[Scan]
initial_time=2016-01-18T21:46:27
final_time=2016-01-18T21:46:47
ip_count=19
run=1024
dataset=8
scan=639
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=1.36906E-8
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=1.97276E-9
ql3_vset=
ql3_vmon=-9.13205E0
ql3_imon=1.53387E-10
ql4_vset=
ql4_vmon=-9.14297E0
ql4_imon=-1.43147E-10
mult1=-9.73579E-9
mult2=-2.73502E-9
rf_tmon=-4.50948E-3
rf_agc=3.35097E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.71022E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65855E0
bslens_imon=2.62466E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=2.01554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04955E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54013E1
cs_ef1b_imon=3.16182E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02245E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04705E1
cs_ea1_imon=1.08856E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38731E0
lens1_imon=2.65298E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64957E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03649E1
cs_ea2_imon=1.35544E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.04397E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.25444E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.2722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14586E1
os_ea1_imon=2.40098E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=9.48404E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93717E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=1.95629E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.25821E-8
tplens_vset=1.4E-1
tplens_vmon=1.73523E0
tplens_imon=-2.28099E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2606E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26419E1
iondef2_imon=1.55895E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98218E-4
ql6_vset=1.0E-1
ql6_vmon=9.52959E-2
ql6_imon=4.01781E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27864E0
ionrepsh_imon=8.59211E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.18189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4916E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08219E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.39824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.28725E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.08315E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73122E1
iondef1_imon=1.1098E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6843E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.9244E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.47358E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-9.50867E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47533E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.81758E-6
window_vset=0.0E0
window_vmon=2.61792E-1
window_imon=-6.98589E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86458E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92594E3
multa_neg_imon=8.20277E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.69852E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50078E3
multb_neg_imon=7.74973E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=5.91277E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.41855E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07666E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63671E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3181E1
cs_fil1_imon=7.03471E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.43735E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65841E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06123E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.10751E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21967E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.02115E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.52995E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16441E-1	-7.98607E-1	-9.13191E0	-9.14226E0	4.69685E-3	9.50336E-2	2.73297E1	-3.26717E1	-3.26867E1	2.68595E1	1.20122E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00302E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16822E-1	-7.98512E-1	-9.13181E0	-9.14249E0	4.60148E-3	9.4986E-2	2.7349E1	-3.26897E1	-3.26194E1	2.67911E1	1.19902E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16798E-1	-7.98488E-1	-9.13188E0	-9.14254E0	4.31538E-3	9.50336E-2	2.73171E1	-3.26621E1	-3.26789E1	2.67211E1	1.20137E-7	2.52139E-3	2.52139E-3	6.29067E-3	2.98554E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16464E-1	-7.98178E-1	-9.13191E0	-9.14285E0	4.45843E-3	9.48429E-2	2.73375E1	-3.26596E1	-3.26057E1	2.66848E1	1.20644E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98222E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16154E-1	-7.98488E-1	-9.13208E0	-9.14276E0	4.36306E-3	9.48906E-2	2.73339E1	-3.26645E1	-3.26182E1	2.67175E1	1.1993E-7	2.52197E-3	2.52197E-3	6.33863E-3	2.99753E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16107E-1	-7.98607E-1	-9.13198E0	-9.1428E0	4.45843E-3	9.48191E-2	2.72871E1	-3.26324E1	-3.25994E1	2.69542E1	1.20244E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16298E-1	-7.98321E-1	-9.13193E0	-9.14292E0	4.31538E-3	9.51052E-2	2.73207E1	-3.26716E1	-3.26659E1	2.67814E1	1.19841E-7	2.52236E-3	2.52236E-3	6.3074E-3	2.99845E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16512E-1	-7.98559E-1	-9.13198E0	-9.1428E0	4.62532E-3	9.46522E-2	2.73169E1	-3.26154E1	-3.26107E1	2.69113E1	1.20031E-7	2.52585E-3	2.52585E-3	6.32978E-3	3.01209E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16417E-1	-7.98345E-1	-9.13253E0	-9.14288E0	4.69685E-3	9.47475E-2	2.73087E1	-3.26771E1	-3.26206E1	2.6813E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16464E-1	-7.98392E-1	-9.13208E0	-9.14266E0	4.93526E-3	9.50575E-2	2.73291E1	-3.26849E1	-3.26669E1	2.67631E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9874E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16655E-1	-7.98059E-1	-9.13205E0	-9.14254E0	4.93526E-3	9.50098E-2	2.73261E1	-3.26675E1	-3.26194E1	2.69169E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9926E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16345E-1	-7.98416E-1	-9.13215E0	-9.14257E0	4.81606E-3	9.50575E-2	2.73171E1	-3.26458E1	-3.262E1	2.68028E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.16464E-1	-7.97963E-1	-9.13198E0	-9.14283E0	4.76837E-3	9.50336E-2	2.72648E1	-3.26585E1	-3.27348E1	2.68899E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.16655E-1	-7.98368E-1	-9.132E0	-9.14278E0	4.48227E-3	9.47952E-2	2.73222E1	-3.26826E1	-3.26319E1	2.68226E1	1.19861E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16393E-1	-7.97868E-1	-9.13191E0	-9.14245E0	4.24385E-3	9.47237E-2	2.73622E1	-3.26326E1	-3.26086E1	2.68352E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.97963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.16369E-1	-7.98225E-1	-9.13186E0	-9.14276E0	4.50611E-3	9.48429E-2	2.73087E1	-3.26909E1	-3.25876E1	2.681E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16369E-1	-7.98106E-1	-9.13191E0	-9.14252E0	4.52995E-3	9.49383E-2	2.73387E1	-3.26458E1	-3.26723E1	2.68418E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16464E-1	-7.98297E-1	-9.13184E0	-9.14242E0	4.57764E-3	9.49144E-2	2.73293E1	-3.26874E1	-3.26272E1	2.6828E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.02769E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.16488E-1	-7.98225E-1	-9.13188E0	-9.14299E0	4.64916E-3	9.51052E-2	2.7334E1	-3.26703E1	-3.26496E1	2.68267E1	1.20278E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.03449E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-8.16035E-1	-7.98011E-1	-9.13205E0	-9.14297E0	4.60148E-3	9.52959E-2	2.73122E1	-3.26419E1	-3.2606E1	2.6843E1	1.20092E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.02115E-1