[Scan]
initial_time=2016-01-18T21:59:36
final_time=2016-01-18T21:59:55
ip_count=19
run=1024
dataset=9
scan=662
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-7.56216E-1
ql1_imon=1.40124E-8
ql2_vset=
ql2_vmon=-7.34758E-1
ql2_imon=1.97777E-9
ql3_vset=
ql3_vmon=-9.19521E0
ql3_imon=8.11577E-11
ql4_vset=
ql4_vmon=-9.19006E0
ql4_imon=-1.59001E-10
mult1=-9.52366E-9
mult2=-2.8264E-9
rf_tmon=-4.46436E-3
rf_agc=3.34057E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.68164E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67515E0
bslens_imon=2.3575E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=2.7834E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.55482E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3311E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.48739E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.91242E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.25148E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.40918E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=1.18241E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.92612E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.24816E-8
tplens_vset=1.4E-1
tplens_vmon=1.69911E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24938E1
iondef3_imon=1.48054E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.54399E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98104E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=4.00918E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27733E0
ionrepsh_imon=1.76065E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3397E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51406E0
os_ea2_imon=-7.21126E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.15209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1131E1
os_restr2_imon=3.38815E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.26612E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.23632E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.85786E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.43789E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16498E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.46775E-1
window_imon=-8.28332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-7.85084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.48014E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.2112E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=6.96824E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35946E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.41045E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07071E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63287E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.97639E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63087E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64655E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91204E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.26271E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22131E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.67411E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-7.56168E-1	-7.34639E-1	-9.19557E0	-9.19018E0	4.48227E-3	9.5129E-2	2.73341E1	-3.26949E1	-3.26038E1	2.68621E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-7.56025E-1	-7.34901E-1	-9.19554E0	-9.18999E0	4.86374E-3	9.50336E-2	2.734E1	-3.26703E1	-3.25418E1	2.68803E1	1.20142E-7	2.52025E-3	2.52025E-3	6.33388E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-7.56049E-1	-7.34568E-1	-9.19549E0	-9.19011E0	4.48227E-3	9.50575E-2	2.73311E1	-3.26549E1	-3.25599E1	2.67866E1	1.19819E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99613E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-7.56025E-1	-7.34591E-1	-9.1954E0	-9.19008E0	4.62532E-3	9.47714E-2	2.73291E1	-3.26663E1	-3.26903E1	2.68713E1	1.19757E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.9952E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-7.56097E-1	-7.34711E-1	-9.19507E0	-9.19023E0	4.72069E-3	9.47952E-2	2.73261E1	-3.2644E1	-3.25785E1	2.68148E1	1.2026E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.96887E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-7.56097E-1	-7.34425E-1	-9.19502E0	-9.18992E0	4.55379E-3	9.50813E-2	2.73129E1	-3.26735E1	-3.25209E1	2.67992E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3514E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.56192E-1	-7.34663E-1	-9.19502E0	-9.18984E0	4.64916E-3	9.49144E-2	2.73213E1	-3.26669E1	-3.245E1	2.68232E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-7.56121E-1	-7.34758E-1	-9.19533E0	-9.18989E0	4.69685E-3	9.4676E-2	2.73092E1	-3.26838E1	-3.25198E1	2.68514E1	1.20069E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-7.56288E-1	-7.34925E-1	-9.19535E0	-9.18984E0	4.79221E-3	9.50336E-2	2.72967E1	-3.26609E1	-3.24434E1	2.68864E1	1.20174E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-7.56454E-1	-7.34663E-1	-9.19547E0	-9.18975E0	4.673E-3	9.50336E-2	2.7334E1	-3.26449E1	-3.25133E1	2.68659E1	1.20243E-7	2.51538E-3	2.51538E-3	6.32644E-3	3.00766E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-7.56693E-1	-7.34854E-1	-9.19538E0	-9.19003E0	4.45843E-3	9.49621E-2	2.73291E1	-3.26723E1	-3.26098E1	2.67956E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-7.56526E-1	-7.34735E-1	-9.19511E0	-9.18992E0	4.69685E-3	9.47952E-2	2.73326E1	-3.26536E1	-3.26615E1	2.6837E1	1.20311E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.99686E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-7.56383E-1	-7.34353E-1	-9.19528E0	-9.19027E0	4.673E-3	9.4986E-2	2.72973E1	-3.26238E1	-3.27351E1	2.68294E1	1.20137E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.98026E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.56478E-1	-7.34448E-1	-9.1953E0	-9.18996E0	4.69685E-3	9.47237E-2	2.73239E1	-3.26812E1	-3.26344E1	2.68977E1	1.20113E-7	2.51956E-3	2.51956E-3	6.33297E-3	2.99421E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-7.56645E-1	-7.34282E-1	-9.1953E0	-9.18992E0	4.69685E-3	9.46999E-2	2.72955E1	-3.26549E1	-3.25683E1	2.6855E1	1.20019E-7	2.52147E-3	2.52147E-3	6.28377E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-7.56669E-1	-7.34448E-1	-9.19533E0	-9.19013E0	4.55379E-3	9.51529E-2	2.73321E1	-3.26686E1	-3.26243E1	2.68126E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-7.56311E-1	-7.34591E-1	-9.19504E0	-9.1902E0	4.29153E-3	9.4986E-2	2.73417E1	-3.26416E1	-3.26633E1	2.68418E1	1.20314E-7	2.52113E-3	2.52113E-3	6.31974E-3	3.01167E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-7.56383E-1	-7.34425E-1	-9.19523E0	-9.18965E0	4.81606E-3	9.49621E-2	2.73428E1	-3.26844E1	-3.25605E1	2.68875E1	1.20043E-7	2.51279E-3	2.51279E-3	6.33486E-3	2.9991E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.56383E-1	-7.34854E-1	-9.19514E0	-9.18999E0	4.95911E-3	9.46999E-2	2.73417E1	-3.26843E1	-3.2477E1	2.68274E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.56216E-1	-7.34758E-1	-9.19521E0	-9.19006E0	4.60148E-3	9.51529E-2	2.73225E1	-3.26482E1	-3.24938E1	2.68304E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00966E-1