[Scan]
initial_time=2016-01-18T21:58:16
final_time=2016-01-18T21:58:35
ip_count=19
run=1024
dataset=9
scan=659
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-7.56216E-1
ql1_imon=1.39942E-8
ql2_vset=
ql2_vmon=-7.34854E-1
ql2_imon=2.02454E-9
ql3_vset=
ql3_vmon=-9.19516E0
ql3_imon=1.09935E-10
ql4_vset=
ql4_vmon=-9.18989E0
ql4_imon=-1.75154E-10
mult1=-9.74516E-9
mult2=-2.74226E-9
rf_tmon=-2.64839E-3
rf_agc=3.46384E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.62979E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68296E0
bslens_imon=2.25296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.98812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=2.78304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04796E1
cs_ea1_imon=2.55878E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36595E0
lens1_imon=2.60625E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.47982E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=2.91423E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.25184E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15053E1
os_ea1_imon=2.40377E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63389E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=1.18169E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.94125E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.24347E-8
tplens_vset=1.4E-1
tplens_vmon=1.66426E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26076E1
iondef3_imon=1.48054E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26701E1
iondef2_imon=1.56021E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=4.028E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29416E0
ionrepsh_imon=1.76533E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.16224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48402E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00641E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.39608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.28739E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.731E1
iondef1_imon=1.11284E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68647E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.79027E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.44137E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.34762E-1
window_imon=-8.1752E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.87308E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.88172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48878E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.42396E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06686E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63438E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30861E1
cs_fil1_imon=9.9884E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62246E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64771E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73688E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.35809E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22057E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.07946E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.56168E-1	-7.34687E-1	-9.19518E0	-9.18982E0	4.57764E-3	9.52244E-2	2.73293E1	-3.26467E1	-3.27705E1	2.68316E1	1.20137E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.01209E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-7.56145E-1	-7.34544E-1	-9.19521E0	-9.19006E0	4.60148E-3	9.52482E-2	2.7352E1	-3.26675E1	-3.26639E1	2.68262E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-7.56264E-1	-7.34591E-1	-9.19533E0	-9.19001E0	4.86374E-3	9.50098E-2	2.72886E1	-3.26703E1	-3.2521E1	2.68352E1	1.198E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-7.56478E-1	-7.34687E-1	-9.19542E0	-9.18996E0	4.74453E-3	9.5129E-2	2.73269E1	-3.26732E1	-3.26183E1	2.68496E1	1.20055E-7	2.51954E-3	2.51954E-3	6.34518E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-7.56431E-1	-7.34568E-1	-9.1954E0	-9.1902E0	4.57764E-3	9.51767E-2	2.73253E1	-3.26536E1	-3.26811E1	2.68605E1	1.19965E-7	2.52647E-3	2.52647E-3	6.31288E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-7.56836E-1	-7.34258E-1	-9.19535E0	-9.18987E0	5.10216E-3	9.50813E-2	2.73351E1	-3.265E1	-3.26597E1	2.6849E1	1.19757E-7	2.5199E-3	2.5199E-3	6.28552E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-7.56693E-1	-7.34568E-1	-9.19535E0	-9.18975E0	4.64916E-3	9.4986E-2	2.73352E1	-3.26614E1	-3.27446E1	2.68412E1	1.19653E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-7.56645E-1	-7.34687E-1	-9.1953E0	-9.18987E0	4.55379E-3	9.52005E-2	2.73177E1	-3.2653E1	-3.27125E1	2.68484E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.97963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-7.56407E-1	-7.34591E-1	-9.19499E0	-9.1898E0	4.76837E-3	9.49621E-2	2.73171E1	-3.26633E1	-3.26645E1	2.68574E1	1.20017E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-7.56574E-1	-7.34568E-1	-9.19502E0	-9.18968E0	4.88758E-3	9.50813E-2	2.73387E1	-3.26669E1	-3.25918E1	2.67992E1	1.20004E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.02253E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-7.56359E-1	-7.34663E-1	-9.1949E0	-9.18984E0	4.57764E-3	9.52959E-2	2.73171E1	-3.26549E1	-3.24319E1	2.68256E1	1.20226E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-7.56311E-1	-7.34758E-1	-9.19495E0	-9.18953E0	4.74453E-3	9.50336E-2	2.7334E1	-3.26496E1	-3.24443E1	2.68106E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09302E0	-7.56478E-1	-7.34568E-1	-9.19526E0	-9.18989E0	4.48227E-3	9.52244E-2	2.73159E1	-3.26645E1	-3.25689E1	2.68166E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-7.56621E-1	-7.34854E-1	-9.19514E0	-9.18982E0	4.52995E-3	9.47952E-2	2.73169E1	-3.26602E1	-3.25658E1	2.68743E1	1.20383E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-7.56574E-1	-7.34663E-1	-9.19507E0	-9.18987E0	4.1008E-3	9.53436E-2	2.73117E1	-3.26933E1	-3.24968E1	2.68464E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09279E0	-7.5655E-1	-7.34639E-1	-9.19502E0	-9.18989E0	4.52995E-3	9.50813E-2	2.73087E1	-3.26651E1	-3.25605E1	2.68166E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99175E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09279E0	-7.56979E-1	-7.34639E-1	-9.19518E0	-9.18999E0	4.43459E-3	9.50813E-2	2.73375E1	-3.265E1	-3.25437E1	2.681E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.97963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09263E0	-7.56669E-1	-7.34496E-1	-9.19521E0	-9.1897E0	4.69685E-3	9.4986E-2	2.73063E1	-3.26608E1	-3.2452E1	2.6843E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-7.56598E-1	-7.34997E-1	-9.19523E0	-9.19006E0	4.69685E-3	9.48906E-2	2.73341E1	-3.26492E1	-3.25959E1	2.68458E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-7.56216E-1	-7.34854E-1	-9.19516E0	-9.18989E0	4.31538E-3	9.50813E-2	2.731E1	-3.26701E1	-3.26076E1	2.68647E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02253E-1