[Scan]
initial_time=2016-01-18T22:06:42
final_time=2016-01-18T22:07:02
ip_count=19
run=1024
dataset=9
scan=678
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-7.56454E-1
ql1_imon=1.39697E-8
ql2_vset=
ql2_vmon=-7.34878E-1
ql2_imon=2.00467E-9
ql3_vset=
ql3_vmon=-9.19499E0
ql3_imon=8.1861E-11
ql4_vset=
ql4_vmon=-9.1898E0
ql4_imon=-1.77073E-10
mult1=-9.94858E-9
mult2=-2.77617E-9
rf_tmon=-5.12887E-3
rf_agc=3.24832E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.68499E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.62067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19292E1
lens5a_imon=2.01552E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=2.77007E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04357E1
cs_ea1_imon=2.57573E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36235E0
lens1_imon=2.66753E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03498E1
cs_ea2_imon=1.46937E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.90341E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.22727E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.26175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14825E1
os_ea1_imon=2.40413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63371E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.91206E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.22922E-8
tplens_vset=1.4E-1
tplens_vmon=1.67147E0
tplens_imon=-4.14704E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25947E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26537E1
iondef2_imon=1.54795E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98043E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=4.06046E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29175E0
ionrepsh_imon=1.74334E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.15575E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4738E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.15713E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04375E0
os_ef2alow_imon=-2.46453E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69193E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.39571E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.27909E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73269E1
iondef1_imon=1.10851E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68629E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.8466E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.35279E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17639E0
cs_ionaccel_imon=-1.70049E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56603E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=2.4197E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.8617E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.54503E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.68345E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=6.91417E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47976E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3338E1
os_fil1_imon=9.40504E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07425E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62856E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3093E1
cs_fil1_imon=9.95801E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6218E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64184E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83466E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.50246E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.45787E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22128E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.99594E-1
chamber_ion_pmon=1.1979E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.98645E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0934E0	-7.5593E-1	-7.34949E-1	-9.19518E0	-9.1898E0	4.12464E-3	9.48429E-2	2.73021E1	-3.26868E1	-3.2626E1	2.68917E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-7.56121E-1	-7.34758E-1	-9.1954E0	-9.18963E0	4.14848E-3	9.51052E-2	2.73363E1	-3.26404E1	-3.26549E1	2.68058E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-7.56454E-1	-7.34568E-1	-9.19545E0	-9.1897E0	4.36306E-3	9.4986E-2	2.7346E1	-3.26416E1	-3.26206E1	2.68316E1	1.19757E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.9978E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-7.56121E-1	-7.34711E-1	-9.19533E0	-9.18975E0	4.12464E-3	9.51052E-2	2.73163E1	-3.26697E1	-3.26431E1	2.68609E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-7.5624E-1	-7.34806E-1	-9.19538E0	-9.1897E0	4.41074E-3	9.49621E-2	2.73387E1	-3.26987E1	-3.2584E1	2.68278E1	1.19902E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.56288E-1	-7.34878E-1	-9.19535E0	-9.18975E0	4.22001E-3	9.50813E-2	2.73045E1	-3.26422E1	-3.26308E1	2.68306E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-7.56311E-1	-7.34496E-1	-9.19566E0	-9.18961E0	4.36306E-3	9.5129E-2	2.73321E1	-3.26128E1	-3.26194E1	2.68148E1	1.19757E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-7.5655E-1	-7.34639E-1	-9.19554E0	-9.18994E0	3.98159E-3	9.47475E-2	2.73556E1	-3.26633E1	-3.26356E1	2.68833E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-7.56454E-1	-7.34782E-1	-9.19559E0	-9.18972E0	3.91006E-3	9.48429E-2	2.73399E1	-3.26472E1	-3.26384E1	2.68605E1	1.20122E-7	2.52647E-3	2.52647E-3	6.30192E-3	2.97445E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-7.56359E-1	-7.34663E-1	-9.19549E0	-9.18982E0	4.07696E-3	9.47237E-2	2.73207E1	-3.26512E1	-3.26554E1	2.67872E1	1.19749E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9943E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-7.56359E-1	-7.34782E-1	-9.19521E0	-9.18992E0	4.45843E-3	9.47952E-2	2.73305E1	-3.26461E1	-3.25829E1	2.68383E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-7.56431E-1	-7.34758E-1	-9.19523E0	-9.18972E0	4.79221E-3	9.4986E-2	2.73153E1	-3.26699E1	-3.26398E1	2.68202E1	1.19749E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.02511E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-7.5624E-1	-7.34878E-1	-9.1954E0	-9.18992E0	4.45843E-3	9.47475E-2	2.73508E1	-3.26759E1	-3.26621E1	2.68304E1	1.20017E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-7.56288E-1	-7.34806E-1	-9.1953E0	-9.18999E0	4.33922E-3	9.52244E-2	2.7347E1	-3.26467E1	-3.25511E1	2.68322E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01609E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.56454E-1	-7.34615E-1	-9.19507E0	-9.19006E0	4.45843E-3	9.50575E-2	2.73123E1	-3.26573E1	-3.2641E1	2.68647E1	1.19953E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-7.56121E-1	-7.34639E-1	-9.19518E0	-9.19008E0	3.86238E-3	9.51052E-2	2.73369E1	-3.26795E1	-3.2617E1	2.6843E1	1.19705E-7	2.51443E-3	2.51443E-3	6.28006E-3	3.00563E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-7.56121E-1	-7.34448E-1	-9.19528E0	-9.19023E0	3.98159E-3	9.51767E-2	2.73262E1	-3.26368E1	-3.26505E1	2.68184E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-7.56121E-1	-7.34329E-1	-9.19497E0	-9.18994E0	4.57764E-3	9.50336E-2	2.72886E1	-3.26884E1	-3.26667E1	2.68279E1	1.19831E-7	2.52301E-3	2.52301E-3	6.34907E-3	3.00494E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.56216E-1	-7.34687E-1	-9.19495E0	-9.18999E0	4.07696E-3	9.51529E-2	2.73564E1	-3.26844E1	-3.2593E1	2.68233E1	1.19674E-7	2.51411E-3	2.51411E-3	6.33065E-3	3.00087E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-7.56454E-1	-7.34878E-1	-9.19499E0	-9.1898E0	4.33922E-3	9.52244E-2	2.73269E1	-3.26537E1	-3.25947E1	2.68629E1	1.1979E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.99594E-1