[Scan]
initial_time=2016-01-18T22:05:22
final_time=2016-01-18T22:05:42
ip_count=19
run=1024
dataset=9
scan=675
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-7.56383E-1
ql1_imon=1.40084E-8
ql2_vset=
ql2_vmon=-7.34854E-1
ql2_imon=2.01969E-9
ql3_vset=
ql3_vmon=-9.19547E0
ql3_imon=1.13869E-10
ql4_vset=
ql4_vmon=-9.18984E0
ql4_imon=-1.85823E-10
mult1=-9.70033E-9
mult2=-2.72718E-9
rf_tmon=-4.76313E-3
rf_agc=3.24007E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=1.71038E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63851E0
bslens_imon=2.2382E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19976E1
lens5a_imon=2.01513E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04692E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53986E1
cs_ef1b_imon=2.77069E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02327E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04872E1
cs_ea1_imon=2.58554E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36215E0
lens1_imon=2.3337E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64889E1
os_ef1alow_imon=2.96343E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.51009E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=2.90729E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.23205E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11373E1
os_restr1_imon=4.25986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.40006E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23312E0
cs_ionrep_imon=1.16594E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93743E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01915E1
cs_anode1_imon=2.91665E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.23182E-8
tplens_vset=1.4E-1
tplens_vmon=1.65184E0
tplens_imon=-2.8513E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26596E1
iondef3_imon=1.50238E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.5696E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98114E-4
ql6_vset=1.0E-1
ql6_vmon=9.47475E-2
ql6_imon=4.00534E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30291E0
ionrepsh_imon=1.76941E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34019E1
lens5b_imon=2.18409E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74726E1
cs_ef2b_imon=3.12661E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41922E0
os_ea2_imon=-8.80152E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00898E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71183E1
cs_ef2a_imon=3.16029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04395E0
os_ef2alow_imon=-2.52566E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73305E-1
os_ef2bup_imon=-5.21283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11236E1
os_restr2_imon=3.40244E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.28679E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0199E1
cs_anode2_imon=2.25758E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73446E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.09663E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.8259E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.37843E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14199E0
cs_ionaccel_imon=-1.78837E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56274E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=2.52527E-1
window_imon=-7.81619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39092E-4
mask2_vset=0.0E0
mask2_vmon=-1.86438E1
mask2_imon=-7.47936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.4832E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.71188E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.0351E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59967E0
defgridb_imon=6.10951E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33371E1
os_fil1_imon=9.40374E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07335E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63098E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=9.9602E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63095E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64221E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93589E-2
os_fil2_imon=-2.73112E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81612E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.51437E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35299E-1
cs_fil2_imon=-2.50656E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.11661E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22072E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.51899E-1
res40_imon=-2.51818E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-7.56001E-1	-7.34329E-1	-9.19499E0	-9.18994E0	4.33922E-3	9.50813E-2	2.73242E1	-3.26845E1	-3.26237E1	2.6887E1	1.19925E-7	2.52473E-3	2.52473E-3	6.32418E-3	3.0201E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-7.56288E-1	-7.34425E-1	-9.1954E0	-9.19011E0	4.14848E-3	9.5129E-2	2.73431E1	-3.26701E1	-3.26805E1	2.68508E1	1.19841E-7	2.51603E-3	2.51603E-3	6.33388E-3	2.98842E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-7.56001E-1	-7.34162E-1	-9.19569E0	-9.19015E0	4.43459E-3	9.50098E-2	2.73399E1	-3.26248E1	-3.2636E1	2.68382E1	1.19766E-7	2.51025E-3	2.51025E-3	6.31858E-3	3.00144E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-7.56216E-1	-7.34353E-1	-9.19561E0	-9.18982E0	4.33922E-3	9.5129E-2	2.73491E1	-3.26689E1	-3.26986E1	2.68296E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-7.56264E-1	-7.34401E-1	-9.19557E0	-9.18982E0	4.26769E-3	9.5129E-2	2.73032E1	-3.26649E1	-3.26513E1	2.68521E1	1.20064E-7	2.51854E-3	2.51854E-3	6.34322E-3	2.99906E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.55906E-1	-7.34591E-1	-9.19561E0	-9.1897E0	4.43459E-3	9.47714E-2	2.73311E1	-3.26803E1	-3.26113E1	2.68274E1	1.19895E-7	2.5199E-3	2.5199E-3	6.31902E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-7.56073E-1	-7.34544E-1	-9.19535E0	-9.18977E0	4.26769E-3	9.51767E-2	2.73225E1	-3.26561E1	-3.26308E1	2.6846E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-7.56288E-1	-7.34377E-1	-9.19528E0	-9.18982E0	4.17233E-3	9.50575E-2	2.73364E1	-3.26648E1	-3.26602E1	2.68372E1	1.20004E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.03027E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-7.56049E-1	-7.34329E-1	-9.1954E0	-9.18965E0	4.45843E-3	9.51052E-2	2.73381E1	-3.26518E1	-3.26038E1	2.6807E1	1.19941E-7	2.51182E-3	2.51182E-3	6.32328E-3	2.99845E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-7.56359E-1	-7.34496E-1	-9.19554E0	-9.18977E0	4.55379E-3	9.50336E-2	2.72886E1	-3.2651E1	-3.25882E1	2.68532E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09348E0	-7.56335E-1	-7.34639E-1	-9.19559E0	-9.19008E0	4.43459E-3	9.49383E-2	2.73297E1	-3.26885E1	-3.26122E1	2.67692E1	1.19749E-7	2.5157E-3	2.5157E-3	6.31225E-3	2.99183E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-7.56049E-1	-7.34425E-1	-9.1954E0	-9.18989E0	4.57764E-3	9.4986E-2	2.7364E1	-3.26446E1	-3.26783E1	2.68599E1	1.19861E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.56073E-1	-7.34353E-1	-9.19526E0	-9.1898E0	4.55379E-3	9.49144E-2	2.73351E1	-3.26248E1	-3.26591E1	2.68683E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-7.55906E-1	-7.34591E-1	-9.19504E0	-9.18987E0	4.673E-3	9.4986E-2	2.73021E1	-3.26496E1	-3.26231E1	2.68322E1	1.19861E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.02922E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.5624E-1	-7.34591E-1	-9.19538E0	-9.18989E0	4.64916E-3	9.47952E-2	2.73596E1	-3.26713E1	-3.25562E1	2.68178E1	1.19757E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.56454E-1	-7.34735E-1	-9.19511E0	-9.1897E0	4.55379E-3	9.47237E-2	2.73464E1	-3.26555E1	-3.26413E1	2.68538E1	1.20122E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-7.56335E-1	-7.34687E-1	-9.19533E0	-9.18994E0	4.31538E-3	9.4986E-2	2.7346E1	-3.26386E1	-3.26969E1	2.68148E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-7.56598E-1	-7.34997E-1	-9.19533E0	-9.18992E0	4.36306E-3	9.49383E-2	2.73134E1	-3.26514E1	-3.26467E1	2.68175E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-7.56288E-1	-7.34973E-1	-9.19564E0	-9.19011E0	4.43459E-3	9.4986E-2	2.73297E1	-3.26681E1	-3.25876E1	2.68442E1	1.198E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.56383E-1	-7.34854E-1	-9.19547E0	-9.18984E0	4.05312E-3	9.47475E-2	2.73446E1	-3.26443E1	-3.26596E1	2.68016E1	1.19913E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01347E-1