[Scan]
initial_time=2016-01-18T22:02:16
final_time=2016-01-18T22:02:35
ip_count=19
run=1024
dataset=9
scan=668
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-7.56216E-1
ql1_imon=1.39856E-8
ql2_vset=
ql2_vmon=-7.34735E-1
ql2_imon=2.01954E-9
ql3_vset=
ql3_vmon=-9.19549E0
ql3_imon=5.06043E-11
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-1.7941E-10
mult1=-9.02136E-9
mult2=-2.68125E-9
rf_tmon=-5.3419E-3
rf_agc=3.24836E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.68856E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67575E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=2.00254E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04952E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=2.77727E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=2.55301E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34793E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.48991E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.91314E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.24372E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.27076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14819E1
os_ea1_imon=2.39331E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=1.19467E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.92179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.23703E-8
tplens_vset=1.4E-1
tplens_vmon=1.67989E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26664E1
iondef3_imon=1.51839E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2697E1
iondef2_imon=1.54615E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98086E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=3.99529E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=1.7455E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46359E0
os_ea2_imon=-6.38212E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.15893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11183E1
os_restr2_imon=3.39247E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.24533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68643E1
iondef4_imon=1.10251E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.84083E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.40684E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.7978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50163E3
multb_neg_imon=6.85649E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.41717E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07095E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63191E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.97477E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63177E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64449E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83466E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.39934E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.91224E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2209E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32112E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.40671E-1
res40_imon=-2.53301E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-7.56478E-1	-7.34568E-1	-9.19516E0	-9.19015E0	5.03063E-3	9.49144E-2	2.7341E1	-3.26596E1	-3.26454E1	2.68585E1	1.19861E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00824E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-7.56574E-1	-7.34591E-1	-9.19518E0	-9.18968E0	5.26905E-3	9.48429E-2	2.73444E1	-3.26822E1	-3.26859E1	2.68413E1	1.19782E-7	2.53133E-3	2.53133E-3	6.29185E-3	2.98522E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-7.56621E-1	-7.34854E-1	-9.19521E0	-9.18963E0	4.95911E-3	9.49383E-2	2.73281E1	-3.26832E1	-3.26219E1	2.67986E1	1.19667E-7	2.51384E-3	2.51384E-3	6.31879E-3	3.00251E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-7.56574E-1	-7.34711E-1	-9.1954E0	-9.19013E0	4.76837E-3	9.50336E-2	2.7285E1	-3.26885E1	-3.27033E1	2.68563E1	1.19595E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-7.5655E-1	-7.34663E-1	-9.19523E0	-9.18975E0	4.64916E-3	9.49383E-2	2.73015E1	-3.26579E1	-3.26128E1	2.68176E1	1.198E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-7.56168E-1	-7.34735E-1	-9.19511E0	-9.18994E0	4.88758E-3	9.50336E-2	2.73201E1	-3.26518E1	-3.25761E1	2.68209E1	1.20174E-7	2.51552E-3	2.51552E-3	6.3514E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-7.56407E-1	-7.34639E-1	-9.19516E0	-9.19015E0	4.62532E-3	9.51529E-2	2.73087E1	-3.26669E1	-3.27185E1	2.68166E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-7.56192E-1	-7.34854E-1	-9.19497E0	-9.19006E0	4.55379E-3	9.48906E-2	2.73231E1	-3.26536E1	-3.25293E1	2.67758E1	1.20017E-7	2.51662E-3	2.51662E-3	6.28006E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-7.56073E-1	-7.35044E-1	-9.19547E0	-9.19027E0	4.72069E-3	9.49383E-2	2.73177E1	-3.26482E1	-3.2653E1	2.6843E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.55858E-1	-7.34901E-1	-9.19547E0	-9.18994E0	4.81606E-3	9.50575E-2	2.73399E1	-3.26506E1	-3.25978E1	2.68696E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-7.5624E-1	-7.35044E-1	-9.19542E0	-9.18989E0	4.55379E-3	9.49383E-2	2.73093E1	-3.26765E1	-3.26585E1	2.68292E1	1.20278E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-7.56097E-1	-7.34901E-1	-9.19549E0	-9.19011E0	4.14848E-3	9.50336E-2	2.7308E1	-3.26455E1	-3.25611E1	2.68388E1	1.198E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.99175E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.55811E-1	-7.34854E-1	-9.19516E0	-9.19011E0	4.24385E-3	9.50575E-2	2.73165E1	-3.26488E1	-3.26705E1	2.68478E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.97187E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-7.55978E-1	-7.34663E-1	-9.19547E0	-9.18999E0	4.72069E-3	9.51052E-2	2.73358E1	-3.26815E1	-3.27894E1	2.68499E1	1.20122E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.97963E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-7.56145E-1	-7.34639E-1	-9.19545E0	-9.19008E0	4.50611E-3	9.49621E-2	2.73499E1	-3.26726E1	-3.24951E1	2.68358E1	1.19749E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.56216E-1	-7.34282E-1	-9.19528E0	-9.19023E0	4.62532E-3	9.49144E-2	2.73326E1	-3.26364E1	-3.26952E1	2.68268E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0071E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-7.56931E-1	-7.3452E-1	-9.19538E0	-9.18987E0	4.50611E-3	9.47475E-2	2.73129E1	-3.26939E1	-3.25563E1	2.6837E1	1.19978E-7	2.51025E-3	2.51025E-3	6.29067E-3	2.99348E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-7.56145E-1	-7.34329E-1	-9.19535E0	-9.19023E0	4.57764E-3	9.48906E-2	2.7321E1	-3.26602E1	-3.2685E1	2.68118E1	1.19851E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-7.56407E-1	-7.34878E-1	-9.19516E0	-9.19008E0	4.3869E-3	9.50336E-2	2.73098E1	-3.26661E1	-3.25352E1	2.68655E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.98481E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.56216E-1	-7.34735E-1	-9.19549E0	-9.18987E0	4.41074E-3	9.48191E-2	2.73228E1	-3.2697E1	-3.26664E1	2.68643E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32112E-3	3.00041E-1