[Scan]
initial_time=2016-01-18T22:07:09
final_time=2016-01-18T22:07:28
ip_count=19
run=1024
dataset=9
scan=679
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-7.5624E-1
ql1_imon=1.39748E-8
ql2_vset=
ql2_vmon=-7.34472E-1
ql2_imon=2.02222E-9
ql3_vset=
ql3_vmon=-9.19521E0
ql3_imon=8.92401E-11
ql4_vset=
ql4_vmon=-9.18982E0
ql4_imon=-1.63877E-10
mult1=-9.32203E-9
mult2=-2.70562E-9
rf_tmon=-4.23812E-3
rf_agc=3.361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.66959E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70639E0
bslens_imon=2.27459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19274E1
lens5a_imon=2.00506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04873E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54175E1
cs_ef1b_imon=2.76718E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02485E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04231E1
cs_ea1_imon=2.56563E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38578E0
lens1_imon=2.67114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.5065E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.91386E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.23234E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=4.26211E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=2.38394E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63047E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19502E0
cs_ionrep_imon=1.20945E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93204E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.9135E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.22044E-8
tplens_vset=1.4E-1
tplens_vmon=1.67748E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25741E1
iondef3_imon=1.52777E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.54038E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98443E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=3.9832E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=1.72604E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42634E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.0036E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04435E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.0702E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11171E1
os_restr2_imon=3.39247E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.28126E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.24749E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73145E1
iondef1_imon=1.07679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.79254E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.35304E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.61191E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.73031E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.04034E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.10682E0
defgridb_imon=6.24004E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33367E1
os_fil1_imon=9.40726E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06548E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63158E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30915E1
cs_fil1_imon=9.96534E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62132E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64316E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.34778E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.45456E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22068E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19646E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.41272E-1
res40_imon=-2.67356E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-7.56335E-1	-7.34758E-1	-9.19518E0	-9.18984E0	4.19617E-3	9.47237E-2	2.73328E1	-3.26779E1	-3.26714E1	2.68204E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.99E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-7.56645E-1	-7.34639E-1	-9.19514E0	-9.18989E0	4.17233E-3	9.47714E-2	2.73486E1	-3.26768E1	-3.26383E1	2.68388E1	1.19953E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-7.56478E-1	-7.34806E-1	-9.19523E0	-9.18984E0	4.3869E-3	9.4676E-2	2.73558E1	-3.27228E1	-3.26072E1	2.68742E1	1.19766E-7	2.51248E-3	2.51248E-3	6.32418E-3	3.00676E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-7.56168E-1	-7.34639E-1	-9.1953E0	-9.19008E0	4.64916E-3	9.49621E-2	2.73664E1	-3.2632E1	-3.25701E1	2.68466E1	1.20078E-7	2.52093E-3	2.52093E-3	6.31779E-3	3.00494E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-7.56168E-1	-7.34878E-1	-9.19516E0	-9.19001E0	4.43459E-3	9.47714E-2	2.73387E1	-3.27239E1	-3.26092E1	2.68004E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.56025E-1	-7.34615E-1	-9.19514E0	-9.18992E0	4.24385E-3	9.4676E-2	2.73267E1	-3.26861E1	-3.2584E1	2.67962E1	1.20174E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.56335E-1	-7.34854E-1	-9.19518E0	-9.1898E0	4.19617E-3	9.47714E-2	2.736E1	-3.26201E1	-3.26419E1	2.69133E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-7.56168E-1	-7.34854E-1	-9.19504E0	-9.18982E0	4.31538E-3	9.47952E-2	2.73435E1	-3.26512E1	-3.26326E1	2.6849E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-7.56121E-1	-7.34997E-1	-9.19523E0	-9.19008E0	4.57764E-3	9.49144E-2	2.7364E1	-3.26621E1	-3.26603E1	2.67914E1	1.20122E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.56049E-1	-7.34854E-1	-9.19504E0	-9.1898E0	4.8399E-3	9.52959E-2	2.73257E1	-3.26272E1	-3.257E1	2.68748E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-7.56454E-1	-7.34758E-1	-9.19504E0	-9.18982E0	4.07696E-3	9.5129E-2	2.73357E1	-3.26873E1	-3.26326E1	2.68058E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99175E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-7.56168E-1	-7.34925E-1	-9.19528E0	-9.18982E0	4.673E-3	9.5129E-2	2.73322E1	-3.26708E1	-3.26714E1	2.68731E1	1.20017E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09263E0	-7.56145E-1	-7.34782E-1	-9.19509E0	-9.19008E0	4.55379E-3	9.53436E-2	2.73411E1	-3.26795E1	-3.25972E1	2.6804E1	1.198E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09333E0	-7.55954E-1	-7.34329E-1	-9.19499E0	-9.18989E0	4.50611E-3	9.50098E-2	2.73484E1	-3.26476E1	-3.26446E1	2.68346E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-7.56168E-1	-7.35092E-1	-9.19504E0	-9.18965E0	4.45843E-3	9.50336E-2	2.73163E1	-3.26638E1	-3.26183E1	2.6817E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-7.56335E-1	-7.34782E-1	-9.19509E0	-9.18958E0	4.45843E-3	9.50575E-2	2.73155E1	-3.26254E1	-3.26217E1	2.68688E1	1.20209E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00197E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-7.56335E-1	-7.34591E-1	-9.19516E0	-9.18984E0	4.48227E-3	9.5129E-2	2.73574E1	-3.26903E1	-3.26332E1	2.6843E1	1.19819E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00144E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.5624E-1	-7.34806E-1	-9.19492E0	-9.18982E0	4.57764E-3	9.50575E-2	2.73027E1	-3.26307E1	-3.2659E1	2.68273E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-7.56335E-1	-7.34448E-1	-9.19497E0	-9.19003E0	4.3869E-3	9.4986E-2	2.73075E1	-3.26759E1	-3.26795E1	2.68508E1	1.198E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-7.5624E-1	-7.34472E-1	-9.19521E0	-9.18982E0	4.72069E-3	9.51052E-2	2.73145E1	-3.26927E1	-3.25741E1	2.68256E1	1.19646E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.0071E-1