[Scan]
initial_time=2016-01-18T22:06:16
final_time=2016-01-18T22:06:35
ip_count=19
run=1024
dataset=9
scan=677
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08761E-4
ql1_vset=
ql1_vmon=-7.56431E-1
ql1_imon=1.40439E-8
ql2_vset=
ql2_vmon=-7.34544E-1
ql2_imon=1.96184E-9
ql3_vset=
ql3_vmon=-9.19509E0
ql3_imon=8.4579E-11
ql4_vset=
ql4_vmon=-9.18999E0
ql4_imon=-1.76418E-10
mult1=-9.34305E-9
mult2=-2.77251E-9
rf_tmon=-4.23604E-3
rf_agc=3.30452E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.68649E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6766E0
bslens_imon=2.41708E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19126E1
lens5a_imon=2.01899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54033E1
cs_ef1b_imon=2.77297E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02073E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.59343E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31735E0
lens1_imon=2.68005E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.96524E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03406E1
cs_ea2_imon=1.47426E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84321E1
cs_ef1a_imon=2.91155E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.23447E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=4.27016E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15078E1
os_ea1_imon=2.40525E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64105E1
os_ef1bup_imon=3.08201E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25096E0
cs_ionrep_imon=1.19387E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01759E1
cs_anode1_imon=2.92229E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.22294E-8
tplens_vset=1.4E-1
tplens_vmon=1.65339E0
tplens_imon=-2.84357E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25834E1
iondef3_imon=1.4968E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26975E1
iondef2_imon=1.55213E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.9826E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=4.02106E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26576E0
ionrepsh_imon=1.74543E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33919E1
lens5b_imon=2.16038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74641E1
cs_ef2b_imon=3.12429E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45587E0
os_ea2_imon=-9.5374E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06061E2
lens4b_imon=2.00694E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71297E1
cs_ef2a_imon=3.16019E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.58309E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78037E-1
os_ef2bup_imon=-5.32447E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11325E1
os_restr2_imon=3.39272E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29245E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01955E1
cs_anode2_imon=2.23074E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73015E1
iondef1_imon=1.09995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.09258E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.82388E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.37722E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14077E0
cs_ionaccel_imon=-1.73417E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56629E1
einzel_imon=7.78179E-6
window_vset=0.0E0
window_vmon=2.12413E-1
window_imon=-8.44985E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39061E-4
mask2_vset=0.0E0
mask2_vmon=-1.86283E1
mask2_imon=-7.51033E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92591E3
multa_neg_imon=7.78922E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.49144E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.87053E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32194E0
defgridb_imon=5.99623E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33363E1
os_fil1_imon=9.41458E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07212E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63053E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.96437E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.633E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64363E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88218E-2
os_fil2_imon=-2.6554E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.54004E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35076E-1
cs_fil2_imon=-2.35901E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03555E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22096E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.99093E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09458E-1
res40_imon=-2.48243E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=262
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-7.55858E-1	-7.34901E-1	-9.19521E0	-9.18989E0	4.31538E-3	9.48191E-2	2.731E1	-3.26462E1	-3.2607E1	2.68325E1	1.20078E-7	2.51162E-3	2.51162E-3	6.323E-3	3.00247E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-7.56145E-1	-7.34496E-1	-9.19528E0	-9.1903E0	4.19617E-3	9.47475E-2	2.73308E1	-3.26646E1	-3.26389E1	2.68629E1	1.19766E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.0041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-7.56359E-1	-7.3452E-1	-9.19545E0	-9.19003E0	4.24385E-3	9.50098E-2	2.73665E1	-3.26306E1	-3.2644E1	2.67572E1	1.19925E-7	2.51136E-3	2.51136E-3	6.34661E-3	2.99613E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-7.56383E-1	-7.34949E-1	-9.1954E0	-9.1898E0	4.31538E-3	9.50813E-2	2.73057E1	-3.26933E1	-3.26124E1	2.68953E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-7.56311E-1	-7.35044E-1	-9.19533E0	-9.1898E0	4.22001E-3	9.4986E-2	2.7291E1	-3.26682E1	-3.25942E1	2.6825E1	1.19757E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-7.55954E-1	-7.35092E-1	-9.19518E0	-9.1897E0	4.3869E-3	9.50813E-2	2.73123E1	-3.2644E1	-3.26242E1	2.68052E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-7.55858E-1	-7.34878E-1	-9.19538E0	-9.18977E0	4.43459E-3	9.48191E-2	2.73151E1	-3.26366E1	-3.25617E1	2.6771E1	1.19913E-7	2.5199E-3	2.5199E-3	6.34588E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-7.55811E-1	-7.34305E-1	-9.19571E0	-9.18992E0	4.24385E-3	9.48429E-2	2.73159E1	-3.26723E1	-3.26344E1	2.68791E1	1.20311E-7	2.52384E-3	2.52384E-3	6.35059E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-7.5593E-1	-7.34568E-1	-9.19545E0	-9.18999E0	4.1008E-3	9.46045E-2	2.72991E1	-3.26314E1	-3.26278E1	2.6798E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09317E0	-7.55978E-1	-7.34806E-1	-9.19552E0	-9.18996E0	4.43459E-3	9.48191E-2	2.72916E1	-3.26376E1	-3.26493E1	2.68713E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09325E0	-7.56168E-1	-7.34496E-1	-9.19507E0	-9.19006E0	4.45843E-3	9.49144E-2	2.72847E1	-3.26362E1	-3.2745E1	2.68755E1	1.19978E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-7.56073E-1	-7.34544E-1	-9.19535E0	-9.18982E0	4.26769E-3	9.48429E-2	2.73177E1	-3.26657E1	-3.262E1	2.68749E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9978E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-7.56001E-1	-7.34782E-1	-9.19552E0	-9.18972E0	4.19617E-3	9.45807E-2	2.73255E1	-3.26615E1	-3.26044E1	2.68331E1	1.19809E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-7.56192E-1	-7.34901E-1	-9.19547E0	-9.18987E0	4.26769E-3	9.47237E-2	2.73305E1	-3.2652E1	-3.26319E1	2.68528E1	1.19978E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.02813E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-7.56359E-1	-7.34758E-1	-9.19497E0	-9.18992E0	4.74453E-3	9.5129E-2	2.73568E1	-3.26494E1	-3.26338E1	2.68004E1	1.20042E-7	2.51603E-3	2.51603E-3	6.30212E-3	3.02621E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.56121E-1	-7.34973E-1	-9.19502E0	-9.18994E0	4.33922E-3	9.48191E-2	2.73063E1	-3.2664E1	-3.26346E1	2.68112E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9926E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-7.56025E-1	-7.34472E-1	-9.1953E0	-9.18989E0	4.31538E-3	9.46522E-2	2.73511E1	-3.2659E1	-3.26484E1	2.69704E1	1.20137E-7	2.51025E-3	2.51025E-3	6.29624E-3	2.99348E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.56335E-1	-7.34735E-1	-9.19504E0	-9.19006E0	4.1008E-3	9.49383E-2	2.73596E1	-3.26498E1	-3.25936E1	2.67746E1	1.19646E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.98665E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-7.5624E-1	-7.34758E-1	-9.19507E0	-9.18999E0	4.22001E-3	9.51052E-2	2.73387E1	-3.26756E1	-3.26248E1	2.68545E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-7.56431E-1	-7.34544E-1	-9.19509E0	-9.18999E0	4.41074E-3	9.51767E-2	2.73015E1	-3.26975E1	-3.25834E1	2.67908E1	1.20092E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.99093E-1