[Scan]
initial_time=2016-01-18T21:54:42
final_time=2016-01-18T21:55:02
ip_count=19
run=1024
dataset=9
scan=651
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08841E-4
ql1_vset=
ql1_vmon=-7.56288E-1
ql1_imon=1.39796E-8
ql2_vset=
ql2_vmon=-7.34377E-1
ql2_imon=1.96332E-9
ql3_vset=
ql3_vmon=-9.19516E0
ql3_imon=1.08707E-10
ql4_vset=
ql4_vmon=-9.18958E0
ql4_imon=-1.41454E-10
mult1=-1.00173E-8
mult2=-2.61082E-9
rf_tmon=-4.90897E-3
rf_agc=3.25825E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.7373E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66912E0
bslens_imon=2.61652E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=1.97693E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05214E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53989E1
cs_ef1b_imon=2.78628E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02176E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=2.53412E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34012E0
lens1_imon=2.84057E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.95783E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0399E1
cs_ea2_imon=1.48622E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.92071E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.2592E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11586E1
os_restr1_imon=4.26535E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14657E1
os_ea1_imon=2.41585E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23741E0
cs_ionrep_imon=1.16373E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91943E2
cs_nozzle_imon=1.93707E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=2.95459E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.26049E-8
tplens_vset=1.4E-1
tplens_vmon=1.62001E0
tplens_imon=-2.96149E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2653E1
iondef3_imon=1.50569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27023E1
iondef2_imon=1.55931E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.97975E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.00375E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31699E0
ionrepsh_imon=1.78006E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33137E1
lens5b_imon=2.1525E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54777E0
os_ea2_imon=-5.67949E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.0056E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.15245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.4141E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.27174E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.24749E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.12443E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6843E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.92051E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.47251E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.48577E-1
window_imon=-8.39144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.8505E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.65679E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.45382E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47709E0
defgridb_imon=5.74589E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.41561E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08422E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63687E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=1.00057E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62912E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64775E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.80448E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79694E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.15716E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22164E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0314E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-7.55978E-1	-7.34758E-1	-9.19528E0	-9.19013E0	4.24385E-3	9.50575E-2	2.73445E1	-3.26805E1	-3.26312E1	2.68129E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00676E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-7.56001E-1	-7.34901E-1	-9.19538E0	-9.19008E0	4.36306E-3	9.51529E-2	2.73247E1	-3.26756E1	-3.25685E1	2.68425E1	1.20243E-7	2.52342E-3	2.52342E-3	6.31269E-3	3.01356E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-7.56121E-1	-7.34806E-1	-9.19497E0	-9.18994E0	4.41074E-3	9.50575E-2	2.73458E1	-3.26419E1	-3.26236E1	2.68526E1	1.19766E-7	2.52697E-3	2.52697E-3	6.32418E-3	2.99348E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-7.55954E-1	-7.34949E-1	-9.19504E0	-9.18968E0	4.36306E-3	9.50336E-2	2.72964E1	-3.26463E1	-3.26724E1	2.68667E1	1.20055E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-7.55954E-1	-7.34758E-1	-9.19507E0	-9.18999E0	4.36306E-3	9.47952E-2	2.73014E1	-3.26376E1	-3.26566E1	2.68599E1	1.19941E-7	2.51709E-3	2.51709E-3	6.33388E-3	2.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.55882E-1	-7.34711E-1	-9.19495E0	-9.18994E0	4.8399E-3	9.4676E-2	2.73747E1	-3.26296E1	-3.25829E1	2.6816E1	1.20457E-7	2.5147E-3	2.5147E-3	6.34099E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-7.56502E-1	-7.34591E-1	-9.19502E0	-9.19008E0	4.41074E-3	9.49621E-2	2.73093E1	-3.26873E1	-3.2629E1	2.68376E1	1.20158E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-7.56335E-1	-7.34854E-1	-9.19497E0	-9.18982E0	4.50611E-3	9.49144E-2	2.73381E1	-3.2626E1	-3.2596E1	2.68545E1	1.19965E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.56073E-1	-7.34782E-1	-9.19507E0	-9.1898E0	4.69685E-3	9.45568E-2	2.72937E1	-3.26374E1	-3.26849E1	2.68346E1	1.19861E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-7.56121E-1	-7.34925E-1	-9.19521E0	-9.19006E0	4.55379E-3	9.52482E-2	2.72806E1	-3.26682E1	-3.2563E1	2.68328E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-7.56145E-1	-7.34615E-1	-9.19518E0	-9.19006E0	4.57764E-3	9.51767E-2	2.73546E1	-3.26708E1	-3.26443E1	2.68221E1	1.20137E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.0041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-7.56025E-1	-7.34568E-1	-9.19547E0	-9.18987E0	4.50611E-3	9.5129E-2	2.73387E1	-3.26455E1	-3.26154E1	2.68635E1	1.20055E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-7.56097E-1	-7.34806E-1	-9.19552E0	-9.18975E0	4.55379E-3	9.4986E-2	2.7337E1	-3.26921E1	-3.25971E1	2.68238E1	1.19851E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.0071E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-7.56121E-1	-7.34949E-1	-9.19533E0	-9.18941E0	4.60148E-3	9.55105E-2	2.73029E1	-3.26478E1	-3.26629E1	2.68479E1	1.20017E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.56168E-1	-7.3483E-1	-9.19523E0	-9.18958E0	4.52995E-3	9.50575E-2	2.73369E1	-3.2698E1	-3.26221E1	2.68572E1	1.20051E-7	2.51323E-3	2.51323E-3	6.3275E-3	3.0101E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-7.5624E-1	-7.34901E-1	-9.19528E0	-9.18992E0	4.48227E-3	9.4986E-2	2.73357E1	-3.26494E1	-3.26554E1	2.67849E1	1.20132E-7	2.52502E-3	2.52502E-3	6.32518E-3	3.00761E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-7.56764E-1	-7.34806E-1	-9.19526E0	-9.1898E0	4.36306E-3	9.4986E-2	2.73139E1	-3.26673E1	-3.26154E1	2.68331E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-7.56311E-1	-7.34806E-1	-9.19516E0	-9.18975E0	4.33922E-3	9.49144E-2	2.72696E1	-3.26945E1	-3.27191E1	2.68569E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02769E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-7.56431E-1	-7.34544E-1	-9.19518E0	-9.18994E0	4.45843E-3	9.48191E-2	2.73045E1	-3.26726E1	-3.26555E1	2.67694E1	1.20278E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-7.56288E-1	-7.34377E-1	-9.19516E0	-9.18958E0	4.673E-3	9.48906E-2	2.73093E1	-3.27023E1	-3.2653E1	2.6843E1	1.19902E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00966E-1