[Scan]
initial_time=2016-01-18T22:03:09
final_time=2016-01-18T22:03:29
ip_count=19
run=1024
dataset=9
scan=670
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0934E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-7.56025E-1
ql1_imon=1.39966E-8
ql2_vset=
ql2_vmon=-7.34854E-1
ql2_imon=2.04841E-9
ql3_vset=
ql3_vmon=-9.19509E0
ql3_imon=9.65238E-11
ql4_vset=
ql4_vmon=-9.19003E0
ql4_imon=-1.68693E-10
mult1=-9.66486E-9
mult2=-2.7765E-9
rf_tmon=-4.64024E-3
rf_agc=3.32855E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.70902E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.34308E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.78088E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0461E1
cs_ea1_imon=2.56203E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36295E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.47117E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=2.9099E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.23938E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.27472E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=2.39692E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.19142E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02067E1
cs_anode1_imon=2.93477E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20461E0
olens4_imon=3.23828E-8
tplens_vset=1.4E-1
tplens_vmon=1.67087E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27224E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26575E1
iondef2_imon=1.5548E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=3.99965E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31218E0
ionrepsh_imon=1.76101E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33381E1
lens5b_imon=2.16044E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47861E0
os_ea2_imon=-8.11249E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.15461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80005E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.39932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.28234E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.22731E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73076E1
iondef1_imon=1.09193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68583E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.84179E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.40265E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.72572E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47457E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56531E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.37164E-1
window_imon=-7.59857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.14849E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.52483E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=6.85649E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47375E0
defgridb_imon=6.31574E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.41543E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07065E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63062E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30869E1
cs_fil1_imon=9.97351E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64515E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93784E-2
os_fil2_imon=-2.79811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.4161E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22206E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.26985E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.53886E-1
res40_imon=-2.6195E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-7.5624E-1	-7.34925E-1	-9.19523E0	-9.18975E0	4.14848E-3	9.48429E-2	2.73213E1	-3.26554E1	-3.2501E1	2.68136E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
2.0E0	1.5E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-7.56454E-1	-7.34496E-1	-9.19533E0	-9.19008E0	4.29153E-3	9.48906E-2	2.73357E1	-3.26603E1	-3.24361E1	2.68472E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09317E0	-7.56335E-1	-7.34663E-1	-9.1953E0	-9.18984E0	4.17233E-3	9.48429E-2	2.73039E1	-3.26695E1	-3.25924E1	2.68319E1	1.20084E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00144E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09279E0	-7.56216E-1	-7.34687E-1	-9.19535E0	-9.18951E0	4.673E-3	9.49621E-2	2.7346E1	-3.26855E1	-3.27155E1	2.6837E1	1.20523E-7	2.52405E-3	2.52405E-3	6.30221E-3	3.0223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-7.56168E-1	-7.34568E-1	-9.19514E0	-9.18999E0	4.98295E-3	9.46999E-2	2.72889E1	-3.27005E1	-3.25004E1	2.6855E1	1.20084E-7	2.51359E-3	2.51359E-3	6.31858E-3	2.98026E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09325E0	-7.56288E-1	-7.34735E-1	-9.19535E0	-9.19003E0	4.86374E-3	9.4676E-2	2.73237E1	-3.26422E1	-3.2611E1	2.68418E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-7.56335E-1	-7.34663E-1	-9.19542E0	-9.18996E0	4.81606E-3	9.51529E-2	2.73134E1	-3.26956E1	-3.26856E1	2.68058E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-7.56192E-1	-7.34615E-1	-9.19542E0	-9.19006E0	4.76837E-3	9.50098E-2	2.73171E1	-3.26356E1	-3.26831E1	2.68182E1	1.20209E-7	2.50775E-3	2.50775E-3	6.31817E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.5655E-1	-7.34782E-1	-9.1953E0	-9.18999E0	4.48227E-3	9.47237E-2	2.73321E1	-3.26128E1	-3.25803E1	2.68123E1	1.2033E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-7.56311E-1	-7.34425E-1	-9.19533E0	-9.18994E0	4.86374E-3	9.4676E-2	2.73257E1	-3.26785E1	-3.25452E1	2.68611E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.9841E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-7.56502E-1	-7.34591E-1	-9.19509E0	-9.18953E0	4.57764E-3	9.45568E-2	2.73629E1	-3.26638E1	-3.26278E1	2.68528E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9943E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-7.56168E-1	-7.34377E-1	-9.19526E0	-9.19003E0	4.64916E-3	9.46045E-2	2.73171E1	-3.26651E1	-3.26657E1	2.68472E1	1.20055E-7	2.52384E-3	2.52384E-3	6.33436E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-7.56526E-1	-7.34305E-1	-9.19502E0	-9.18984E0	4.86374E-3	9.46999E-2	2.73429E1	-3.26488E1	-3.26212E1	2.68094E1	1.20244E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00144E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-7.56645E-1	-7.34496E-1	-9.19514E0	-9.19001E0	4.88758E-3	9.49621E-2	2.73111E1	-3.26627E1	-3.26272E1	2.68647E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01223E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09333E0	-7.56764E-1	-7.34591E-1	-9.19526E0	-9.18987E0	4.57764E-3	9.50575E-2	2.72636E1	-3.26741E1	-3.26038E1	2.68418E1	1.20174E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-7.56574E-1	-7.34568E-1	-9.19538E0	-9.19023E0	4.50611E-3	9.49144E-2	2.73345E1	-3.26422E1	-3.26567E1	2.68502E1	1.20174E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.9874E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09309E0	-7.56335E-1	-7.34472E-1	-9.19526E0	-9.18989E0	4.55379E-3	9.52005E-2	2.73279E1	-3.26639E1	-3.26188E1	2.68112E1	1.20031E-7	2.51248E-3	2.51248E-3	6.32978E-3	2.98026E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09317E0	-7.56216E-1	-7.34568E-1	-9.19533E0	-9.1898E0	4.673E-3	9.51052E-2	2.73299E1	-3.26673E1	-3.25788E1	2.6816E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09302E0	-7.56145E-1	-7.34687E-1	-9.19514E0	-9.18987E0	4.72069E-3	9.52005E-2	2.73098E1	-3.26354E1	-3.26101E1	2.68563E1	1.20311E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0934E0	-7.56025E-1	-7.34854E-1	-9.19509E0	-9.19003E0	4.57764E-3	9.50098E-2	2.73076E1	-3.26575E1	-3.27224E1	2.68583E1	1.19749E-7	2.52384E-3	2.52384E-3	6.26985E-3	3.00453E-1