[Scan]
initial_time=2016-01-18T21:57:22
final_time=2016-01-18T21:57:42
ip_count=19
run=1024
dataset=9
scan=657
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-7.56359E-1
ql1_imon=1.39426E-8
ql2_vset=
ql2_vmon=-7.34544E-1
ql2_imon=2.00026E-9
ql3_vset=
ql3_vmon=-9.19538E0
ql3_imon=8.6093E-11
ql4_vset=
ql4_vmon=-9.19027E0
ql4_imon=-1.5434E-10
mult1=-9.81854E-9
mult2=-2.81929E-9
rf_tmon=-5.85445E-3
rf_agc=3.25717E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.66481E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67585E0
bslens_imon=2.1978E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19358E1
lens5a_imon=2.01182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53668E1
cs_ef1b_imon=2.79277E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02147E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04388E1
cs_ea1_imon=2.55726E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38174E0
lens1_imon=3.01687E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65001E1
os_ef1alow_imon=2.9567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03953E1
cs_ea2_imon=1.49467E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84438E1
cs_ef1a_imon=2.93349E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.25124E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11311E1
os_restr1_imon=4.25762E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14859E1
os_ea1_imon=2.40557E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63679E1
os_ef1bup_imon=3.08357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22578E0
cs_ionrep_imon=1.17916E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93482E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01647E1
cs_anode1_imon=2.93873E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.25361E-8
tplens_vset=1.4E-1
tplens_vmon=1.6849E0
tplens_imon=-3.73282E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25947E1
iondef3_imon=1.49614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26596E1
iondef2_imon=1.574E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98247E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=4.01697E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28271E0
ionrepsh_imon=1.75178E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33866E1
lens5b_imon=2.17821E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74969E1
cs_ef2b_imon=3.12661E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49023E0
os_ea2_imon=-9.75649E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00402E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71295E1
cs_ef2a_imon=3.16928E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02088E0
os_ef2alow_imon=-2.64917E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81414E-1
os_ef2bup_imon=-5.14173E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11329E1
os_restr2_imon=3.39944E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30296E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01877E1
cs_anode2_imon=2.25159E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7308E1
iondef1_imon=1.10717E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68273E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.8683E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.44881E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1632E0
cs_ionaccel_imon=-1.87071E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47488E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.55311E-6
window_vset=0.0E0
window_vmon=2.39428E-1
window_imon=-6.50629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86375E1
mask2_imon=-6.9554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.44647E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.75228E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50088E3
multb_neg_imon=7.24813E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46484E0
defgridb_imon=6.0838E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33316E1
os_fil1_imon=9.41509E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07629E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63438E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.97542E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62478E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6474E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73878E-2
os_fil2_imon=-2.48785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.30556E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34761E-1
cs_fil2_imon=-2.40052E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.78493E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22263E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.97394E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.05741E-1
res40_imon=-2.36847E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-7.56097E-1	-7.34782E-1	-9.19497E0	-9.18994E0	4.26769E-3	9.52721E-2	2.73434E1	-3.26561E1	-3.25918E1	2.68731E1	1.19991E-7	2.51158E-3	2.51158E-3	6.3131E-3	3.00794E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-7.56001E-1	-7.34639E-1	-9.19528E0	-9.1897E0	4.33922E-3	9.52482E-2	2.73388E1	-3.27038E1	-3.26107E1	2.68388E1	1.19891E-7	2.51919E-3	2.51919E-3	6.30212E-3	2.99594E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-7.56073E-1	-7.34663E-1	-9.19492E0	-9.18972E0	4.57764E-3	9.52005E-2	2.7304E1	-3.26702E1	-3.26864E1	2.67702E1	1.20191E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.00942E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-7.55954E-1	-7.34472E-1	-9.19492E0	-9.18989E0	4.26769E-3	9.49383E-2	2.731E1	-3.26774E1	-3.25513E1	2.68653E1	1.20177E-7	2.51886E-3	2.51886E-3	6.3282E-3	3.01485E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-7.56097E-1	-7.34711E-1	-9.19526E0	-9.19018E0	4.17233E-3	9.5439E-2	2.73544E1	-3.26591E1	-3.26236E1	2.68701E1	1.20137E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.01209E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-7.56478E-1	-7.34782E-1	-9.19497E0	-9.18996E0	4.3869E-3	9.51529E-2	2.73369E1	-3.26675E1	-3.26813E1	2.68731E1	1.20158E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-7.5655E-1	-7.34782E-1	-9.19499E0	-9.18975E0	4.48227E-3	9.52721E-2	2.73294E1	-3.26909E1	-3.25831E1	2.68184E1	1.20244E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.01742E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-7.56264E-1	-7.34782E-1	-9.19502E0	-9.18965E0	4.55379E-3	9.52005E-2	2.734E1	-3.26691E1	-3.26104E1	2.68286E1	1.20293E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.00097E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-7.56216E-1	-7.34591E-1	-9.1949E0	-9.18975E0	4.45843E-3	9.52244E-2	2.73322E1	-3.26231E1	-3.25605E1	2.68112E1	1.20191E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.01209E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.56359E-1	-7.34639E-1	-9.19468E0	-9.1897E0	4.45843E-3	9.48906E-2	2.73193E1	-3.26844E1	-3.26832E1	2.68524E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-7.56145E-1	-7.34711E-1	-9.1949E0	-9.18972E0	4.3869E-3	9.4986E-2	2.73291E1	-3.26651E1	-3.26855E1	2.68247E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-7.56145E-1	-7.34687E-1	-9.19495E0	-9.18958E0	4.64916E-3	9.47952E-2	2.72997E1	-3.26705E1	-3.26116E1	2.68581E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-7.56431E-1	-7.34496E-1	-9.19511E0	-9.18949E0	4.74453E-3	9.48429E-2	2.73496E1	-3.26482E1	-3.26194E1	2.68377E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-7.56431E-1	-7.34544E-1	-9.19516E0	-9.18968E0	4.64916E-3	9.50575E-2	2.73454E1	-3.26831E1	-3.26446E1	2.68213E1	1.19965E-7	2.50898E-3	2.50898E-3	6.31837E-3	3.00824E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.56311E-1	-7.3452E-1	-9.19487E0	-9.18989E0	4.57764E-3	9.49144E-2	2.73297E1	-3.26458E1	-3.25437E1	2.6836E1	1.19601E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09309E0	-7.56383E-1	-7.34687E-1	-9.1948E0	-9.19013E0	4.64916E-3	9.52721E-2	2.73122E1	-3.2685E1	-3.26797E1	2.68016E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01609E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-7.56526E-1	-7.34663E-1	-9.19504E0	-9.18987E0	4.86374E-3	9.5129E-2	2.73271E1	-3.26762E1	-3.26952E1	2.68671E1	1.20106E-7	2.51847E-3	2.51847E-3	6.28592E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-7.56335E-1	-7.34544E-1	-9.1953E0	-9.18984E0	4.88758E-3	9.51529E-2	2.73303E1	-3.26512E1	-3.25695E1	2.68184E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.56216E-1	-7.34496E-1	-9.19535E0	-9.18972E0	4.74453E-3	9.5129E-2	2.73328E1	-3.2652E1	-3.27452E1	2.6852E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.97445E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-7.56359E-1	-7.34544E-1	-9.19538E0	-9.19027E0	4.55379E-3	9.51767E-2	2.7308E1	-3.26596E1	-3.25947E1	2.68273E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.97394E-1