[Scan]
initial_time=2016-01-18T21:52:28
final_time=2016-01-18T21:52:47
ip_count=19
run=1024
dataset=9
scan=646
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-7.56621E-1
ql1_imon=1.39744E-8
ql2_vset=
ql2_vmon=-7.34591E-1
ql2_imon=1.96682E-9
ql3_vset=
ql3_vmon=-9.19487E0
ql3_imon=8.46863E-11
ql4_vset=
ql4_vmon=-9.1902E0
ql4_imon=-1.60563E-10
mult1=-1.01377E-8
mult2=-2.5689E-9
rf_tmon=-4.3502E-3
rf_agc=3.33396E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.72224E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62408E0
bslens_imon=2.26017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54277E1
cs_ef1b_imon=2.79133E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02449E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=2.52742E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30767E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64398E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0339E1
cs_ea2_imon=1.47549E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=2.91278E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.25636E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.27112E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15558E1
os_ea1_imon=2.39043E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=2.94666E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.24851E-8
tplens_vset=1.4E-1
tplens_vmon=1.65045E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2602E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27041E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.97967E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.01121E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32119E0
ionrepsh_imon=1.76389E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.16801E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46599E0
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00789E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.15497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02513E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.38959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.2547E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68587E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.87221E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.46939E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15897E0
cs_ionaccel_imon=-1.68608E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.8626E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.35397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.67984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.18093E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47976E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.42384E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06735E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63576E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30932E1
cs_fil1_imon=1.00241E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63345E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64782E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56381E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.25884E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22179E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.56889E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-7.5624E-1	-7.34401E-1	-9.19511E0	-9.19001E0	4.62532E-3	9.49383E-2	2.73322E1	-3.26431E1	-3.25924E1	2.68343E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9952E-1
2.0E0	5.8E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-7.56264E-1	-7.34377E-1	-9.19507E0	-9.18984E0	4.64916E-3	9.50098E-2	2.73577E1	-3.26303E1	-3.26432E1	2.68545E1	1.20142E-7	2.51814E-3	2.51814E-3	6.31269E-3	2.99845E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-7.56145E-1	-7.34568E-1	-9.19521E0	-9.18965E0	4.52995E-3	9.47237E-2	2.73097E1	-3.26341E1	-3.26729E1	2.6843E1	1.20084E-7	2.51915E-3	2.51915E-3	6.34661E-3	3.01742E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09271E0	-7.56097E-1	-7.34353E-1	-9.19492E0	-9.19006E0	4.62532E-3	9.51529E-2	2.73474E1	-3.26753E1	-3.26214E1	2.68054E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09325E0	-7.56145E-1	-7.34591E-1	-9.19535E0	-9.18984E0	4.673E-3	9.4986E-2	2.73427E1	-3.25975E1	-3.25856E1	2.68238E1	1.19979E-7	2.51265E-3	2.51265E-3	6.30221E-3	3.00494E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-7.56073E-1	-7.34544E-1	-9.19533E0	-9.18989E0	4.55379E-3	9.47237E-2	2.73303E1	-3.26717E1	-3.26088E1	2.68283E1	1.19891E-7	2.51182E-3	2.51182E-3	6.31798E-3	3.00852E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-7.56097E-1	-7.34472E-1	-9.19526E0	-9.19025E0	4.29153E-3	9.48429E-2	2.73484E1	-3.26248E1	-3.26476E1	2.68475E1	1.20019E-7	2.51793E-3	2.51793E-3	6.33706E-3	3.01043E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09286E0	-7.56001E-1	-7.34949E-1	-9.19521E0	-9.18999E0	4.26769E-3	9.48191E-2	2.73299E1	-3.26921E1	-3.26172E1	2.68458E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-7.56288E-1	-7.34377E-1	-9.1953E0	-9.18992E0	4.45843E-3	9.49383E-2	2.7352E1	-3.26711E1	-3.26927E1	2.68869E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.97445E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-7.56431E-1	-7.34448E-1	-9.19516E0	-9.18977E0	4.33922E-3	9.50813E-2	2.72921E1	-3.26815E1	-3.25865E1	2.68538E1	1.19809E-7	2.52647E-3	2.52647E-3	6.33486E-3	2.97704E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-7.56526E-1	-7.34568E-1	-9.19511E0	-9.19003E0	4.57764E-3	9.51767E-2	2.73261E1	-3.26573E1	-3.26494E1	2.6796E1	1.198E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.99175E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-7.56431E-1	-7.34448E-1	-9.19511E0	-9.18977E0	4.33922E-3	9.53674E-2	2.73021E1	-3.26777E1	-3.26374E1	2.68689E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
1.6E1	1.0E0	1.0E0	6.47E2	4.41E2	-2.09325E0	-7.56717E-1	-7.34544E-1	-9.19492E0	-9.18989E0	4.79221E-3	9.53197E-2	2.73111E1	-3.26747E1	-3.26008E1	2.68328E1	1.19809E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-7.56645E-1	-7.34448E-1	-9.19478E0	-9.19003E0	4.93526E-3	9.53913E-2	2.73806E1	-3.2626E1	-3.26425E1	2.68448E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-7.56621E-1	-7.34758E-1	-9.19518E0	-9.1902E0	4.64916E-3	9.4986E-2	2.73167E1	-3.26793E1	-3.26095E1	2.6816E1	1.19965E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.9952E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-7.56693E-1	-7.34782E-1	-9.19509E0	-9.18972E0	4.88758E-3	9.52482E-2	2.73198E1	-3.26307E1	-3.26372E1	2.68178E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-7.56645E-1	-7.34353E-1	-9.19487E0	-9.19006E0	4.72069E-3	9.5129E-2	2.73538E1	-3.26627E1	-3.26554E1	2.68352E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-7.56645E-1	-7.34782E-1	-9.19497E0	-9.18982E0	4.60148E-3	9.50336E-2	2.73175E1	-3.26508E1	-3.26189E1	2.6831E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.97647E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-7.56621E-1	-7.34425E-1	-9.19499E0	-9.18992E0	4.74453E-3	9.51052E-2	2.73092E1	-3.2639E1	-3.2616E1	2.68082E1	1.19757E-7	2.52318E-3	2.52318E-3	6.29098E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-7.56621E-1	-7.34591E-1	-9.19487E0	-9.1902E0	4.72069E-3	9.48906E-2	2.73105E1	-3.27041E1	-3.2602E1	2.68587E1	1.19902E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00966E-1