01-18T21:44:58
ip_count=19
run=1024
dataset=8
scan=635
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.3736E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=1.93542E-9
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=9.56297E-11
ql4_vset=
ql4_vmon=-9.14235E0
ql4_imon=-1.60789E-10
mult1=-1.06555E-8
mult2=-2.89427E-9
rf_tmon=-5.52181E-3
rf_agc=3.35138E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.69872E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.41584E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19771E1
lens5a_imon=2.00527E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12436E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53864E1
cs_ef1b_imon=3.1615E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0451E1
cs_ea1_imon=1.10591E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41326E0
lens1_imon=2.75916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64898E1
os_ef1alow_imon=2.98461E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.34977E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.04229E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.25875E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.28296E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14769E1
os_ea1_imon=2.40345E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2167E0
cs_ionrep_imon=9.45572E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93519E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01543E1
cs_anode1_imon=1.97296E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.26838E-8
tplens_vset=1.4E-1
tplens_vmon=1.69452E0
tplens_imon=-2.06863E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26134E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.57453E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98162E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.05511E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29516E0
ionrepsh_imon=8.51424E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.17339E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74576E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46741E0
os_ea2_imon=-8.40417E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.17053E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09221E0
os_ef2alow_imon=-2.36259E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25033E-1
os_ef2bup_imon=-5.06981E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11037E1
os_restr2_imon=3.40476E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23013E2
cs_ionfoca_imon=6.2915E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01751E1
cs_anode2_imon=2.0873E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.10449E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68797E1
iondef4_imon=1.0965E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.95623E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.49693E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13477E0
cs_ionaccel_imon=-6.90995E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47365E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.82337E-6
window_vset=0.0E0
window_vmon=2.54176E-1
window_imon=-6.31916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86321E1
mask2_imon=-6.38866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.70372E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=7.22236E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.20466E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47347E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33256E1
os_fil1_imon=9.4253E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08117E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63557E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31837E1
cs_fil1_imon=6.62712E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.41311E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6611E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07901E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08033E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.15434E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.90656E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22212E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83533E-1
res40_imon=-2.42862E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16798E-1	-7.98464E-1	-9.1321E0	-9.14261E0	4.64916E-3	9.4676E-2	2.73399E1	-3.26783E1	-3.26362E1	2.68364E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16655E-1	-7.98249E-1	-9.13205E0	-9.14276E0	4.673E-3	9.48668E-2	2.73363E1	-3.26675E1	-3.26585E1	2.68358E1	1.20017E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16727E-1	-7.98011E-1	-9.13177E0	-9.14271E0	4.57764E-3	9.48191E-2	2.7321E1	-3.2652E1	-3.26402E1	2.68214E1	1.19705E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00302E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16369E-1	-7.98082E-1	-9.13203E0	-9.1424E0	4.50611E-3	9.49144E-2	2.73399E1	-3.26649E1	-3.26195E1	2.68383E1	1.19902E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.16584E-1	-7.98249E-1	-9.13193E0	-9.14278E0	4.31538E-3	9.49383E-2	2.73482E1	-3.26785E1	-3.26172E1	2.68244E1	1.19851E-7	2.51096E-3	2.51096E-3	6.32896E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.16584E-1	-7.98488E-1	-9.13191E0	-9.14271E0	4.36306E-3	9.53674E-2	2.73296E1	-3.26529E1	-3.26266E1	2.68466E1	1.20209E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-8.16584E-1	-7.98512E-1	-9.13222E0	-9.14266E0	4.3869E-3	9.51052E-2	2.73333E1	-3.26663E1	-3.26308E1	2.6798E1	1.20137E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.16464E-1	-7.98392E-1	-9.1321E0	-9.14285E0	4.31538E-3	9.4676E-2	2.73299E1	-3.26478E1	-3.25947E1	2.68773E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.16488E-1	-7.97963E-1	-9.13212E0	-9.14268E0	4.55379E-3	9.47952E-2	2.73004E1	-3.26838E1	-3.26372E1	2.68708E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16464E-1	-7.98249E-1	-9.13205E0	-9.14245E0	4.76837E-3	9.47237E-2	2.73235E1	-3.26419E1	-3.26211E1	2.67849E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.01223E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-8.16655E-1	-7.98321E-1	-9.13193E0	-9.14226E0	4.673E-3	9.49383E-2	2.73228E1	-3.26508E1	-3.26201E1	2.68819E1	1.19925E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.02813E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.16441E-1	-7.98178E-1	-9.13219E0	-9.14228E0	4.57764E-3	9.4533E-2	2.72929E1	-3.26578E1	-3.26138E1	2.68316E1	1.19697E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.02511E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16512E-1	-7.98273E-1	-9.13165E0	-9.14252E0	4.43459E-3	9.47714E-2	2.73311E1	-3.26944E1	-3.2639E1	2.68454E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.16369E-1	-7.98082E-1	-9.13193E0	-9.14249E0	4.45843E-3	9.49144E-2	2.73175E1	-3.26644E1	-3.26225E1	2.68232E1	1.20069E-7	2.51007E-3	2.51007E-3	6.32936E-3	3.02133E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-8.16488E-1	-7.98249E-1	-9.13188E0	-9.14235E0	4.31538E-3	9.53197E-2	2.7329E1	-3.26793E1	-3.26272E1	2.678E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16584E-1	-7.97987E-1	-9.13196E0	-9.14271E0	4.43459E-3	9.51529E-2	2.73098E1	-3.26644E1	-3.26136E1	2.6792E1	1.19653E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.16655E-1	-7.98321E-1	-9.13196E0	-9.14226E0	4.45843E-3	9.51529E-2	2.73235E1	-3.26646E1	-3.26162E1	2.69277E1	1.20226E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.16345E-1	-7.97939E-1	-9.13162E0	-9.14257E0	4.52995E-3	9.47714E-2	2.73004E1	-3.26225E1	-3.2616E1	2.67962E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-8.16298E-1	-7.97892E-1	-9.13174E0	-9.14259E0	4.52995E-3	9.50575E-2	2.73261E1	-3.26777E1	-3.26488E1	2.68064E1	1.20122E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.16464E-1	-7.98154E-1	-9.13174E0	-9.14235E0	4.26769E-3	9.50098E-2	2.73405E1	-3.26771E1	-3.26134E1	2.68797E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1