[Scan]
initial_time=2016-01-18T22:01:49
final_time=2016-01-18T22:02:09
ip_count=19
run=1024
dataset=9
scan=667
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-7.5624E-1
ql1_imon=1.39586E-8
ql2_vset=
ql2_vmon=-7.34782E-1
ql2_imon=2.01319E-9
ql3_vset=
ql3_vmon=-9.19528E0
ql3_imon=8.42333E-11
ql4_vset=
ql4_vmon=-9.19011E0
ql4_imon=-1.66535E-10
mult1=-9.80059E-9
mult2=-2.68867E-9
rf_tmon=-4.23004E-3
rf_agc=3.32675E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.70356E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.32867E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=2.01047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54247E1
cs_ef1b_imon=2.77367E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02045E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=2.55482E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34732E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.48342E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.92648E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.24553E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1158E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14693E1
os_ea1_imon=2.39908E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63341E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=1.1889E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.929E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.23767E-8
tplens_vset=1.4E-1
tplens_vmon=1.6901E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26573E1
iondef3_imon=1.48667E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.55985E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98227E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.00528E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=1.74695E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33538E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48522E0
os_ea2_imon=-7.4636E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7151E1
cs_ef2a_imon=3.15245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05095E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.39175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.27873E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73448E1
iondef1_imon=1.11536E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.8501E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.43914E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56579E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.73805E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.33594E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.30853E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.60992E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41961E0
defgridb_imon=6.02735E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.42264E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07275E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62972E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.95657E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62162E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64661E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.41094E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22213E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.40071E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-7.56621E-1	-7.34377E-1	-9.19514E0	-9.18994E0	4.43459E-3	9.49383E-2	2.72856E1	-3.26508E1	-3.24514E1	2.68737E1	1.19757E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00041E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-7.56645E-1	-7.34282E-1	-9.19526E0	-9.18994E0	4.48227E-3	9.48191E-2	2.73123E1	-3.26524E1	-3.2587E1	2.68214E1	1.20158E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-7.56788E-1	-7.34591E-1	-9.19528E0	-9.18972E0	4.55379E-3	9.48429E-2	2.72915E1	-3.26596E1	-3.27688E1	2.68389E1	1.20122E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00302E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-7.56645E-1	-7.34496E-1	-9.19514E0	-9.18982E0	4.52995E-3	9.45807E-2	2.73794E1	-3.26649E1	-3.27399E1	2.68815E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-7.56764E-1	-7.34878E-1	-9.19495E0	-9.18984E0	4.48227E-3	9.49383E-2	2.73219E1	-3.26801E1	-3.276E1	2.6834E1	1.19851E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-7.56931E-1	-7.34663E-1	-9.19533E0	-9.19006E0	4.62532E-3	9.44138E-2	2.73261E1	-3.26849E1	-3.27642E1	2.6828E1	1.20278E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-7.56526E-1	-7.34639E-1	-9.19545E0	-9.18989E0	4.62532E-3	9.47714E-2	2.73033E1	-3.26695E1	-3.2637E1	2.6834E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-7.56693E-1	-7.34591E-1	-9.19526E0	-9.18994E0	4.93526E-3	9.48191E-2	2.73159E1	-3.26494E1	-3.26116E1	2.68238E1	1.19713E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.56788E-1	-7.34544E-1	-9.19528E0	-9.18994E0	4.52995E-3	9.49383E-2	2.73399E1	-3.26608E1	-3.25039E1	2.69061E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-7.56621E-1	-7.34544E-1	-9.19521E0	-9.18994E0	4.57764E-3	9.51052E-2	2.73375E1	-3.27023E1	-3.26759E1	2.68923E1	1.19809E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.56645E-1	-7.34568E-1	-9.19535E0	-9.19006E0	4.64916E-3	9.47714E-2	2.73075E1	-3.26549E1	-3.25293E1	2.6798E1	1.20069E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.56574E-1	-7.34568E-1	-9.19516E0	-9.18989E0	4.8399E-3	9.48191E-2	2.73448E1	-3.26488E1	-3.27059E1	2.68526E1	1.19913E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-7.56574E-1	-7.34472E-1	-9.19502E0	-9.19006E0	4.88758E-3	9.49144E-2	2.73219E1	-3.26573E1	-3.25539E1	2.68304E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.56454E-1	-7.34568E-1	-9.19538E0	-9.19006E0	4.55379E-3	9.49144E-2	2.73213E1	-3.26897E1	-3.25948E1	2.68388E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01347E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-7.5624E-1	-7.3483E-1	-9.19526E0	-9.19015E0	4.673E-3	9.49144E-2	2.7349E1	-3.26957E1	-3.27023E1	2.68545E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.56383E-1	-7.3452E-1	-9.19538E0	-9.18992E0	4.81606E-3	9.48668E-2	2.73393E1	-3.26651E1	-3.25371E1	2.68058E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-7.56669E-1	-7.34758E-1	-9.19542E0	-9.19015E0	4.60148E-3	9.4986E-2	2.73339E1	-3.26536E1	-3.27059E1	2.68178E1	1.20122E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-7.56526E-1	-7.34639E-1	-9.19504E0	-9.19003E0	4.29153E-3	9.52482E-2	2.73151E1	-3.26555E1	-3.26089E1	2.68748E1	1.20017E-7	2.52647E-3	2.52647E-3	6.31837E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-7.56264E-1	-7.34878E-1	-9.19518E0	-9.18994E0	4.17233E-3	9.49383E-2	2.73358E1	-3.26543E1	-3.26195E1	2.6852E1	1.20363E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-7.5624E-1	-7.34782E-1	-9.19528E0	-9.19011E0	4.50611E-3	9.49621E-2	2.73448E1	-3.26705E1	-3.26573E1	2.68058E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00453E-1