[Scan]
initial_time=2016-01-18T21:56:29
final_time=2016-01-18T21:56:49
ip_count=19
run=1024
dataset=9
scan=655
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-7.56669E-1
ql1_imon=1.39773E-8
ql2_vset=
ql2_vmon=-7.34591E-1
ql2_imon=2.02596E-9
ql3_vset=
ql3_vmon=-9.19526E0
ql3_imon=8.11577E-11
ql4_vset=
ql4_vmon=-9.18963E0
ql4_imon=-1.54567E-10
mult1=-1.0222E-8
mult2=-2.66871E-9
rf_tmon=-5.16732E-3
rf_agc=3.30211E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.66439E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=2.34505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19577E1
lens5a_imon=1.99571E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=2.79746E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04445E1
cs_ea1_imon=2.53689E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36607E0
lens1_imon=2.7804E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.48462E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=2.90197E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.25093E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.28625E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15028E1
os_ea1_imon=2.38894E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.06631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23735E0
cs_ionrep_imon=1.19368E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=2.93261E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.25537E-8
tplens_vset=1.4E-1
tplens_vmon=1.66385E0
tplens_imon=-4.29845E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26627E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.57665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.0163E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=1.74937E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51047E0
os_ea2_imon=-7.83786E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71414E1
cs_ef2a_imon=3.15353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60183E-1
os_ef2bup_imon=-5.13147E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.40545E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.28725E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01467E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73015E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.85132E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.46909E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15717E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-7.02193E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86182E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.51613E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93673E3
defgrida_imon=6.29503E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.25067E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58863E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3338E1
os_fil1_imon=9.45706E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07287E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63487E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.99945E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64788E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83841E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.27077E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-3.25462E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22191E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.02115E-1
chamber_ion_pmon=1.19841E-7
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.77912E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-7.5624E-1	-7.34782E-1	-9.19483E0	-9.18982E0	4.36306E-3	9.49144E-2	2.73499E1	-3.26797E1	-3.26325E1	2.68151E1	1.19965E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9952E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-7.56216E-1	-7.34615E-1	-9.19487E0	-9.18996E0	4.43459E-3	9.47952E-2	2.73375E1	-3.26554E1	-3.26254E1	2.68494E1	1.19991E-7	2.51919E-3	2.51919E-3	6.33388E-3	2.99594E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-7.56288E-1	-7.34377E-1	-9.19476E0	-9.19008E0	4.50611E-3	9.51052E-2	2.73364E1	-3.26887E1	-3.26101E1	2.68536E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99613E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09348E0	-7.56431E-1	-7.34544E-1	-9.19521E0	-9.18987E0	4.57764E-3	9.50575E-2	2.73272E1	-3.26565E1	-3.26688E1	2.68179E1	1.19956E-7	2.51423E-3	2.51423E-3	6.3074E-3	2.99577E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-7.56407E-1	-7.3452E-1	-9.19492E0	-9.18989E0	4.48227E-3	9.49383E-2	2.73364E1	-3.27077E1	-3.27025E1	2.68394E1	1.19794E-7	2.52621E-3	2.52621E-3	6.32518E-3	2.99634E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-7.5624E-1	-7.34377E-1	-9.19499E0	-9.18994E0	4.14848E-3	9.5129E-2	2.73219E1	-3.26332E1	-3.25701E1	2.68508E1	1.198E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-7.56502E-1	-7.34568E-1	-9.19487E0	-9.19025E0	4.31538E-3	9.51529E-2	2.73369E1	-3.26284E1	-3.26711E1	2.68296E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-7.56454E-1	-7.34949E-1	-9.19511E0	-9.19003E0	4.31538E-3	9.49383E-2	2.72957E1	-3.26667E1	-3.25234E1	2.68605E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-7.5624E-1	-7.3452E-1	-9.19502E0	-9.19006E0	4.62532E-3	9.49621E-2	2.72835E1	-3.2641E1	-3.26302E1	2.67836E1	1.198E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.97647E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.56264E-1	-7.34591E-1	-9.19499E0	-9.1903E0	4.3869E-3	9.5129E-2	2.73339E1	-3.26795E1	-3.26795E1	2.68358E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9926E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-7.56168E-1	-7.34854E-1	-9.1949E0	-9.18987E0	4.26769E-3	9.52005E-2	2.7301E1	-3.26779E1	-3.25653E1	2.6852E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.56478E-1	-7.34568E-1	-9.19507E0	-9.19027E0	4.33922E-3	9.49144E-2	2.73303E1	-3.26554E1	-3.26921E1	2.68146E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-7.56407E-1	-7.34782E-1	-9.19485E0	-9.19008E0	4.55379E-3	9.51529E-2	2.73309E1	-3.26434E1	-3.26543E1	2.67864E1	1.20017E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.01871E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.56311E-1	-7.34663E-1	-9.19497E0	-9.18999E0	4.22001E-3	9.4986E-2	2.73472E1	-3.26284E1	-3.26368E1	2.68713E1	1.2033E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-7.56311E-1	-7.34687E-1	-9.19514E0	-9.18996E0	4.14848E-3	9.49144E-2	2.73171E1	-3.26597E1	-3.26074E1	2.6819E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.56645E-1	-7.34401E-1	-9.19521E0	-9.18977E0	4.31538E-3	9.50098E-2	2.73305E1	-3.26685E1	-3.26284E1	2.68599E1	1.20055E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.9892E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-7.56502E-1	-7.34544E-1	-9.19526E0	-9.18984E0	4.41074E-3	9.48429E-2	2.73544E1	-3.26579E1	-3.26561E1	2.68514E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.56693E-1	-7.34425E-1	-9.19542E0	-9.18982E0	4.69685E-3	9.49144E-2	2.72979E1	-3.26681E1	-3.26248E1	2.684E1	1.2054E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.56693E-1	-7.34568E-1	-9.19526E0	-9.18961E0	4.64916E-3	9.47952E-2	2.73051E1	-3.27233E1	-3.26461E1	2.68146E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-7.56669E-1	-7.34591E-1	-9.19526E0	-9.18963E0	4.88758E-3	9.51052E-2	2.73015E1	-3.26699E1	-3.26627E1	2.68082E1	1.19841E-7	2.52236E-3	2.52236E-3	6.31269E-3	3.02115E-1