[Scan]
initial_time=2016-01-18T22:07:36
final_time=2016-01-18T22:07:55
ip_count=19
run=1024
dataset=9
scan=680
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-7.56001E-1
ql1_imon=1.39864E-8
ql2_vset=
ql2_vmon=-7.34782E-1
ql2_imon=2.07599E-9
ql3_vset=
ql3_vmon=-9.19521E0
ql3_imon=6.43253E-11
ql4_vset=
ql4_vmon=-9.18941E0
ql4_imon=-2.03466E-10
mult1=-9.63202E-9
mult2=-2.71063E-9
rf_tmon=-4.77679E-3
rf_agc=3.32855E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.65155E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67936E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19478E1
lens5a_imon=1.9737E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04967E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.76466E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.56599E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=2.68556E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.96324E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.48955E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.92251E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.23251E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=2.41098E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63395E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21064E0
cs_ionrep_imon=1.19575E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.92756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.22959E-8
tplens_vset=1.4E-1
tplens_vmon=1.64924E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.54146E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98238E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.00291E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30437E0
ionrepsh_imon=1.74803E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4726E0
os_ea2_imon=-8.25669E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.14812E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03654E0
os_ef2alow_imon=-2.4357E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88414E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11171E1
os_restr2_imon=3.39103E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.28378E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68635E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.84282E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.37604E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.4746E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=2.46775E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82677E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.36478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.38784E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.00789E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24216E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.42066E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05479E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63088E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30865E1
cs_fil1_imon=9.96846E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63633E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64337E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.81613E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.29493E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.25151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.01958E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22123E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.97963E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.758E-1
res40_imon=-2.33839E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-7.5624E-1	-7.34997E-1	-9.19518E0	-9.18987E0	4.8399E-3	9.47714E-2	2.73187E1	-3.26809E1	-3.25865E1	2.68348E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-7.56383E-1	-7.3483E-1	-9.19535E0	-9.18999E0	4.62532E-3	9.4986E-2	2.73099E1	-3.26506E1	-3.26609E1	2.68569E1	1.19851E-7	2.50775E-3	2.50775E-3	6.32356E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-7.56359E-1	-7.34878E-1	-9.19514E0	-9.18989E0	4.36306E-3	9.51529E-2	2.73334E1	-3.2662E1	-3.25865E1	2.68599E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01609E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-7.56288E-1	-7.34782E-1	-9.19521E0	-9.19006E0	4.29153E-3	9.50336E-2	2.7337E1	-3.26779E1	-3.26378E1	2.68337E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-7.5624E-1	-7.34782E-1	-9.19535E0	-9.18987E0	4.55379E-3	9.4676E-2	2.73504E1	-3.26658E1	-3.25868E1	2.68768E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-7.56407E-1	-7.34949E-1	-9.19549E0	-9.18989E0	4.55379E-3	9.47475E-2	2.73134E1	-3.26868E1	-3.26236E1	2.68105E1	1.19925E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.99348E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-7.56168E-1	-7.3483E-1	-9.19545E0	-9.1898E0	4.57764E-3	9.49383E-2	2.73204E1	-3.26419E1	-3.26462E1	2.6855E1	1.19749E-7	2.52169E-3	2.52169E-3	6.33977E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.56383E-1	-7.34901E-1	-9.19545E0	-9.19006E0	4.33922E-3	9.47237E-2	2.73141E1	-3.2644E1	-3.25791E1	2.68496E1	1.19925E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.99613E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-7.56383E-1	-7.34663E-1	-9.19561E0	-9.19015E0	4.22001E-3	9.49383E-2	2.73099E1	-3.26735E1	-3.26092E1	2.67914E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-7.56383E-1	-7.34806E-1	-9.19538E0	-9.19011E0	4.14848E-3	9.48668E-2	2.73122E1	-3.26343E1	-3.26107E1	2.68609E1	1.198E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.0148E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-7.56335E-1	-7.34758E-1	-9.19549E0	-9.19013E0	4.24385E-3	9.47952E-2	2.73033E1	-3.26356E1	-3.26266E1	2.68496E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-7.56264E-1	-7.34329E-1	-9.19559E0	-9.19025E0	4.36306E-3	9.47237E-2	2.73198E1	-3.26626E1	-3.25965E1	2.67319E1	1.20226E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9874E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.56383E-1	-7.34758E-1	-9.19573E0	-9.19025E0	4.673E-3	9.5129E-2	2.72985E1	-3.2635E1	-3.26134E1	2.68959E1	1.20004E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.9841E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-7.56192E-1	-7.34854E-1	-9.19578E0	-9.19054E0	4.60148E-3	9.51052E-2	2.72991E1	-3.26627E1	-3.2596E1	2.68545E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-7.56049E-1	-7.34711E-1	-9.19576E0	-9.19018E0	4.43459E-3	9.5129E-2	2.73273E1	-3.26873E1	-3.26344E1	2.68839E1	1.20122E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-7.56288E-1	-7.34615E-1	-9.19547E0	-9.19003E0	4.3869E-3	9.52005E-2	2.73231E1	-3.26699E1	-3.2629E1	2.67493E1	1.19757E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.9978E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-7.56097E-1	-7.3452E-1	-9.19552E0	-9.19008E0	4.36306E-3	9.49621E-2	2.72811E1	-3.26458E1	-3.2641E1	2.68268E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.55978E-1	-7.34949E-1	-9.19588E0	-9.19034E0	4.673E-3	9.48906E-2	2.73142E1	-3.2663E1	-3.26271E1	2.68322E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.56049E-1	-7.34615E-1	-9.19557E0	-9.18968E0	4.41074E-3	9.5129E-2	2.73273E1	-3.26693E1	-3.26446E1	2.68538E1	1.20127E-7	2.51886E-3	2.51886E-3	6.33341E-3	2.99014E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-7.56001E-1	-7.34782E-1	-9.19521E0	-9.18941E0	4.31538E-3	9.49621E-2	2.73111E1	-3.26554E1	-3.26356E1	2.68635E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.97963E-1