[Scan]
initial_time=2016-01-18T21:57:49
final_time=2016-01-18T21:58:09
ip_count=19
run=1024
dataset=9
scan=658
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09348E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-7.56335E-1
ql1_imon=1.39791E-8
ql2_vset=
ql2_vmon=-7.34806E-1
ql2_imon=2.01221E-9
ql3_vset=
ql3_vmon=-9.1953E0
ql3_imon=7.94649E-11
ql4_vset=
ql4_vmon=-9.19018E0
ql4_imon=-1.56689E-10
mult1=-9.75944E-9
mult2=-2.83105E-9
rf_tmon=-3.80749E-3
rf_agc=3.42647E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.67842E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65688E0
bslens_imon=2.26024E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1929E1
lens5a_imon=1.99419E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53761E1
cs_ef1b_imon=2.78117E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04719E1
cs_ea1_imon=2.56901E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36827E0
lens1_imon=2.57979E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64746E1
os_ef1alow_imon=2.97279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03935E1
cs_ea2_imon=1.46639E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84344E1
cs_ef1a_imon=2.91104E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.253E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11329E1
os_restr1_imon=4.26398E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15422E1
os_ea1_imon=2.4052E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64184E1
os_ef1bup_imon=3.07758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23373E0
cs_ionrep_imon=1.18247E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93545E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0184E1
cs_anode1_imon=2.92975E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.24664E-8
tplens_vset=1.4E-1
tplens_vmon=1.64449E0
tplens_imon=-2.92476E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27865E1
iondef3_imon=1.49504E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.56849E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.97934E-4
ql6_vset=1.0E-1
ql6_vmon=9.46999E-2
ql6_imon=4.02117E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27781E0
ionrepsh_imon=1.75839E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33719E1
lens5b_imon=2.16315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7457E1
cs_ef2b_imon=3.13297E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47064E0
os_ea2_imon=-8.80152E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71202E1
cs_ef2a_imon=3.16778E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05144E0
os_ef2alow_imon=-2.4583E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05117E-1
os_ef2bup_imon=-5.21283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11173E1
os_restr2_imon=3.39308E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.2879E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0184E1
cs_anode2_imon=2.25197E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.10386E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68538E1
iondef4_imon=1.09214E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.8803E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.44451E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14948E0
cs_ionaccel_imon=-1.7996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47368E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5648E1
einzel_imon=7.70655E-6
window_vset=0.0E0
window_vmon=2.38805E-1
window_imon=-8.30273E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-5.68292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.14896E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.48048E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.18937E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32081E0
defgridb_imon=5.87077E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.40137E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07423E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63588E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30863E1
cs_fil1_imon=9.9874E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63332E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64648E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.81763E-2
os_fil2_imon=-2.61884E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77869E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.10068E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37047E-1
cs_fil2_imon=-2.73112E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05513E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2215E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.77276E-1
res40_imon=-2.51818E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-7.56693E-1	-7.34377E-1	-9.19507E0	-9.19027E0	4.48227E-3	9.51767E-2	2.73147E1	-3.26524E1	-3.26741E1	2.68076E1	1.20244E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.99879E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-7.56645E-1	-7.34472E-1	-9.1954E0	-9.19025E0	4.52995E-3	9.54151E-2	2.7367E1	-3.26609E1	-3.26458E1	2.68731E1	1.20106E-7	2.51847E-3	2.51847E-3	6.35601E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-7.5686E-1	-7.34806E-1	-9.19518E0	-9.19001E0	4.52995E-3	9.51529E-2	2.73334E1	-3.27015E1	-3.26136E1	2.68134E1	1.20137E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.01475E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-7.56574E-1	-7.35116E-1	-9.19526E0	-9.18972E0	4.50611E-3	9.52244E-2	2.73393E1	-3.26975E1	-3.26969E1	2.68142E1	1.1979E-7	2.51393E-3	2.51393E-3	6.33919E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-7.56669E-1	-7.35092E-1	-9.19528E0	-9.18987E0	4.64916E-3	9.50575E-2	2.73147E1	-3.26945E1	-3.24752E1	2.68413E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.56311E-1	-7.34782E-1	-9.19507E0	-9.18975E0	4.48227E-3	9.48429E-2	2.73363E1	-3.26825E1	-3.26356E1	2.68472E1	1.20244E-7	2.52362E-3	2.52362E-3	6.34099E-3	2.98026E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-7.56478E-1	-7.34782E-1	-9.1954E0	-9.18961E0	4.26769E-3	9.46999E-2	2.73478E1	-3.26807E1	-3.27564E1	2.68366E1	1.19965E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.56478E-1	-7.3483E-1	-9.19528E0	-9.1898E0	4.31538E-3	9.51529E-2	2.73141E1	-3.26597E1	-3.27678E1	2.68202E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99175E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.56431E-1	-7.34496E-1	-9.19545E0	-9.18994E0	4.29153E-3	9.50336E-2	2.73153E1	-3.2635E1	-3.25587E1	2.68412E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-7.56598E-1	-7.34735E-1	-9.19528E0	-9.19015E0	4.29153E-3	9.50098E-2	2.73303E1	-3.26627E1	-3.27011E1	2.6831E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-7.56645E-1	-7.34758E-1	-9.19528E0	-9.19003E0	4.3869E-3	9.50336E-2	2.73364E1	-3.26732E1	-3.25818E1	2.68917E1	1.20122E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-7.56311E-1	-7.34568E-1	-9.19511E0	-9.19006E0	4.64916E-3	9.48191E-2	2.73273E1	-3.26993E1	-3.27402E1	2.68406E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-7.56407E-1	-7.34758E-1	-9.19492E0	-9.18989E0	4.41074E-3	9.50098E-2	2.73051E1	-3.26591E1	-3.25207E1	2.68508E1	1.20209E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-7.56502E-1	-7.34782E-1	-9.19509E0	-9.18975E0	4.48227E-3	9.48906E-2	2.73299E1	-3.26773E1	-3.2711E1	2.68346E1	1.19766E-7	2.5147E-3	2.5147E-3	6.30182E-3	2.98026E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-7.56311E-1	-7.35068E-1	-9.19535E0	-9.18992E0	4.36306E-3	9.50336E-2	2.73592E1	-3.26464E1	-3.26092E1	2.68124E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-7.56216E-1	-7.35092E-1	-9.19549E0	-9.19001E0	4.14848E-3	9.50575E-2	2.73267E1	-3.26506E1	-3.25257E1	2.68575E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-7.56025E-1	-7.34925E-1	-9.19507E0	-9.19006E0	4.52995E-3	9.49383E-2	2.73434E1	-3.26791E1	-3.2682E1	2.68372E1	1.20088E-7	2.51918E-3	2.51918E-3	6.29926E-3	3.00249E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-7.56121E-1	-7.34687E-1	-9.19516E0	-9.19011E0	4.69685E-3	9.48191E-2	2.73405E1	-3.26549E1	-3.26909E1	2.68112E1	1.19891E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.01104E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-7.56145E-1	-7.34711E-1	-9.19511E0	-9.18996E0	4.52995E-3	9.49144E-2	2.73027E1	-3.26591E1	-3.25599E1	2.68563E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09348E0	-7.56335E-1	-7.34806E-1	-9.1953E0	-9.19018E0	4.55379E-3	9.46999E-2	2.7321E1	-3.26738E1	-3.27865E1	2.68538E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01347E-1