[Scan]
initial_time=2016-01-18T21:46:54
final_time=2016-01-18T21:47:14
ip_count=19
run=1024
dataset=8
scan=640
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.37937E-8
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=1.97225E-9
ql3_vset=
ql3_vmon=-9.13212E0
ql3_imon=1.18971E-10
ql4_vset=
ql4_vmon=-9.1423E0
ql4_imon=-1.38748E-10
mult1=-9.85557E-9
mult2=-2.75853E-9
rf_tmon=-5.22559E-3
rf_agc=3.27284E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.72956E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=2.02525E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05237E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54079E1
cs_ef1b_imon=3.16029E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02359E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04477E1
cs_ea1_imon=1.09409E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38998E0
lens1_imon=2.59904E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64696E1
os_ef1alow_imon=2.98477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.36266E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.04203E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.2554E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11354E1
os_restr1_imon=4.27858E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1545E1
os_ea1_imon=2.41855E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6376E1
os_ef1bup_imon=3.08582E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=9.57462E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01834E1
cs_anode1_imon=1.96416E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.26E-8
tplens_vset=1.4E-1
tplens_vmon=1.66246E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25654E1
iondef3_imon=1.50145E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26462E1
iondef2_imon=1.55733E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98036E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.02544E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=8.53279E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74701E1
cs_ef2b_imon=3.13559E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52968E0
os_ea2_imon=-5.55298E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71364E1
cs_ef2a_imon=3.16703E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08575E0
os_ef2alow_imon=-2.50695E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91394E-1
os_ef2bup_imon=-5.24277E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11049E1
os_restr2_imon=3.40506E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.28306E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02008E1
cs_anode2_imon=2.08542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73241E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6834E1
iondef4_imon=1.11235E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.90301E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.47757E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13763E0
cs_ionaccel_imon=-8.04075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56492E1
einzel_imon=7.83754E-6
window_vset=0.0E0
window_vmon=2.52527E-1
window_imon=-7.36708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39271E-4
mask2_vset=0.0E0
mask2_vmon=-1.86394E1
mask2_imon=-5.49579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.75412E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.69426E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.3035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.42339E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63486E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31807E1
cs_fil1_imon=7.18048E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.20148E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6586E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.32476E-2
os_fil2_imon=-2.51904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.26915E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29786E-1
cs_fil2_imon=-2.1822E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16117E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22091E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.11355E-1
res40_imon=-2.44332E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16131E-1	-7.97915E-1	-9.13208E0	-9.14264E0	4.45843E-3	9.52482E-2	2.73257E1	-3.26756E1	-3.26231E1	2.6814E1	1.20084E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.99879E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16321E-1	-7.98321E-1	-9.13196E0	-9.14283E0	4.62532E-3	9.4986E-2	2.73222E1	-3.26549E1	-3.26602E1	2.67978E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16298E-1	-7.98392E-1	-9.13184E0	-9.14268E0	4.50611E-3	9.48191E-2	2.73351E1	-3.26572E1	-3.26272E1	2.68519E1	1.19891E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.00097E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16417E-1	-7.98202E-1	-9.13205E0	-9.14264E0	4.55379E-3	9.48429E-2	2.73159E1	-3.26687E1	-3.26074E1	2.68184E1	1.20031E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.99613E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16536E-1	-7.97963E-1	-9.13181E0	-9.14299E0	4.62532E-3	9.49144E-2	2.73086E1	-3.26726E1	-3.26354E1	2.68827E1	1.19978E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00676E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16941E-1	-7.98082E-1	-9.13188E0	-9.14259E0	4.64916E-3	9.50098E-2	2.73051E1	-3.26296E1	-3.26042E1	2.68325E1	1.20042E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.99845E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16679E-1	-7.98178E-1	-9.13181E0	-9.14268E0	4.45843E-3	9.50575E-2	2.73147E1	-3.26428E1	-3.26242E1	2.67475E1	1.19965E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16798E-1	-7.98249E-1	-9.13167E0	-9.1428E0	4.48227E-3	9.48429E-2	2.73093E1	-3.26524E1	-3.26224E1	2.68653E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16417E-1	-7.98011E-1	-9.13179E0	-9.14259E0	4.19617E-3	9.49621E-2	2.73273E1	-3.26392E1	-3.25942E1	2.68695E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.97704E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16727E-1	-7.98178E-1	-9.13196E0	-9.14235E0	4.45843E-3	9.49621E-2	2.73222E1	-3.2682E1	-3.26585E1	2.68478E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16631E-1	-7.98225E-1	-9.13212E0	-9.14249E0	4.673E-3	9.50336E-2	2.73333E1	-3.26621E1	-3.25715E1	2.6834E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.02922E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16703E-1	-7.98297E-1	-9.13215E0	-9.1428E0	4.673E-3	9.48906E-2	2.73435E1	-3.26585E1	-3.26218E1	2.681E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01347E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.16488E-1	-7.98392E-1	-9.13184E0	-9.14273E0	4.74453E-3	9.49144E-2	2.73664E1	-3.26999E1	-3.26266E1	2.68286E1	1.19653E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.16512E-1	-7.98202E-1	-9.13224E0	-9.14266E0	4.62532E-3	9.50575E-2	2.73429E1	-3.26819E1	-3.26236E1	2.6822E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16131E-1	-7.98202E-1	-9.13196E0	-9.14254E0	4.673E-3	9.47952E-2	2.73092E1	-3.26366E1	-3.26012E1	2.681E1	1.2033E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.1656E-1	-7.98011E-1	-9.13179E0	-9.14285E0	4.91142E-3	9.44853E-2	2.73297E1	-3.26416E1	-3.26326E1	2.68388E1	1.19749E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01995E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16631E-1	-7.97987E-1	-9.13208E0	-9.14278E0	4.43459E-3	9.47714E-2	2.73255E1	-3.26897E1	-3.26573E1	2.68516E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.16798E-1	-7.98559E-1	-9.13172E0	-9.14259E0	4.76837E-3	9.51529E-2	2.73167E1	-3.26561E1	-3.25837E1	2.67806E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16679E-1	-7.9813E-1	-9.13169E0	-9.1428E0	4.62532E-3	9.50336E-2	2.72998E1	-3.26337E1	-3.26496E1	2.68325E1	1.19941E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.99093E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16345E-1	-7.97963E-1	-9.13212E0	-9.1423E0	4.64916E-3	9.51529E-2	2.73241E1	-3.26462E1	-3.25654E1	2.6834E1	1.19757E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.00041E-1