[Scan]
initial_time=2016-01-18T21:56:56
final_time=2016-01-18T21:57:15
ip_count=19
run=1024
dataset=9
scan=656
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-7.56288E-1
ql1_imon=1.39969E-8
ql2_vset=
ql2_vmon=-7.34735E-1
ql2_imon=1.97264E-9
ql3_vset=
ql3_vmon=-9.19516E0
ql3_imon=9.47237E-11
ql4_vset=
ql4_vmon=-9.19027E0
ql4_imon=-1.40107E-10
mult1=-9.47753E-9
mult2=-2.75024E-9
rf_tmon=-5.17879E-3
rf_agc=3.31957E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.68895E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20067E1
lens5a_imon=2.01155E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.04869E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54061E1
cs_ef1b_imon=2.77331E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=2.5422E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35514E0
lens1_imon=2.72521E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.47694E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=2.90738E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.25136E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.27076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14416E1
os_ea1_imon=2.40413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25931E0
cs_ionrep_imon=1.1889E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91945E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.9445E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.25378E-8
tplens_vset=1.4E-1
tplens_vmon=1.62942E0
tplens_imon=-4.00285E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26045E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2644E1
iondef2_imon=1.55661E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98061E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=3.98121E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.78912E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48762E0
os_ea2_imon=-9.69867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00684E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.39283E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.22767E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73415E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68234E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.89497E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.46728E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-8.21124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.62074E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93669E3
defgrida_imon=6.56449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=6.47797E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59104E0
defgridb_imon=5.7714E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.42078E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06819E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6359E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30829E1
cs_fil1_imon=9.99615E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62732E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64882E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.79597E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.27044E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22167E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.98222E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92929E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-7.56788E-1	-7.34687E-1	-9.19507E0	-9.18994E0	4.57764E-3	9.5129E-2	2.73098E1	-3.26472E1	-3.25953E1	2.68292E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01085E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-7.56454E-1	-7.34735E-1	-9.19542E0	-9.18987E0	4.3869E-3	9.49383E-2	2.73111E1	-3.27047E1	-3.26254E1	2.68178E1	1.20122E-7	2.52757E-3	2.52757E-3	6.32936E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-7.56145E-1	-7.34806E-1	-9.19495E0	-9.18989E0	4.62532E-3	9.4986E-2	2.72738E1	-3.26862E1	-3.26012E1	2.68592E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97963E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09441E0	-7.56359E-1	-7.34735E-1	-9.19514E0	-9.18989E0	4.62532E-3	9.45568E-2	2.73174E1	-3.26361E1	-3.25415E1	2.68076E1	1.19697E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-7.56216E-1	-7.3452E-1	-9.19502E0	-9.18992E0	4.22001E-3	9.46045E-2	2.73116E1	-3.26688E1	-3.26364E1	2.68828E1	1.20064E-7	2.5165E-3	2.5165E-3	6.3074E-3	2.98213E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.55787E-1	-7.34806E-1	-9.19535E0	-9.1898E0	4.3869E-3	9.47237E-2	2.73381E1	-3.27035E1	-3.26374E1	2.68094E1	1.19785E-7	2.52222E-3	2.52222E-3	6.3074E-3	2.99535E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-7.56001E-1	-7.34901E-1	-9.19514E0	-9.18996E0	4.12464E-3	9.52482E-2	2.73718E1	-3.26434E1	-3.26038E1	2.684E1	1.20084E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.01209E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-7.56097E-1	-7.34591E-1	-9.19511E0	-9.18982E0	4.31538E-3	9.46045E-2	2.73345E1	-3.26681E1	-3.26278E1	2.68647E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-7.56311E-1	-7.3452E-1	-9.19509E0	-9.18968E0	4.52995E-3	9.44853E-2	2.73015E1	-3.26759E1	-3.27071E1	2.67938E1	1.20031E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.0041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-7.56121E-1	-7.34496E-1	-9.19509E0	-9.1898E0	4.45843E-3	9.4676E-2	2.73641E1	-3.26691E1	-3.2547E1	2.68845E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.97647E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.56145E-1	-7.3452E-1	-9.19533E0	-9.18999E0	4.62532E-3	9.46999E-2	2.73285E1	-3.26825E1	-3.26825E1	2.67914E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-7.5624E-1	-7.34377E-1	-9.19528E0	-9.19008E0	4.43459E-3	9.47237E-2	2.72874E1	-3.26313E1	-3.26526E1	2.68794E1	1.19757E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-7.56192E-1	-7.34329E-1	-9.19511E0	-9.18972E0	4.41074E-3	9.48668E-2	2.73394E1	-3.26817E1	-3.25715E1	2.68382E1	1.19991E-7	2.51287E-3	2.51287E-3	6.33919E-3	2.99845E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-7.56288E-1	-7.34353E-1	-9.1953E0	-9.18987E0	4.64916E-3	9.49144E-2	2.72811E1	-3.26512E1	-3.2647E1	2.68755E1	1.19829E-7	2.52066E-3	2.52066E-3	6.3245E-3	2.97555E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-7.56288E-1	-7.34568E-1	-9.19528E0	-9.18992E0	4.673E-3	9.48906E-2	2.73123E1	-3.26188E1	-3.26446E1	2.6837E1	1.20017E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.98222E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-7.56335E-1	-7.34591E-1	-9.19504E0	-9.18982E0	4.60148E-3	9.48906E-2	2.73454E1	-3.26663E1	-3.26627E1	2.68545E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9943E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-7.56288E-1	-7.34735E-1	-9.19507E0	-9.18982E0	4.3869E-3	9.47237E-2	2.73482E1	-3.26638E1	-3.26225E1	2.68538E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-7.56311E-1	-7.34711E-1	-9.19509E0	-9.18987E0	4.24385E-3	9.50098E-2	2.73329E1	-3.26446E1	-3.26729E1	2.6796E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-7.56335E-1	-7.34639E-1	-9.19538E0	-9.1897E0	4.673E-3	9.50336E-2	2.73051E1	-3.26645E1	-3.26032E1	2.68298E1	1.20106E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-7.56288E-1	-7.34735E-1	-9.19516E0	-9.19027E0	4.673E-3	9.52482E-2	2.73415E1	-3.2644E1	-3.26045E1	2.68234E1	1.20122E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.98222E-1