[Scan]
initial_time=2016-01-18T21:59:09
final_time=2016-01-18T21:59:29
ip_count=19
run=1024
dataset=9
scan=661
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.0874E-4
ql1_vset=
ql1_vmon=-7.55858E-1
ql1_imon=1.40202E-8
ql2_vset=
ql2_vmon=-7.34758E-1
ql2_imon=2.01457E-9
ql3_vset=
ql3_vmon=-9.19545E0
ql3_imon=7.84159E-11
ql4_vset=
ql4_vmon=-9.18984E0
ql4_imon=-1.57583E-10
mult1=-9.63202E-9
mult2=-2.81043E-9
rf_tmon=-4.33218E-3
rf_agc=3.41687E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.69328E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.37192E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=1.99497E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05295E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54211E1
cs_ef1b_imon=2.7852E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04838E1
cs_ea1_imon=2.56275E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35033E0
lens1_imon=2.53415E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.96324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04057E1
cs_ea2_imon=1.48342E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.91675E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.2453E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.28121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14885E1
os_ea1_imon=2.39692E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6289E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=1.21089E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01575E1
cs_anode1_imon=2.94053E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.24239E-8
tplens_vset=1.4E-1
tplens_vmon=1.66967E0
tplens_imon=-1.62358E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.28183E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98018E-4
ql6_vset=1.0E-1
ql6_vmon=9.48429E-2
ql6_imon=4.02144E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=1.7711E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.17089E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49123E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11436E1
os_restr2_imon=3.40112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.27765E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.24461E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.86808E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.43752E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15657E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.5098E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.53422E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.18957E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.04034E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26021E0
defgridb_imon=6.00932E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33367E1
os_fil1_imon=9.43159E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07209E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63476E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=9.98594E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63675E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6465E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.80886E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.25884E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22097E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.4848E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09317E0	-7.56049E-1	-7.34782E-1	-9.19533E0	-9.18972E0	4.8399E-3	9.50813E-2	2.73417E1	-3.26697E1	-3.27245E1	2.67908E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09348E0	-7.56049E-1	-7.34687E-1	-9.19518E0	-9.19023E0	4.52995E-3	9.5129E-2	2.73117E1	-3.26831E1	-3.27161E1	2.68412E1	1.19851E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-7.56025E-1	-7.34901E-1	-9.19545E0	-9.18999E0	4.43459E-3	9.52005E-2	2.73489E1	-3.26795E1	-3.27017E1	2.68686E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-7.56335E-1	-7.34878E-1	-9.19523E0	-9.18996E0	4.72069E-3	9.52721E-2	2.7318E1	-3.26579E1	-3.24985E1	2.68563E1	1.19979E-7	2.52093E-3	2.52093E-3	6.29185E-3	3.0E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09325E0	-7.56097E-1	-7.34663E-1	-9.1954E0	-9.1898E0	4.57764E-3	9.50575E-2	2.72962E1	-3.26693E1	-3.24797E1	2.68126E1	1.19782E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.0E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09387E0	-7.56168E-1	-7.34591E-1	-9.19495E0	-9.18958E0	4.8399E-3	9.49144E-2	2.73345E1	-3.26603E1	-3.24668E1	2.68502E1	1.20226E-7	2.52106E-3	2.52106E-3	6.31321E-3	3.0286E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-7.56145E-1	-7.34472E-1	-9.19502E0	-9.18996E0	4.74453E-3	9.51529E-2	2.73165E1	-3.26573E1	-3.26663E1	2.68298E1	1.19953E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-7.56264E-1	-7.34663E-1	-9.19521E0	-9.18982E0	4.86374E-3	9.50336E-2	2.73069E1	-3.26555E1	-3.25947E1	2.68214E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-7.56168E-1	-7.34711E-1	-9.19526E0	-9.18987E0	5.03063E-3	9.52005E-2	2.7334E1	-3.26596E1	-3.27033E1	2.68244E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-7.55954E-1	-7.34806E-1	-9.19492E0	-9.19001E0	4.95911E-3	9.51767E-2	2.72937E1	-3.26633E1	-3.25695E1	2.68971E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9892E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-7.56025E-1	-7.3483E-1	-9.19518E0	-9.1898E0	5.07832E-3	9.50336E-2	2.73177E1	-3.26476E1	-3.27444E1	2.68154E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-7.56168E-1	-7.34806E-1	-9.1954E0	-9.19006E0	5.17368E-3	9.49383E-2	2.73382E1	-3.26609E1	-3.26138E1	2.68611E1	1.19705E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0934E0	-7.56121E-1	-7.34544E-1	-9.1954E0	-9.18972E0	5.07832E-3	9.51529E-2	2.73333E1	-3.26777E1	-3.27083E1	2.68106E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-7.56073E-1	-7.34591E-1	-9.19507E0	-9.18977E0	4.88758E-3	9.52244E-2	2.73434E1	-3.26596E1	-3.25517E1	2.68502E1	1.19757E-7	2.51443E-3	2.51443E-3	6.28006E-3	3.03185E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09286E0	-7.56359E-1	-7.34425E-1	-9.19528E0	-9.19001E0	4.76837E-3	9.50813E-2	2.73393E1	-3.26729E1	-3.25076E1	2.68226E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0924E0	-7.56073E-1	-7.34544E-1	-9.19533E0	-9.19015E0	4.76837E-3	9.51052E-2	2.73388E1	-3.26627E1	-3.24571E1	2.68641E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9874E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09317E0	-7.56121E-1	-7.34305E-1	-9.19526E0	-9.1902E0	4.45843E-3	9.50336E-2	2.72992E1	-3.26579E1	-3.2429E1	2.68076E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09248E0	-7.55954E-1	-7.34258E-1	-9.19518E0	-9.19001E0	4.43459E-3	9.48906E-2	2.73482E1	-3.26762E1	-3.25717E1	2.68569E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02253E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09309E0	-7.55715E-1	-7.34258E-1	-9.19509E0	-9.19027E0	4.69685E-3	9.49144E-2	2.73293E1	-3.26602E1	-3.27186E1	2.68364E1	1.20363E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-7.55858E-1	-7.34758E-1	-9.19545E0	-9.18984E0	4.72069E-3	9.48429E-2	2.73243E1	-3.26657E1	-3.28183E1	2.68478E1	1.198E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00453E-1