[Scan]
initial_time=2016-01-18T21:55:09
final_time=2016-01-18T21:55:28
ip_count=19
run=1024
dataset=9
scan=652
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-7.56073E-1
ql1_imon=1.39807E-8
ql2_vset=
ql2_vmon=-7.34687E-1
ql2_imon=1.99021E-9
ql3_vset=
ql3_vmon=-9.19509E0
ql3_imon=9.48787E-11
ql4_vset=
ql4_vmon=-9.1897E0
ql4_imon=-1.60432E-10
mult1=-9.66486E-9
mult2=-2.74285E-9
rf_tmon=-4.77493E-3
rf_agc=3.35746E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.69007E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.0481E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53783E1
cs_ef1b_imon=2.78791E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02284E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.51141E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31475E0
lens1_imon=2.92551E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65176E1
os_ef1alow_imon=2.97418E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04192E1
cs_ea2_imon=1.48887E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84023E1
cs_ef1a_imon=2.92414E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.25468E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1161E1
os_restr1_imon=4.26732E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.36275E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63786E1
os_ef1bup_imon=3.07079E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.222E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02122E1
cs_anode1_imon=2.95368E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.25376E-8
tplens_vset=1.4E-1
tplens_vmon=1.61548E0
tplens_imon=-1.50232E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25369E1
iondef3_imon=1.50657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2672E1
iondef2_imon=1.5455E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.9824E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=4.04364E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31522E0
ionrepsh_imon=1.75999E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.16525E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74739E1
cs_ef2b_imon=3.12292E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49042E0
os_ea2_imon=-8.86429E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00701E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.17192E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07946E0
os_ef2alow_imon=-2.63019E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.38259E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11465E1
os_restr2_imon=3.40998E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22984E2
cs_ionfoca_imon=6.25469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.22561E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.12148E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69159E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.8851E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.48951E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11914E0
cs_ionaccel_imon=-1.87606E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.60791E-6
window_vset=0.0E0
window_vmon=2.32745E-1
window_imon=-7.01421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39039E-4
mask2_vset=0.0E0
mask2_vmon=-1.86263E1
mask2_imon=-4.7553E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.73557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.82948E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.29314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50891E0
defgridb_imon=5.619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.42727E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07949E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63567E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30912E1
cs_fil1_imon=1.00045E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62812E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64986E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.85107E-2
os_fil2_imon=-2.70394E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79072E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.28849E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.82557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.99087E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.81592E-1
res40_imon=-2.49465E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-7.56073E-1	-7.34496E-1	-9.1953E0	-9.18992E0	4.74453E-3	9.49144E-2	2.73252E1	-3.26372E1	-3.25995E1	2.68076E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01738E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-7.56168E-1	-7.34496E-1	-9.19502E0	-9.19011E0	4.24385E-3	9.48668E-2	2.73265E1	-3.26438E1	-3.27356E1	2.68538E1	1.19902E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-7.56097E-1	-7.34472E-1	-9.19523E0	-9.1902E0	4.45843E-3	9.48906E-2	2.73277E1	-3.27094E1	-3.25101E1	2.67937E1	1.20137E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.00942E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-7.56073E-1	-7.34639E-1	-9.19545E0	-9.18992E0	4.52995E-3	9.46999E-2	2.73424E1	-3.26444E1	-3.27258E1	2.68244E1	1.19851E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-7.56049E-1	-7.34639E-1	-9.19542E0	-9.18992E0	4.57764E-3	9.48906E-2	2.73261E1	-3.26362E1	-3.25689E1	2.67949E1	1.20084E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.00942E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-7.56216E-1	-7.34568E-1	-9.19521E0	-9.18994E0	4.3869E-3	9.50336E-2	2.72974E1	-3.26933E1	-3.26154E1	2.68941E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-7.56311E-1	-7.3452E-1	-9.1953E0	-9.18999E0	4.57764E-3	9.5129E-2	2.73075E1	-3.26699E1	-3.26705E1	2.68004E1	1.20004E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.56168E-1	-7.34448E-1	-9.19535E0	-9.19015E0	4.52995E-3	9.50336E-2	2.73039E1	-3.26254E1	-3.25985E1	2.68526E1	1.19757E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-7.5624E-1	-7.34401E-1	-9.19514E0	-9.18992E0	4.50611E-3	9.5129E-2	2.7321E1	-3.26803E1	-3.26408E1	2.6831E1	1.20084E-7	2.52585E-3	2.52585E-3	6.30182E-3	2.99348E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.56168E-1	-7.34496E-1	-9.19516E0	-9.1902E0	4.24385E-3	9.50575E-2	2.73387E1	-3.26536E1	-3.25816E1	2.68376E1	1.20363E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99686E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-7.5624E-1	-7.34615E-1	-9.19533E0	-9.18987E0	4.26769E-3	9.50575E-2	2.73345E1	-3.26524E1	-3.26398E1	2.68082E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-7.56311E-1	-7.34687E-1	-9.19511E0	-9.18987E0	4.64916E-3	9.4986E-2	2.73177E1	-3.26591E1	-3.27047E1	2.68653E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-7.56145E-1	-7.34496E-1	-9.19521E0	-9.18972E0	4.60148E-3	9.4986E-2	2.73234E1	-3.2652E1	-3.26649E1	2.68615E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-7.56431E-1	-7.34472E-1	-9.19499E0	-9.18972E0	4.86374E-3	9.53197E-2	2.73405E1	-3.26579E1	-3.26182E1	2.68462E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0148E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-7.56669E-1	-7.34496E-1	-9.19542E0	-9.19001E0	4.74453E-3	9.4986E-2	2.73086E1	-3.26703E1	-3.25806E1	2.67879E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-7.56359E-1	-7.34496E-1	-9.19535E0	-9.19013E0	4.60148E-3	9.45807E-2	2.73302E1	-3.2667E1	-3.27227E1	2.68418E1	1.198E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99175E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-7.56502E-1	-7.34353E-1	-9.19535E0	-9.19015E0	4.91142E-3	9.46999E-2	2.73339E1	-3.26725E1	-3.2593E1	2.67963E1	1.20084E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.98554E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.56359E-1	-7.34568E-1	-9.19528E0	-9.18992E0	4.88758E-3	9.47714E-2	2.72903E1	-3.258E1	-3.25711E1	2.68869E1	1.19766E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.00144E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-7.56454E-1	-7.34782E-1	-9.19509E0	-9.19003E0	4.95911E-3	9.47952E-2	2.73198E1	-3.26531E1	-3.27428E1	2.68099E1	1.19953E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-7.56073E-1	-7.34687E-1	-9.19509E0	-9.1897E0	4.91142E-3	9.5129E-2	2.73187E1	-3.2672E1	-3.25369E1	2.69159E1	1.20106E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99941E-1