[Scan]
initial_time=2016-01-18T21:51:34
final_time=2016-01-18T21:51:54
ip_count=19
run=1024
dataset=9
scan=644
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-7.56454E-1
ql1_imon=1.39572E-8
ql2_vset=
ql2_vmon=-7.35116E-1
ql2_imon=1.97933E-9
ql3_vset=
ql3_vmon=-9.19507E0
ql3_imon=1.36209E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-1.6048E-10
mult1=-8.96979E-9
mult2=-2.70663E-9
rf_tmon=-5.08321E-3
rf_agc=3.27508E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.7136E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68781E0
bslens_imon=2.49241E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19457E1
lens5a_imon=1.99414E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04943E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.79205E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02282E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04732E1
cs_ea1_imon=2.50851E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36133E0
lens1_imon=2.78067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03497E1
cs_ea2_imon=1.49025E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.91567E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.25601E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15368E1
os_ea1_imon=2.41267E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28018E0
cs_ionrep_imon=1.21135E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.933E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02151E1
cs_anode1_imon=2.96252E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.25774E-8
tplens_vset=1.4E-1
tplens_vmon=1.65766E0
tplens_imon=-3.52727E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26374E1
iondef3_imon=1.50709E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2626E1
iondef2_imon=1.53816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02941E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.06229E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29203E0
ionrepsh_imon=1.77738E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33733E1
lens5b_imon=2.16746E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74459E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47547E0
os_ea2_imon=-6.22267E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.0051E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.15353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02633E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11069E1
os_restr2_imon=3.39031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.27944E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.25902E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.0953E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68833E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.88062E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.47521E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16318E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56561E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=2.76808E-1
window_imon=-7.27421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82681E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.36659E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.38576E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.44146E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18386E0
defgridb_imon=6.21356E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.41645E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0766E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63793E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=1.00352E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63213E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65069E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.65261E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.16936E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.93839E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22311E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82117E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.56407E-1	-7.34782E-1	-9.1953E0	-9.19001E0	4.45843E-3	9.50336E-2	2.72669E1	-3.26162E1	-3.26567E1	2.68532E1	1.19978E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.01209E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-7.56335E-1	-7.34711E-1	-9.19502E0	-9.18989E0	4.43459E-3	9.51052E-2	2.72861E1	-3.26811E1	-3.26083E1	2.68382E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-7.56526E-1	-7.34711E-1	-9.19504E0	-9.18994E0	4.22001E-3	9.53913E-2	2.73228E1	-3.26325E1	-3.2675E1	2.68118E1	1.20244E-7	2.52139E-3	2.52139E-3	6.31299E-3	2.99879E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.56454E-1	-7.34615E-1	-9.19468E0	-9.19027E0	4.45843E-3	9.53436E-2	2.73234E1	-3.26443E1	-3.26325E1	2.68684E1	1.19851E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-7.56717E-1	-7.34544E-1	-9.19499E0	-9.1903E0	4.48227E-3	9.52005E-2	2.73309E1	-3.26729E1	-3.25731E1	2.68142E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-7.56788E-1	-7.34711E-1	-9.19502E0	-9.19001E0	4.3869E-3	9.48191E-2	2.73393E1	-3.26476E1	-3.26414E1	2.68667E1	1.20278E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-7.56907E-1	-7.34782E-1	-9.19485E0	-9.18992E0	4.43459E-3	9.50575E-2	2.73083E1	-3.2661E1	-3.26286E1	2.68076E1	1.20078E-7	2.51783E-3	2.51783E-3	6.323E-3	3.00989E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.5655E-1	-7.34735E-1	-9.19495E0	-9.18984E0	4.50611E-3	9.51529E-2	2.73292E1	-3.26702E1	-3.25902E1	2.68943E1	1.20045E-7	2.52863E-3	2.52863E-3	6.34164E-3	3.01337E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.56478E-1	-7.34687E-1	-9.19511E0	-9.18996E0	4.45843E-3	9.51767E-2	2.73421E1	-3.2687E1	-3.26319E1	2.68445E1	1.19831E-7	2.51472E-3	2.51472E-3	6.3126E-3	2.98768E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.56383E-1	-7.34711E-1	-9.19514E0	-9.19003E0	4.57764E-3	9.49621E-2	2.73417E1	-3.26999E1	-3.26098E1	2.67962E1	1.19907E-7	2.51439E-3	2.51439E-3	6.32518E-3	3.00479E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-7.56359E-1	-7.34663E-1	-9.19478E0	-9.1902E0	4.52995E-3	9.50336E-2	2.73352E1	-3.2685E1	-3.26419E1	2.68713E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.56407E-1	-7.34615E-1	-9.19507E0	-9.18989E0	4.45843E-3	9.4676E-2	2.73207E1	-3.26362E1	-3.26416E1	2.68454E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.56431E-1	-7.34687E-1	-9.19499E0	-9.18982E0	4.48227E-3	9.46045E-2	2.73157E1	-3.26579E1	-3.25959E1	2.68389E1	1.19913E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-7.56574E-1	-7.34735E-1	-9.19533E0	-9.19003E0	4.55379E-3	9.48668E-2	2.73149E1	-3.2678E1	-3.26034E1	2.6828E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00453E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-7.56359E-1	-7.34782E-1	-9.19487E0	-9.19013E0	4.52995E-3	9.47952E-2	2.73033E1	-3.26708E1	-3.26207E1	2.68382E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-7.56359E-1	-7.34687E-1	-9.19509E0	-9.18982E0	4.673E-3	9.49144E-2	2.73207E1	-3.26825E1	-3.2638E1	2.68322E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99686E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-7.56335E-1	-7.34806E-1	-9.19509E0	-9.18968E0	4.33922E-3	9.5129E-2	2.73505E1	-3.2682E1	-3.26065E1	2.68022E1	1.19809E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-7.56407E-1	-7.34615E-1	-9.19483E0	-9.18992E0	4.43459E-3	9.51529E-2	2.73129E1	-3.26549E1	-3.26152E1	2.68708E1	1.19653E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-7.56359E-1	-7.3483E-1	-9.19514E0	-9.19006E0	4.36306E-3	9.47714E-2	2.72974E1	-3.26809E1	-3.25865E1	2.6819E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-7.56454E-1	-7.35116E-1	-9.19507E0	-9.18987E0	4.3869E-3	9.49144E-2	2.73129E1	-3.2626E1	-3.26374E1	2.68833E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01085E-1