[Scan]
initial_time=2016-01-18T21:56:02
final_time=2016-01-18T21:56:22
ip_count=19
run=1024
dataset=9
scan=654
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08847E-4
ql1_vset=
ql1_vmon=-7.5624E-1
ql1_imon=1.39985E-8
ql2_vset=
ql2_vmon=-7.34758E-1
ql2_imon=2.00846E-9
ql3_vset=
ql3_vmon=-9.19533E0
ql3_imon=7.13706E-11
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-1.73545E-10
mult1=-9.74761E-9
mult2=-2.72914E-9
rf_tmon=-5.27045E-3
rf_agc=3.35156E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.67422E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04767E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=2.77259E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04428E1
cs_ea1_imon=2.55388E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34837E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03596E1
cs_ea2_imon=1.49843E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.92468E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.2519E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.26932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14527E1
os_ea1_imon=2.4123E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64092E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.18059E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91943E2
cs_nozzle_imon=1.93494E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.95603E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.2392E-8
tplens_vset=1.4E-1
tplens_vmon=1.6668E0
tplens_imon=-3.59057E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26472E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26508E1
iondef2_imon=1.54869E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98003E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.04619E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=1.77875E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.16879E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48216E0
os_ea2_imon=-7.97944E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.15245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=3.4022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.28689E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.24713E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72998E1
iondef1_imon=1.09706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68701E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.86287E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.44386E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-1.63562E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02138E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.55785E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86314E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.40995E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.07205E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.08786E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44099E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33365E1
os_fil1_imon=9.43099E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06951E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63519E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3087E1
cs_fil1_imon=9.99501E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63147E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6481E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82575E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98915E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.11384E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22337E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9413E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.55954E-1	-7.34353E-1	-9.19502E0	-9.19008E0	4.69685E-3	9.49383E-2	2.73428E1	-3.2639E1	-3.26402E1	2.68233E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9841E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-7.5624E-1	-7.34568E-1	-9.19518E0	-9.19011E0	4.55379E-3	9.52005E-2	2.73375E1	-3.26518E1	-3.25948E1	2.68581E1	1.20466E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.97394E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-7.56335E-1	-7.3452E-1	-9.19523E0	-9.19001E0	4.48227E-3	9.50813E-2	2.73144E1	-3.26724E1	-3.26648E1	2.68348E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00041E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.5624E-1	-7.34544E-1	-9.19499E0	-9.19044E0	4.52995E-3	9.49383E-2	2.73225E1	-3.26446E1	-3.25743E1	2.6834E1	1.20092E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-7.56359E-1	-7.34591E-1	-9.1954E0	-9.19034E0	4.50611E-3	9.51529E-2	2.73093E1	-3.26506E1	-3.26543E1	2.68232E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-7.56502E-1	-7.34353E-1	-9.19533E0	-9.19008E0	4.57764E-3	9.49383E-2	2.73175E1	-3.26437E1	-3.26195E1	2.68719E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-7.5624E-1	-7.34353E-1	-9.19485E0	-9.19042E0	4.26769E-3	9.48191E-2	2.73099E1	-3.2632E1	-3.26104E1	2.68238E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.56335E-1	-7.34496E-1	-9.19499E0	-9.18987E0	4.57764E-3	9.49144E-2	2.73351E1	-3.26554E1	-3.26254E1	2.68032E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.98222E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-7.56288E-1	-7.34806E-1	-9.19516E0	-9.19003E0	4.673E-3	9.48668E-2	2.73175E1	-3.26549E1	-3.25983E1	2.68719E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-7.56145E-1	-7.3483E-1	-9.19499E0	-9.18994E0	4.81606E-3	9.50575E-2	2.73189E1	-3.26597E1	-3.25701E1	2.68611E1	1.19697E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-7.56645E-1	-7.34806E-1	-9.19507E0	-9.18965E0	4.64916E-3	9.49383E-2	2.73271E1	-3.26817E1	-3.26027E1	2.69031E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-7.56335E-1	-7.34663E-1	-9.19487E0	-9.18939E0	4.62532E-3	9.52244E-2	2.7324E1	-3.26626E1	-3.26567E1	2.68322E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-7.56574E-1	-7.34615E-1	-9.19497E0	-9.1898E0	4.8399E-3	9.48429E-2	2.73015E1	-3.26939E1	-3.25984E1	2.68016E1	1.20017E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.9978E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-7.5655E-1	-7.34663E-1	-9.19528E0	-9.18987E0	4.673E-3	9.46522E-2	2.73269E1	-3.26897E1	-3.26172E1	2.68304E1	1.19601E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-7.56454E-1	-7.34806E-1	-9.19535E0	-9.18992E0	4.55379E-3	9.48429E-2	2.73243E1	-3.26549E1	-3.26194E1	2.68268E1	1.20106E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.56431E-1	-7.34639E-1	-9.19547E0	-9.19006E0	4.52995E-3	9.49383E-2	2.73496E1	-3.26723E1	-3.26651E1	2.68328E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-7.56407E-1	-7.34687E-1	-9.19528E0	-9.18994E0	4.24385E-3	9.4676E-2	2.72895E1	-3.26723E1	-3.26308E1	2.69032E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-7.56454E-1	-7.34925E-1	-9.19533E0	-9.19025E0	4.52995E-3	9.49621E-2	2.73257E1	-3.26803E1	-3.26703E1	2.6837E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.56311E-1	-7.34663E-1	-9.19545E0	-9.18999E0	4.52995E-3	9.50575E-2	2.73517E1	-3.26549E1	-3.2613E1	2.68366E1	1.19851E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-7.5624E-1	-7.34758E-1	-9.19533E0	-9.18987E0	4.43459E-3	9.49621E-2	2.72998E1	-3.26508E1	-3.26472E1	2.68701E1	1.20158E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.00453E-1