[Scan]
initial_time=2016-01-18T21:58:43
final_time=2016-01-18T21:59:02
ip_count=19
run=1024
dataset=9
scan=660
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-7.56598E-1
ql1_imon=1.40007E-8
ql2_vset=
ql2_vmon=-7.34448E-1
ql2_imon=1.97595E-9
ql3_vset=
ql3_vmon=-9.19538E0
ql3_imon=7.69854E-11
ql4_vset=
ql4_vmon=-9.18996E0
ql4_imon=-1.5291E-10
mult1=-9.51162E-9
mult2=-2.73458E-9
rf_tmon=-4.38625E-3
rf_agc=3.39464E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.67297E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.50079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19305E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=2.78268E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02029E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04357E1
cs_ea1_imon=2.54963E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33363E0
lens1_imon=2.68837E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.48285E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84598E1
cs_ef1a_imon=2.91891E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.24945E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14863E1
os_ea1_imon=2.39142E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64026E1
os_ef1bup_imon=3.0728E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20904E0
cs_ionrep_imon=1.19015E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.93549E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.25195E-8
tplens_vset=1.4E-1
tplens_vmon=1.65087E0
tplens_imon=-3.76754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25497E1
iondef3_imon=1.50763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.56851E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02941E2
lens6_imon=2.98141E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.01016E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29575E0
ionrepsh_imon=1.75539E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33929E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48865E0
os_ea2_imon=-7.83786E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.15713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04315E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72797E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11081E1
os_restr2_imon=3.39968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.29362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68508E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.04432E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.45005E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.66597E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.36747E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.08432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32878E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33361E1
os_fil1_imon=9.40828E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07155E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63417E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30918E1
cs_fil1_imon=9.98948E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62936E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64724E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90173E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.28469E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.71925E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22162E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.50282E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-7.56121E-1	-7.34496E-1	-9.19507E0	-9.19006E0	4.76837E-3	9.5129E-2	2.73484E1	-3.26729E1	-3.27504E1	2.68864E1	1.2026E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-7.56145E-1	-7.34901E-1	-9.19497E0	-9.18999E0	4.76837E-3	9.52244E-2	2.73165E1	-3.2653E1	-3.27053E1	2.68352E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-7.5624E-1	-7.34735E-1	-9.19502E0	-9.19013E0	4.86374E-3	9.50813E-2	2.73246E1	-3.26708E1	-3.26632E1	2.68286E1	1.19925E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.99083E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-7.56073E-1	-7.34901E-1	-9.19511E0	-9.19018E0	4.57764E-3	9.52005E-2	2.73287E1	-3.26449E1	-3.26337E1	2.67878E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.97394E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-7.55906E-1	-7.34997E-1	-9.19507E0	-9.18996E0	4.57764E-3	9.51052E-2	2.73592E1	-3.26807E1	-3.24632E1	2.68526E1	1.20055E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09364E0	-7.56121E-1	-7.34949E-1	-9.19485E0	-9.19001E0	4.81606E-3	9.48906E-2	2.73466E1	-3.2641E1	-3.25275E1	2.68418E1	1.20487E-7	2.5068E-3	2.5068E-3	6.33486E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-7.56192E-1	-7.34687E-1	-9.19476E0	-9.18968E0	4.64916E-3	9.51052E-2	2.73327E1	-3.26284E1	-3.25161E1	2.6831E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-7.56335E-1	-7.34854E-1	-9.19495E0	-9.18982E0	4.62532E-3	9.48429E-2	2.73063E1	-3.26543E1	-3.24614E1	2.69171E1	1.19809E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-7.56216E-1	-7.35092E-1	-9.19533E0	-9.19001E0	4.91142E-3	9.4986E-2	2.72856E1	-3.2652E1	-3.25918E1	2.6798E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9841E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-7.5624E-1	-7.34901E-1	-9.19549E0	-9.19008E0	4.88758E-3	9.50098E-2	2.73045E1	-3.26634E1	-3.27686E1	2.68292E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.98481E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-7.56121E-1	-7.34544E-1	-9.19521E0	-9.1898E0	4.98295E-3	9.48906E-2	2.73411E1	-3.26472E1	-3.27888E1	2.68472E1	1.20226E-7	2.51662E-3	2.51662E-3	6.3514E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-7.56359E-1	-7.34401E-1	-9.1953E0	-9.18982E0	4.95911E-3	9.4676E-2	2.73181E1	-3.26614E1	-3.27965E1	2.67529E1	1.20174E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-7.56407E-1	-7.34568E-1	-9.19516E0	-9.18965E0	4.673E-3	9.49144E-2	2.73273E1	-3.26397E1	-3.28554E1	2.68479E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-7.56454E-1	-7.34663E-1	-9.19526E0	-9.18965E0	4.50611E-3	9.45091E-2	2.73064E1	-3.26814E1	-3.26718E1	2.68431E1	1.20161E-7	2.5216E-3	2.5216E-3	6.31761E-3	3.00149E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-7.56073E-1	-7.34663E-1	-9.19535E0	-9.18984E0	4.64916E-3	9.48906E-2	2.73303E1	-3.26765E1	-3.26206E1	2.68256E1	1.20005E-7	2.5118E-3	2.5118E-3	6.3016E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-7.56335E-1	-7.34544E-1	-9.19502E0	-9.19001E0	4.673E-3	9.52482E-2	2.73034E1	-3.26469E1	-3.26185E1	2.68995E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9874E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-7.5624E-1	-7.34758E-1	-9.19495E0	-9.18977E0	4.48227E-3	9.46522E-2	2.73201E1	-3.26747E1	-3.26278E1	2.68262E1	1.20055E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.98665E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-7.56717E-1	-7.35044E-1	-9.19495E0	-9.18987E0	4.91142E-3	9.48429E-2	2.73576E1	-3.26508E1	-3.25776E1	2.68184E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99686E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-7.56526E-1	-7.34615E-1	-9.19526E0	-9.18996E0	4.72069E-3	9.51529E-2	2.73122E1	-3.2649E1	-3.24756E1	2.68105E1	1.20055E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.56598E-1	-7.34448E-1	-9.19538E0	-9.18996E0	4.69685E-3	9.49144E-2	2.73153E1	-3.26549E1	-3.25497E1	2.68508E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.02253E-1