[Scan]
initial_time=2016-01-18T22:09:22
final_time=2016-01-18T22:09:42
ip_count=19
run=1024
dataset=9
scan=684
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-7.56335E-1
ql1_imon=1.39807E-8
ql2_vset=
ql2_vmon=-7.34496E-1
ql2_imon=1.98627E-9
ql3_vset=
ql3_vmon=-9.19526E0
ql3_imon=1.0004E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-1.67704E-10
mult1=-9.31897E-9
mult2=-2.7266E-9
rf_tmon=-5.79819E-3
rf_agc=3.28529E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.69857E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64953E0
bslens_imon=2.28228E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20166E1
lens5a_imon=1.99676E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12425E2
lens4a_imon=2.05034E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53087E1
cs_ef1b_imon=2.73551E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04443E1
cs_ea1_imon=2.58297E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35664E0
lens1_imon=2.73773E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64621E1
os_ef1alow_imon=3.00498E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0399E1
cs_ea2_imon=1.49136E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8523E1
cs_ef1a_imon=2.92938E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.22973E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10918E1
os_restr1_imon=4.22319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14889E1
os_ea1_imon=2.41438E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63941E1
os_ef1bup_imon=3.09105E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26557E0
cs_ionrep_imon=1.16704E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02539E1
cs_anode1_imon=2.94584E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.23034E-8
tplens_vset=1.4E-1
tplens_vmon=1.66714E0
tplens_imon=-4.50414E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26554E1
iondef3_imon=1.49173E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26314E1
iondef2_imon=1.56666E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98206E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.00759E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26557E0
ionrepsh_imon=1.75508E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33848E1
lens5b_imon=2.1547E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74614E1
cs_ef2b_imon=3.1049E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44432E0
os_ea2_imon=-6.41408E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7089E1
cs_ef2a_imon=3.15281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04021E0
os_ef2alow_imon=-2.2038E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64572E-1
os_ef2bup_imon=-4.96582E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.39944E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.29267E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.26394E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.10203E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.06594E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.84505E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.35026E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15384E0
cs_ionaccel_imon=-1.46277E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02141E2
cs_ionfocb_imon=1.47544E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55919E1
einzel_imon=7.17885E-6
window_vset=0.0E0
window_vmon=2.86211E-1
window_imon=-6.50629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82738E2
mask1_imon=2.39511E-4
mask2_vset=0.0E0
mask2_vmon=-1.86282E1
mask2_imon=-1.27564E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.74031E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.65679E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=6.63475E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47403E0
defgridb_imon=6.2748E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.42065E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06599E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63013E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=9.96744E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62852E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64314E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.80448E-2
os_fil2_imon=-2.10735E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05939E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.49205E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35164E-1
cs_fil2_imon=-2.65003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43562E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22093E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.02196E-1
res40_imon=-2.00919E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-7.56145E-1	-7.3483E-1	-9.19557E0	-9.18992E0	4.33922E-3	9.4986E-2	2.73207E1	-3.26567E1	-3.26173E1	2.68111E1	1.20244E-7	2.52473E-3	2.52473E-3	6.32978E-3	3.01209E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-7.5593E-1	-7.34544E-1	-9.19533E0	-9.18992E0	4.33922E-3	9.48429E-2	2.73161E1	-3.26627E1	-3.26438E1	2.68022E1	1.20088E-7	2.51918E-3	2.51918E-3	6.31827E-3	3.01284E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-7.56121E-1	-7.34329E-1	-9.19523E0	-9.19011E0	4.3869E-3	9.50098E-2	2.73246E1	-3.26496E1	-3.2659E1	2.68382E1					
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-7.56073E-1	-7.34305E-1	-9.19535E0	-9.19013E0	4.45843E-3	9.49383E-2	2.73448E1	-3.26446E1	-3.26152E1	2.68238E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-7.55978E-1	-7.34472E-1	-9.19523E0	-9.1897E0	4.12464E-3	9.49383E-2	2.73069E1	-3.26422E1	-3.26302E1	2.67607E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98481E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-7.56383E-1	-7.34234E-1	-9.19533E0	-9.18982E0	4.24385E-3	9.50336E-2	2.73347E1	-3.26454E1	-3.26641E1	2.6835E1	1.19705E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-7.56431E-1	-7.34234E-1	-9.19538E0	-9.18984E0	4.24385E-3	9.51529E-2	2.73E1	-3.26527E1	-3.26203E1	2.68011E1	1.19822E-7	2.51345E-3	2.51345E-3	6.35349E-3	3.00635E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-7.56383E-1	-7.34472E-1	-9.19533E0	-9.18996E0	4.36306E-3	9.50336E-2	2.73045E1	-3.26655E1	-3.26626E1	2.68018E1	1.20019E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.99353E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-7.5624E-1	-7.3452E-1	-9.19545E0	-9.18994E0	4.60148E-3	9.51529E-2	2.73486E1	-3.26811E1	-3.25728E1	2.69354E1	1.19891E-7	2.51919E-3	2.51919E-3	6.32328E-3	2.98092E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-7.56168E-1	-7.34663E-1	-9.19559E0	-9.18975E0	4.57764E-3	9.49621E-2	2.73724E1	-3.26915E1	-3.26044E1	2.68701E1	1.20154E-7	2.52066E-3	2.52066E-3	6.3074E-3	2.9944E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-7.55858E-1	-7.34591E-1	-9.19511E0	-9.18975E0	4.55379E-3	9.50098E-2	2.7288E1	-3.26349E1	-3.26608E1	2.6858E1	1.19902E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-7.55882E-1	-7.34758E-1	-9.19516E0	-9.19006E0	4.36306E-3	9.53913E-2	2.73237E1	-3.26428E1	-3.26302E1	2.68178E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-7.5593E-1	-7.34615E-1	-9.19557E0	-9.18972E0	4.45843E-3	9.52959E-2	2.73653E1	-3.26579E1	-3.2636E1	2.69229E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.56001E-1	-7.34377E-1	-9.1954E0	-9.18965E0	4.26769E-3	9.51529E-2	2.73219E1	-3.26561E1	-3.26524E1	2.67433E1	1.20226E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-7.56145E-1	-7.34687E-1	-9.19533E0	-9.18977E0	4.55379E-3	9.51767E-2	2.72979E1	-3.2644E1	-3.26795E1	2.69138E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-7.56168E-1	-7.34854E-1	-9.19523E0	-9.18989E0	4.3869E-3	9.52005E-2	2.73634E1	-3.26446E1	-3.25948E1	2.6892E1	1.19851E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00453E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-7.5624E-1	-7.34901E-1	-9.19518E0	-9.19008E0	4.50611E-3	9.50098E-2	2.73279E1	-3.26573E1	-3.26362E1	2.68478E1	1.19872E-7	2.52139E-3	2.52139E-3	6.3074E-3	2.99348E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-7.56335E-1	-7.3483E-1	-9.19542E0	-9.18987E0	4.62532E-3	9.5439E-2	2.73526E1	-3.26567E1	-3.26074E1	2.68334E1	1.20055E-7	2.51847E-3	2.51847E-3	6.35059E-3	3.03286E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.56502E-1	-7.34591E-1	-9.19526E0	-9.18989E0	4.62532E-3	9.4986E-2	2.73187E1	-3.2685E1	-3.26337E1	2.6829E1	1.20122E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.56335E-1	-7.34496E-1	-9.19526E0	-9.18987E0	4.41074E-3	9.50098E-2	2.73129E1	-3.26314E1	-3.26554E1	2.68442E1	1.20311E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1