[Scan]
initial_time=2016-01-18T21:50:13
final_time=2016-01-18T21:50:33
ip_count=19
run=1024
dataset=9
scan=641
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-7.56335E-1
ql1_imon=1.39839E-8
ql2_vset=
ql2_vmon=-7.35021E-1
ql2_imon=1.98401E-9
ql3_vset=
ql3_vmon=-9.19538E0
ql3_imon=9.18627E-11
ql4_vset=
ql4_vmon=-9.19011E0
ql4_imon=-1.16313E-10
mult1=-9.54774E-9
mult2=-2.71063E-9
rf_tmon=-3.88156E-3
rf_agc=3.45052E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.7451E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64543E0
bslens_imon=2.31914E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19735E1
lens5a_imon=2.00095E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.0518E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54009E1
cs_ef1b_imon=2.80528E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.47685E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32969E0
lens1_imon=2.632E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.97939E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03406E1
cs_ea2_imon=1.49447E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84446E1
cs_ef1a_imon=2.92657E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.27054E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11465E1
os_restr1_imon=4.26975E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14732E1
os_ea1_imon=2.3889E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63664E1
os_ef1bup_imon=3.07322E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22834E0
cs_ionrep_imon=1.19343E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91944E2
cs_nozzle_imon=1.93549E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.9853E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.27419E-8
tplens_vset=1.4E-1
tplens_vmon=1.69995E0
tplens_imon=-2.94969E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.50386E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.55948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98123E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=3.95641E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28628E0
ionrepsh_imon=1.79308E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33715E1
lens5b_imon=2.16399E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50412E0
os_ea2_imon=-8.19876E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00442E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71269E1
cs_ef2a_imon=3.1615E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0563E0
os_ef2alow_imon=-2.52593E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72325E-1
os_ef2bup_imon=-5.2679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11303E1
os_restr2_imon=3.40928E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.26522E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.24542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.08428E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6855E1
iondef4_imon=1.09059E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.57838E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.53262E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15621E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47341E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=2.61127E-1
window_imon=-8.68233E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86303E1
mask2_imon=-7.91778E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.43959E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.62963E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.27968E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2238E0
defgridb_imon=6.33068E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.43764E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0693E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63901E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30913E1
cs_fil1_imon=1.00481E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63299E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65516E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.85447E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84864E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.99639E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34022E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16518E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22265E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.97901E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40072E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.6384E-1
res40_imon=-2.49813E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-7.56407E-1	-7.34854E-1	-9.19518E0	-9.18996E0	4.60148E-3	9.47952E-2	2.73382E1	-3.26744E1	-3.26689E1	2.682E1	1.1969E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.99343E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09348E0	-7.5655E-1	-7.34472E-1	-9.19509E0	-9.18982E0	4.69685E-3	9.46999E-2	2.73045E1	-3.26705E1	-3.26362E1	2.6834E1	1.20137E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.0201E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-7.56359E-1	-7.34305E-1	-9.19466E0	-9.18996E0	4.81606E-3	9.52482E-2	2.73315E1	-3.26687E1	-3.26044E1	2.68609E1	1.20069E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00563E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09286E0	-7.56454E-1	-7.34425E-1	-9.19523E0	-9.19015E0	4.98295E-3	9.49621E-2	2.73169E1	-3.26508E1	-3.26472E1	2.6831E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09302E0	-7.56502E-1	-7.34925E-1	-9.19509E0	-9.19013E0	4.91142E-3	9.51052E-2	2.73411E1	-3.26443E1	-3.26054E1	2.67974E1	1.19902E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-7.56335E-1	-7.34377E-1	-9.19516E0	-9.19018E0	4.74453E-3	9.46522E-2	2.73082E1	-3.26536E1	-3.25936E1	2.6843E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.97394E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-7.56359E-1	-7.34472E-1	-9.19518E0	-9.18994E0	4.50611E-3	9.52005E-2	2.73225E1	-3.26434E1	-3.26224E1	2.68647E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09348E0	-7.56216E-1	-7.34568E-1	-9.19552E0	-9.19001E0	4.48227E-3	9.48668E-2	2.72927E1	-3.26585E1	-3.258E1	2.68377E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-7.56717E-1	-7.3452E-1	-9.19545E0	-9.19008E0	4.57764E-3	9.47714E-2	2.73141E1	-3.26681E1	-3.26428E1	2.68412E1	1.20017E-7	2.51116E-3	2.51116E-3	6.34037E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-7.56621E-1	-7.34496E-1	-9.19542E0	-9.19044E0	4.55379E-3	9.50336E-2	2.73387E1	-3.26783E1	-3.2623E1	2.68771E1	1.20069E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-7.56502E-1	-7.34711E-1	-9.19502E0	-9.19013E0	4.673E-3	9.51767E-2	2.73216E1	-3.26838E1	-3.26378E1	2.68244E1	1.19965E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-7.56645E-1	-7.34687E-1	-9.19516E0	-9.18992E0	4.52995E-3	9.55105E-2	2.73249E1	-3.2632E1	-3.2593E1	2.67824E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.56502E-1	-7.34544E-1	-9.19509E0	-9.19023E0	4.36306E-3	9.49383E-2	2.7347E1	-3.26862E1	-3.26077E1	2.68785E1	1.19913E-7	2.52209E-3	2.52209E-3	6.28006E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-7.5686E-1	-7.34472E-1	-9.1954E0	-9.19008E0	4.33922E-3	9.50575E-2	2.73417E1	-3.26591E1	-3.26446E1	2.68274E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-7.56717E-1	-7.34782E-1	-9.19545E0	-9.19018E0	4.52995E-3	9.51052E-2	2.73111E1	-3.26428E1	-3.26176E1	2.68376E1	1.19653E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.56693E-1	-7.34925E-1	-9.19549E0	-9.19037E0	4.31538E-3	9.52721E-2	2.73544E1	-3.26621E1	-3.26314E1	2.68587E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9874E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-7.56359E-1	-7.34901E-1	-9.19538E0	-9.19015E0	4.43459E-3	9.52721E-2	2.73173E1	-3.26909E1	-3.26027E1	2.68058E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-7.56431E-1	-7.34854E-1	-9.19507E0	-9.19006E0	4.43459E-3	9.49144E-2	2.73169E1	-3.26573E1	-3.25918E1	2.68526E1	1.19872E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.98819E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-7.56502E-1	-7.34806E-1	-9.19521E0	-9.18994E0	4.64916E-3	9.49383E-2	2.73039E1	-3.26428E1	-3.26248E1	2.6847E1	1.19851E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-7.56335E-1	-7.35021E-1	-9.19538E0	-9.19011E0	4.60148E-3	9.47952E-2	2.73153E1	-3.26657E1	-3.26206E1	2.6855E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.97901E-1