[Scan]
initial_time=2016-01-18T22:08:02
final_time=2016-01-18T22:08:22
ip_count=19
run=1024
dataset=9
scan=681
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.0881E-4
ql1_vset=
ql1_vmon=-7.56335E-1
ql1_imon=1.39808E-8
ql2_vset=
ql2_vmon=-7.34401E-1
ql2_imon=2.00405E-9
ql3_vset=
ql3_vmon=-9.19502E0
ql3_imon=1.20008E-10
ql4_vset=
ql4_vmon=-9.19003E0
ql4_imon=-1.66333E-10
mult1=-9.73579E-9
mult2=-2.77421E-9
rf_tmon=-4.14964E-3
rf_agc=3.37692E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.69901E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.37262E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19757E1
lens5a_imon=2.01547E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5416E1
cs_ef1b_imon=2.78154E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04851E1
cs_ea1_imon=2.55867E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33013E0
lens1_imon=2.54857E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64864E1
os_ef1alow_imon=2.96605E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03428E1
cs_ea2_imon=1.48164E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84438E1
cs_ef1a_imon=2.90954E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.23642E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1136E1
os_restr1_imon=4.26922E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14601E1
os_ea1_imon=2.39845E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.0686E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20842E0
cs_ionrep_imon=1.17241E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93454E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0194E1
cs_anode1_imon=2.92226E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=3.23365E-8
tplens_vset=1.4E-1
tplens_vmon=1.66826E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.49998E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.55501E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.9817E-4
ql6_vset=1.0E-1
ql6_vmon=9.46999E-2
ql6_imon=4.01374E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28766E0
ionrepsh_imon=1.74107E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.17944E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74589E1
cs_ef2b_imon=3.12586E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48483E0
os_ea2_imon=-5.99805E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00772E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71532E1
cs_ef2a_imon=3.15505E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05705E0
os_ef2alow_imon=-2.59677E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53968E-1
os_ef2bup_imon=-5.37002E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11273E1
os_restr2_imon=3.39009E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.27532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02033E1
cs_anode2_imon=2.23475E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73098E1
iondef1_imon=1.09867E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68581E1
iondef4_imon=1.09626E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.86741E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.37704E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16445E0
cs_ionaccel_imon=-1.81457E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47357E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56617E1
einzel_imon=7.77018E-6
window_vset=0.0E0
window_vmon=2.48785E-1
window_imon=-8.04075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86381E1
mask2_imon=-6.43144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.52756E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.31089E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.2393E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19323E0
defgridb_imon=6.03386E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.42757E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06481E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6297E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30872E1
cs_fil1_imon=9.97031E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62391E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64314E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82672E-2
os_fil2_imon=-2.61884E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.71415E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3382E-1
cs_fil2_imon=-2.3631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.55523E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22063E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.80394E-1
res40_imon=-2.45455E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-7.56145E-1	-7.34687E-1	-9.19542E0	-9.1897E0	4.19617E-3	9.49621E-2	2.73104E1	-3.26732E1	-3.26142E1	2.68647E1	1.20208E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.95682E-1
2.0E0	2.6E1	1.0E0	3.16E2	1.6E2	-2.0941E0	-7.56073E-1	-7.34472E-1	-9.19547E0	-9.18982E0	3.93391E-3	9.49621E-2	2.73382E1	-3.2664E1	-3.26303E1	2.68322E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-7.56168E-1	-7.34663E-1	-9.19559E0	-9.18989E0	4.17233E-3	9.5129E-2	2.73257E1	-3.26396E1	-3.26396E1	2.68208E1	1.20191E-7	2.51359E-3	2.51359E-3	6.32978E-3	2.98554E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.0934E0	-7.55978E-1	-7.34448E-1	-9.19564E0	-9.18984E0	4.07696E-3	9.51529E-2	2.73411E1	-3.26508E1	-3.26543E1	2.68256E1	1.20055E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-7.56001E-1	-7.3483E-1	-9.19549E0	-9.18949E0	4.07696E-3	9.48429E-2	2.73466E1	-3.26867E1	-3.26068E1	2.6792E1	1.198E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.56073E-1	-7.34735E-1	-9.19518E0	-9.18968E0	4.31538E-3	9.50336E-2	2.73111E1	-3.26795E1	-3.26056E1	2.68713E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-7.56145E-1	-7.34591E-1	-9.19526E0	-9.18968E0	4.26769E-3	9.52721E-2	2.73147E1	-3.26639E1	-3.26236E1	2.67854E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-7.56311E-1	-7.34544E-1	-9.19526E0	-9.19013E0	4.29153E-3	9.52244E-2	2.73015E1	-3.26585E1	-3.26296E1	2.68833E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-7.56574E-1	-7.34663E-1	-9.19549E0	-9.19001E0	4.14848E-3	9.53436E-2	2.73183E1	-3.2647E1	-3.2611E1	2.68304E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.56216E-1	-7.34568E-1	-9.19511E0	-9.18977E0	4.02927E-3	9.51767E-2	2.73198E1	-3.26644E1	-3.26413E1	2.68376E1	1.20278E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00302E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-7.56502E-1	-7.34591E-1	-9.19497E0	-9.18984E0	4.12464E-3	9.52482E-2	2.73431E1	-3.26872E1	-3.26591E1	2.684E1	1.20055E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-7.56454E-1	-7.34925E-1	-9.19502E0	-9.18989E0	4.22001E-3	9.52244E-2	2.73293E1	-3.26573E1	-3.26142E1	2.68178E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-7.56192E-1	-7.34711E-1	-9.19507E0	-9.18984E0	4.45843E-3	9.50813E-2	2.73123E1	-3.26657E1	-3.2593E1	2.6855E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-7.5624E-1	-7.34782E-1	-9.19502E0	-9.19013E0	4.55379E-3	9.49383E-2	2.73135E1	-3.26573E1	-3.26579E1	2.68286E1	1.2054E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.97963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-7.56192E-1	-7.34639E-1	-9.19495E0	-9.19003E0	4.48227E-3	9.48668E-2	2.73151E1	-3.26697E1	-3.26526E1	2.68082E1	1.20106E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09356E0	-7.56288E-1	-7.34925E-1	-9.19538E0	-9.18977E0	4.57764E-3	9.52005E-2	2.73175E1	-3.26826E1	-3.25747E1	2.684E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9952E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-7.56431E-1	-7.34687E-1	-9.19504E0	-9.18992E0	4.52995E-3	9.50575E-2	2.73472E1	-3.26969E1	-3.2632E1	2.68743E1	1.20243E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.01104E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-7.56335E-1	-7.34448E-1	-9.19528E0	-9.19015E0	4.26769E-3	9.52244E-2	2.73641E1	-3.27021E1	-3.26555E1	2.68146E1	1.19819E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.02813E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-7.56001E-1	-7.34472E-1	-9.19514E0	-9.19027E0	4.33922E-3	9.50098E-2	2.73129E1	-3.26422E1	-3.26182E1	2.6801E1	1.19851E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-7.56335E-1	-7.34401E-1	-9.19502E0	-9.19003E0	4.43459E-3	9.46999E-2	2.73098E1	-3.26567E1	-3.26254E1	2.68581E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01347E-1