[Scan]
initial_time=2016-01-18T22:10:15
final_time=2016-01-18T22:10:35
ip_count=19
run=1024
dataset=9
scan=686
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-7.56192E-1
ql1_imon=1.40084E-8
ql2_vset=
ql2_vmon=-7.3452E-1
ql2_imon=1.98873E-9
ql3_vset=
ql3_vmon=-9.19533E0
ql3_imon=1.11163E-10
ql4_vset=
ql4_vmon=-9.19011E0
ql4_imon=-1.8301E-10
mult1=-9.89692E-9
mult2=-2.76253E-9
rf_tmon=-5.38362E-3
rf_agc=3.2931E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.6888E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65147E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.0487E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54403E1
cs_ef1b_imon=2.79349E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04693E1
cs_ea1_imon=2.60308E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35781E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.95567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.47719E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83842E1
cs_ef1a_imon=2.89188E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.23207E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.30355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14474E1
os_ea1_imon=2.3847E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20786E0
cs_ionrep_imon=1.182E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01479E1
cs_anode1_imon=2.89512E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.2236E-8
tplens_vset=1.4E-1
tplens_vmon=1.65795E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.51683E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.57134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98006E-4
ql6_vset=1.0E-1
ql6_vmon=9.47714E-2
ql6_imon=4.01416E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30991E0
ionrepsh_imon=1.74866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.16985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47685E0
os_ea2_imon=-8.86429E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00534E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71798E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02633E0
os_ef2alow_imon=-2.7961E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.50628E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.38454E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.28123E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.21397E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.11015E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68484E1
iondef4_imon=1.12666E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.82212E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.3491E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.91313E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0203E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=8.0122E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82589E2
mask1_imon=2.38781E-4
mask2_vset=0.0E0
mask2_vmon=-1.85984E1
mask2_imon=-5.07579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.45596E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.52509E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.20466E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.43303E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07593E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6271E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.96197E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63033E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64245E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.78776E-2
os_fil2_imon=-2.99032E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.68966E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37938E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2211E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.63517E-1
res40_imon=-2.87538E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-7.56145E-1	-7.34544E-1	-9.19533E0	-9.18994E0	4.45843E-3	9.48668E-2	2.73496E1	-3.26909E1	-3.2635E1	2.68154E1	1.19941E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.98842E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09294E0	-7.56192E-1	-7.34758E-1	-9.1954E0	-9.18984E0	4.55379E-3	9.49383E-2	2.73196E1	-3.26864E1	-3.26534E1	2.67953E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09263E0	-7.55954E-1	-7.34687E-1	-9.19523E0	-9.18996E0	4.45843E-3	9.48429E-2	2.73458E1	-3.26858E1	-3.26235E1	2.68282E1	1.1958E-7	2.52364E-3	2.52364E-3	6.33297E-3	3.02586E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09302E0	-7.56192E-1	-7.34925E-1	-9.19499E0	-9.19018E0	4.31538E-3	9.50813E-2	2.73381E1	-3.26632E1	-3.26425E1	2.68719E1	1.19895E-7	2.51527E-3	2.51527E-3	6.33648E-3	3.0286E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09294E0	-7.56001E-1	-7.34878E-1	-9.19507E0	-9.19001E0	4.55379E-3	9.45807E-2	2.73508E1	-3.2647E1	-3.26086E1	2.68034E1	1.198E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-7.56001E-1	-7.34782E-1	-9.19516E0	-9.19006E0	4.62532E-3	9.50098E-2	2.72843E1	-3.26897E1	-3.26144E1	2.68238E1	1.2033E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-7.56216E-1	-7.34591E-1	-9.19507E0	-9.19001E0	4.14848E-3	9.51052E-2	2.73256E1	-3.26576E1	-3.26128E1	2.67864E1	1.19819E-7	2.51359E-3	2.51359E-3	6.34661E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-7.55978E-1	-7.34735E-1	-9.1953E0	-9.18994E0	4.673E-3	9.50336E-2	2.72929E1	-3.26872E1	-3.25795E1	2.68687E1	1.20251E-7	2.51731E-3	2.51731E-3	6.29962E-3	2.98645E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-7.56264E-1	-7.34758E-1	-9.19523E0	-9.18968E0	4.43459E-3	9.49383E-2	2.73033E1	-3.26657E1	-3.26098E1	2.68647E1	1.20084E-7	2.51581E-3	2.51581E-3	6.29624E-3	2.99613E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-7.56288E-1	-7.34639E-1	-9.19521E0	-9.18946E0	4.17233E-3	9.47714E-2	2.73299E1	-3.26785E1	-3.26313E1	2.68007E1	1.20122E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-7.56311E-1	-7.3452E-1	-9.19538E0	-9.18953E0	4.45843E-3	9.50813E-2	2.73424E1	-3.26646E1	-3.25752E1	2.68327E1	1.198E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-7.56073E-1	-7.34591E-1	-9.19504E0	-9.18972E0	4.26769E-3	9.50098E-2	2.72979E1	-3.26573E1	-3.26338E1	2.68792E1	1.20084E-7	2.51025E-3	2.51025E-3	6.32978E-3	2.99879E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-7.55906E-1	-7.34663E-1	-9.19507E0	-9.18972E0	4.48227E-3	9.50336E-2	2.73033E1	-3.26362E1	-3.26374E1	2.68334E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9978E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-7.56073E-1	-7.34782E-1	-9.19542E0	-9.19001E0	4.60148E-3	9.51767E-2	2.73321E1	-3.26849E1	-3.26302E1	2.68743E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-7.56288E-1	-7.34735E-1	-9.19497E0	-9.18999E0	4.55379E-3	9.50098E-2	2.73111E1	-3.26482E1	-3.25888E1	2.684E1	1.19705E-7	2.50898E-3	2.50898E-3	6.29645E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-7.56288E-1	-7.34639E-1	-9.19514E0	-9.18996E0	4.3869E-3	9.49144E-2	2.7288E1	-3.26697E1	-3.2629E1	2.68065E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-7.56288E-1	-7.34377E-1	-9.19511E0	-9.18987E0	4.52995E-3	9.4986E-2	2.73234E1	-3.26478E1	-3.26124E1	2.68274E1	1.20174E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-7.5624E-1	-7.34305E-1	-9.19528E0	-9.19001E0	4.55379E-3	9.47714E-2	2.73688E1	-3.26579E1	-3.26368E1	2.68484E1	1.20466E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-7.56121E-1	-7.34377E-1	-9.19547E0	-9.18994E0	4.88758E-3	9.51529E-2	2.74225E1	-3.28124E1	-3.2524E1	2.6865E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-7.56192E-1	-7.3452E-1	-9.19533E0	-9.19011E0	4.45843E-3	9.47714E-2	2.73153E1	-3.26494E1	-3.26236E1	2.68484E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00453E-1