[Scan]
initial_time=2016-01-18T21:46:00
final_time=2016-01-18T21:46:20
ip_count=19
run=1024
dataset=8
scan=638
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09248E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.37432E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=1.978E-9
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=1.17123E-10
ql4_vset=
ql4_vmon=-9.14257E0
ql4_imon=-1.51491E-10
mult1=-1.04749E-8
mult2=-2.65274E-9
rf_tmon=-3.79143E-3
rf_agc=3.44451E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.71956E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68536E0
bslens_imon=2.36832E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=2.01552E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=3.1647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=1.09661E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41342E0
lens1_imon=2.68916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03606E1
cs_ea2_imon=1.3349E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.04108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.25625E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.27905E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14831E1
os_ea1_imon=2.41603E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=9.43403E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=1.96278E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.26015E-8
tplens_vset=1.4E-1
tplens_vmon=1.66126E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26657E1
iondef3_imon=1.51587E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.56201E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.9818E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.0548E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=8.34173E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34132E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.14272E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48582E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7148E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06777E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11171E1
os_restr2_imon=3.40292E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.29243E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.08171E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.12293E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67301E1
iondef4_imon=1.10575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.94041E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81092E-1
olens1_imon=7.4822E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-7.70669E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.84281E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-6.73362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.69644E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.2869E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50075E3
multb_neg_imon=7.44409E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40758E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33255E1
os_fil1_imon=9.4212E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07461E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63533E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31855E1
cs_fil1_imon=8.22402E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.68362E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65626E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10551E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.12736E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22053E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=236
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16345E-1	-7.98321E-1	-9.13169E0	-9.14268E0	4.45843E-3	9.49144E-2	2.72939E1	-3.2672E1	-3.26248E1	2.68322E1	1.20226E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00041E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.16369E-1	-7.98154E-1	-9.13167E0	-9.14257E0	4.57764E-3	9.4986E-2	2.73088E1	-3.26647E1	-3.26123E1	2.68695E1	1.198E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16584E-1	-7.98368E-1	-9.13174E0	-9.14271E0	4.55379E-3	9.5129E-2	2.7341E1	-3.2659E1	-3.26146E1	2.68609E1	1.20084E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.0041E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.1706E-1	-7.98488E-1	-9.13169E0	-9.14283E0	4.95911E-3	9.5129E-2	2.73081E1	-3.26422E1	-3.26224E1	2.68316E1	1.19941E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.17132E-1	-7.98106E-1	-9.13155E0	-9.14247E0	4.95911E-3	9.52005E-2	2.73062E1	-3.26484E1	-3.25874E1	2.68233E1	1.19697E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16989E-1	-7.98035E-1	-9.13172E0	-9.14276E0	5.00679E-3	9.4986E-2	2.73293E1	-3.26655E1	-3.26718E1	2.68355E1	1.20078E-7	2.52093E-3	2.52093E-3	6.3126E-3	3.01485E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16536E-1	-7.98416E-1	-9.13177E0	-9.14237E0	4.76837E-3	9.51052E-2	2.73303E1	-3.26681E1	-3.2611E1	2.68308E1	1.19883E-7	2.51384E-3	2.51384E-3	6.29035E-3	3.00251E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16536E-1	-7.98368E-1	-9.13181E0	-9.14266E0	4.88758E-3	9.5129E-2	2.72955E1	-3.26567E1	-3.26032E1	2.68322E1	1.20084E-7	2.52027E-3	2.52027E-3	6.33538E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16607E-1	-7.98321E-1	-9.132E0	-9.14268E0	4.95911E-3	9.50813E-2	2.73039E1	-3.2656E1	-3.2607E1	2.68304E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.97963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16393E-1	-7.98225E-1	-9.13193E0	-9.14264E0	5.05447E-3	9.53674E-2	2.73099E1	-3.26627E1	-3.26284E1	2.67319E1	1.19913E-7	2.51225E-3	2.51225E-3	6.29098E-3	2.9874E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16441E-1	-7.9813E-1	-9.13205E0	-9.14273E0	4.93526E-3	9.51052E-2	2.7337E1	-3.26927E1	-3.26183E1	2.69259E1	1.19653E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16393E-1	-7.98035E-1	-9.13215E0	-9.14297E0	4.72069E-3	9.49144E-2	2.73253E1	-3.26364E1	-3.26419E1	2.68665E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02396E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.16607E-1	-7.97892E-1	-9.13196E0	-9.14271E0	4.98295E-3	9.49383E-2	2.73617E1	-3.27104E1	-3.26797E1	2.68268E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.16655E-1	-7.9813E-1	-9.13186E0	-9.14264E0	5.03063E-3	9.5129E-2	2.73165E1	-3.26729E1	-3.26014E1	2.68507E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09309E0	-8.16631E-1	-7.98154E-1	-9.13181E0	-9.14249E0	5.07832E-3	9.48906E-2	2.73309E1	-3.26452E1	-3.26164E1	2.68364E1	1.198E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.98665E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09186E0	-8.16679E-1	-7.98082E-1	-9.13193E0	-9.14235E0	4.88758E-3	9.49383E-2	2.72931E1	-3.26518E1	-3.26254E1	2.68569E1	1.20031E-7	2.51136E-3	2.51136E-3	6.31299E-3	3.00144E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09302E0	-8.16631E-1	-7.98345E-1	-9.13203E0	-9.14245E0	4.93526E-3	9.51529E-2	2.73369E1	-3.26374E1	-3.26639E1	2.68304E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09317E0	-8.16679E-1	-7.98273E-1	-9.13172E0	-9.14261E0	4.79221E-3	9.51529E-2	2.73452E1	-3.26797E1	-3.26402E1	2.68024E1	1.19757E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-8.16536E-1	-7.98059E-1	-9.13191E0	-9.14292E0	4.91142E-3	9.48191E-2	2.73676E1	-3.26801E1	-3.25996E1	2.69319E1	1.198E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09248E0	-8.16417E-1	-7.98273E-1	-9.13174E0	-9.14257E0	4.72069E-3	9.50813E-2	2.73099E1	-3.26488E1	-3.26657E1	2.67301E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00041E-1