[Scan]
initial_time=2016-01-18T21:52:01
final_time=2016-01-18T21:52:21
ip_count=19
run=1024
dataset=9
scan=645
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09356E0
qbias_imon=-1.08735E-4
ql1_vset=
ql1_vmon=-7.56264E-1
ql1_imon=1.39516E-8
ql2_vset=
ql2_vmon=-7.34258E-1
ql2_imon=1.99097E-9
ql3_vset=
ql3_vmon=-9.19509E0
ql3_imon=8.27074E-11
ql4_vset=
ql4_vmon=-9.18972E0
ql4_imon=-1.53458E-10
mult1=-1.06697E-8
mult2=-2.66054E-9
rf_tmon=-6.52694E-3
rf_agc=3.12327E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.69301E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=2.01129E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12443E2
lens4a_imon=2.04849E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54307E1
cs_ef1b_imon=2.78917E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.0239E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04422E1
cs_ea1_imon=2.51141E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35899E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64434E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03555E1
cs_ea2_imon=1.48038E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84634E1
cs_ef1a_imon=2.92215E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.25673E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.26715E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14893E1
os_ea1_imon=2.39177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=1.21174E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93664E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01521E1
cs_anode1_imon=2.94522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.25479E-8
tplens_vset=1.4E-1
tplens_vmon=1.68627E0
tplens_imon=-4.86476E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26001E1
iondef3_imon=1.52179E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26974E1
iondef2_imon=1.54727E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98084E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=3.96163E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27451E0
ionrepsh_imon=1.78441E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46092E0
os_ea2_imon=-6.70525E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.15173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04975E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.29259E-1
os_ef2bup_imon=-5.4306E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=3.40112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.2968E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.23344E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68545E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.88901E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.47223E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.64283E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.8614E1
mask2_imon=-8.89599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.74973E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.69498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.14095E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29335E0
defgridb_imon=5.94463E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3338E1
os_fil1_imon=9.42096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06855E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.637E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=1.00213E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63237E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64923E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91439E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86902E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.07588E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07615E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22231E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49391E-1
res40_imon=-2.64473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-7.56216E-1	-7.34448E-1	-9.19485E0	-9.19006E0	4.64916E-3	9.52244E-2	2.73387E1	-3.26765E1	-3.26549E1	2.68118E1	1.19913E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.99E-1
2.0E0	2.0E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-7.56264E-1	-7.34615E-1	-9.19495E0	-9.19027E0	4.52995E-3	9.52005E-2	2.73528E1	-3.26842E1	-3.25881E1	2.68869E1	1.19965E-7	2.52045E-3	2.52045E-3	6.32936E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-7.56359E-1	-7.34568E-1	-9.19526E0	-9.18984E0	4.57764E-3	9.49621E-2	2.73341E1	-3.2644E1	-3.26393E1	2.6807E1					
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09364E0	-7.56216E-1	-7.34591E-1	-9.19535E0	-9.18989E0	4.673E-3	9.48191E-2	2.73123E1	-3.26627E1	-3.26062E1	2.6792E1	1.19902E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-7.56192E-1	-7.3452E-1	-9.19516E0	-9.18982E0	4.8399E-3	9.50336E-2	2.73195E1	-3.26308E1	-3.26422E1	2.68496E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.56049E-1	-7.34568E-1	-9.19504E0	-9.19015E0	4.55379E-3	9.4986E-2	2.73263E1	-3.26443E1	-3.26478E1	2.6834E1	1.2033E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-7.56001E-1	-7.34663E-1	-9.19533E0	-9.19018E0	4.76837E-3	9.51767E-2	2.73411E1	-3.26579E1	-3.26518E1	2.684E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-7.56025E-1	-7.34568E-1	-9.19542E0	-9.18982E0	4.76837E-3	9.49383E-2	2.73219E1	-3.26627E1	-3.26152E1	2.68466E1	1.20122E-7	2.52867E-3	2.52867E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-7.56598E-1	-7.34496E-1	-9.19557E0	-9.19001E0	4.81606E-3	9.49383E-2	2.73395E1	-3.26798E1	-3.25694E1	2.68402E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-7.56264E-1	-7.34544E-1	-9.1953E0	-9.18987E0	5.05447E-3	9.4986E-2	2.73325E1	-3.26699E1	-3.26286E1	2.684E1	1.19834E-7	2.5249E-3	2.5249E-3	6.28976E-3	2.97727E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-7.56621E-1	-7.3421E-1	-9.19495E0	-9.19023E0	4.76837E-3	9.49621E-2	2.73339E1	-3.26415E1	-3.26267E1	2.68406E1	1.19721E-7	2.52066E-3	2.52066E-3	6.33021E-3	2.9675E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-7.56359E-1	-7.34138E-1	-9.19487E0	-9.19011E0	4.41074E-3	9.48429E-2	2.73231E1	-3.2635E1	-3.26849E1	2.67457E1	1.2027E-7	2.51532E-3	2.51532E-3	6.31429E-3	2.99804E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.56168E-1	-7.34353E-1	-9.19509E0	-9.19018E0	4.24385E-3	9.48429E-2	2.73558E1	-3.26638E1	-3.26502E1	2.69194E1	1.19809E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.99E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.56502E-1	-7.34806E-1	-9.19521E0	-9.18992E0	4.24385E-3	9.46999E-2	2.73492E1	-3.26254E1	-3.26181E1	2.67541E1	1.198E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99175E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.56264E-1	-7.3452E-1	-9.19504E0	-9.18996E0	4.17233E-3	9.4986E-2	2.72839E1	-3.26012E1	-3.2629E1	2.69542E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-7.56001E-1	-7.34496E-1	-9.19545E0	-9.19001E0	4.19617E-3	9.47952E-2	2.73087E1	-3.26344E1	-3.26585E1	2.68178E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09325E0	-7.55954E-1	-7.34234E-1	-9.19521E0	-9.18968E0	4.17233E-3	9.46045E-2	2.73069E1	-3.26086E1	-3.26326E1	2.6843E1	1.198E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-7.56598E-1	-7.34472E-1	-9.19507E0	-9.18958E0	4.33922E-3	9.47714E-2	2.72898E1	-3.26844E1	-3.26048E1	2.68511E1	1.19965E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9874E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-7.56526E-1	-7.34282E-1	-9.19502E0	-9.19018E0	4.41074E-3	9.50336E-2	2.73157E1	-3.26903E1	-3.26596E1	2.6804E1	1.19697E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09356E0	-7.56264E-1	-7.34258E-1	-9.19509E0	-9.18972E0	4.36306E-3	9.48191E-2	2.7321E1	-3.26974E1	-3.26001E1	2.68545E1	1.19913E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.99E-1