[Scan]
initial_time=2016-01-18T21:55:36
final_time=2016-01-18T21:55:55
ip_count=19
run=1024
dataset=9
scan=653
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-7.56454E-1
ql1_imon=1.39693E-8
ql2_vset=
ql2_vmon=-7.34329E-1
ql2_imon=2.00665E-9
ql3_vset=
ql3_vmon=-9.19549E0
ql3_imon=1.23751E-10
ql4_vset=
ql4_vmon=-9.18999E0
ql4_imon=-1.5589E-10
mult1=-9.51162E-9
mult2=-2.72859E-9
rf_tmon=-4.83086E-3
rf_agc=3.27928E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.66609E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68075E0
bslens_imon=2.18678E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19456E1
lens5a_imon=1.98868E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05144E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54018E1
cs_ef1b_imon=2.78359E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02147E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04651E1
cs_ea1_imon=2.53853E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33522E0
lens1_imon=2.7818E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64893E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03715E1
cs_ea2_imon=1.48695E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=2.91762E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.25231E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1138E1
os_restr1_imon=4.26376E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15477E1
os_ea1_imon=2.40336E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63602E1
os_ef1bup_imon=3.07404E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26495E0
cs_ionrep_imon=1.19422E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0184E1
cs_anode1_imon=2.92974E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.25874E-8
tplens_vset=1.4E-1
tplens_vmon=1.66347E0
tplens_imon=-3.29206E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25629E1
iondef3_imon=1.50495E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.56739E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98214E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=3.98896E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28271E0
ionrepsh_imon=1.77198E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.16756E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12545E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46513E0
os_ea2_imon=-7.80981E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.0052E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71398E1
cs_ef2a_imon=3.1607E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05609E0
os_ef2alow_imon=-2.55694E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89264E-1
os_ef2bup_imon=-5.31092E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11338E1
os_restr2_imon=3.40158E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.27945E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01552E1
cs_anode2_imon=2.2339E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73345E1
iondef1_imon=1.09725E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68974E1
iondef4_imon=1.08714E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.77753E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.46225E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13871E0
cs_ionaccel_imon=-1.7895E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47402E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56277E1
einzel_imon=7.60338E-6
window_vset=0.0E0
window_vmon=2.50515E-1
window_imon=-7.20961E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39187E-4
mask2_vset=0.0E0
mask2_vmon=-1.86295E1
mask2_imon=-8.3112E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.43178E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.59802E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=6.85145E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3392E0
defgridb_imon=6.11319E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.41979E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07268E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63709E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30898E1
cs_fil1_imon=9.98669E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63939E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6487E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76506E-2
os_fil2_imon=-2.73771E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.12564E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35786E-1
cs_fil2_imon=-2.67651E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0995E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2221E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.27575E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.5655E-1	-7.34854E-1	-9.19487E0	-9.18984E0	4.8399E-3	9.5439E-2	2.73275E1	-3.26703E1	-3.27027E1	2.68094E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-7.56359E-1	-7.34711E-1	-9.19516E0	-9.19003E0	4.62532E-3	9.50336E-2	2.73259E1	-3.26682E1	-3.2604E1	2.68304E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-7.56073E-1	-7.34591E-1	-9.19523E0	-9.18996E0	4.62532E-3	9.50336E-2	2.7324E1	-3.26691E1	-3.26826E1	2.68142E1	1.20137E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.00144E-1
4.0E0	1.3E1	0.0E0	6.55E2	3.98E2	-2.09433E0	-7.5624E-1	-7.34568E-1	-9.19526E0	-9.18975E0	4.673E-3	9.52721E-2	2.73405E1	-3.26708E1	-3.2672E1	2.68487E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-7.56216E-1	-7.34854E-1	-9.19526E0	-9.1898E0	4.72069E-3	9.49621E-2	2.73177E1	-3.26693E1	-3.25389E1	2.68202E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-7.56288E-1	-7.34687E-1	-9.1953E0	-9.18994E0	4.64916E-3	9.53674E-2	2.73098E1	-3.26531E1	-3.26567E1	2.68448E1	1.19757E-7	2.52647E-3	2.52647E-3	6.31288E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-7.56073E-1	-7.34544E-1	-9.19495E0	-9.18989E0	4.55379E-3	9.52482E-2	2.73165E1	-3.26549E1	-3.26218E1	2.68526E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-7.56431E-1	-7.34591E-1	-9.19497E0	-9.18956E0	4.3869E-3	9.50336E-2	2.73129E1	-3.26266E1	-3.26362E1	2.68424E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-7.56121E-1	-7.34854E-1	-9.19504E0	-9.1898E0	4.62532E-3	9.51052E-2	2.73222E1	-3.26726E1	-3.25871E1	2.68364E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-7.56502E-1	-7.34329E-1	-9.1953E0	-9.18996E0	4.72069E-3	9.47714E-2	2.73411E1	-3.26645E1	-3.2644E1	2.68364E1	1.19841E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.99845E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-7.56431E-1	-7.34663E-1	-9.19516E0	-9.18992E0	4.55379E-3	9.49383E-2	2.72993E1	-3.26776E1	-3.26724E1	2.6825E1	1.19766E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.99879E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-7.56264E-1	-7.34639E-1	-9.19528E0	-9.18996E0	4.57764E-3	9.50336E-2	2.73297E1	-3.26819E1	-3.25689E1	2.68184E1	1.19941E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.006E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-7.5655E-1	-7.34544E-1	-9.19516E0	-9.18992E0	4.76837E-3	9.54151E-2	2.73369E1	-3.26549E1	-3.2644E1	2.67926E1	1.19757E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9952E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-7.56431E-1	-7.34568E-1	-9.19499E0	-9.18989E0	4.76837E-3	9.50575E-2	2.73249E1	-3.26699E1	-3.26194E1	2.68623E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.98222E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-7.56621E-1	-7.34282E-1	-9.19518E0	-9.19013E0	4.79221E-3	9.4986E-2	2.73273E1	-3.26561E1	-3.27023E1	2.68088E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.97704E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.56764E-1	-7.34401E-1	-9.19528E0	-9.18989E0	4.81606E-3	9.48191E-2	2.73039E1	-3.26488E1	-3.26825E1	2.68623E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.98481E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-7.56598E-1	-7.34544E-1	-9.19545E0	-9.18984E0	4.88758E-3	9.50098E-2	2.73169E1	-3.26608E1	-3.2649E1	2.68522E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.97187E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-7.5686E-1	-7.34448E-1	-9.19554E0	-9.18972E0	4.74453E-3	9.50575E-2	2.72538E1	-3.26697E1	-3.27021E1	2.68064E1	1.1979E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.99343E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-7.5655E-1	-7.34305E-1	-9.19523E0	-9.18989E0	4.81606E-3	9.50336E-2	2.73016E1	-3.26301E1	-3.27322E1	2.6834E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.56454E-1	-7.34329E-1	-9.19549E0	-9.18999E0	4.673E-3	9.4986E-2	2.73345E1	-3.26458E1	-3.25629E1	2.68974E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99941E-1