[Scan]
initial_time=2016-01-18T22:11:09
final_time=2016-01-18T22:11:28
ip_count=19
run=1024
dataset=9
scan=688
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09217E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-7.56359E-1
ql1_imon=1.40186E-8
ql2_vset=
ql2_vmon=-7.34615E-1
ql2_imon=1.98166E-9
ql3_vset=
ql3_vmon=-9.19499E0
ql3_imon=1.10257E-10
ql4_vset=
ql4_vmon=-9.1902E0
ql4_imon=-1.87838E-10
mult1=-1.02581E-8
mult2=-2.8783E-9
rf_tmon=-3.29275E-3
rf_agc=3.39765E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=1.69914E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.19286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19494E1
lens5a_imon=2.00032E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04877E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=2.75243E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=2.56379E-5
lens1_vset=-5.0E0
lens1_vmon=-5.382E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64853E1
os_ef1alow_imon=2.97854E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.48958E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84468E1
cs_ef1a_imon=2.90352E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.22966E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11182E1
os_restr1_imon=4.27856E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14822E1
os_ea1_imon=2.40629E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6421E1
os_ef1bup_imon=3.07443E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.17103E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.93509E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01597E1
cs_anode1_imon=2.91662E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.22479E-8
tplens_vset=1.4E-1
tplens_vmon=1.66798E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.50763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26188E1
iondef2_imon=1.55506E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98282E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.01222E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25151E0
ionrepsh_imon=1.73097E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.16348E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74702E1
cs_ef2b_imon=3.12432E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45502E0
os_ea2_imon=-8.7935E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00715E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71205E1
cs_ef2a_imon=3.15015E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09849E0
os_ef2alow_imon=-2.38256E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83467E-1
os_ef2bup_imon=-5.26993E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11011E1
os_restr2_imon=3.37838E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.27805E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.25245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.119E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68701E1
iondef4_imon=1.10989E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.83018E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.36647E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13663E0
cs_ionaccel_imon=-1.91902E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56623E1
einzel_imon=7.52861E-6
window_vset=0.0E0
window_vmon=2.79735E-1
window_imon=-8.46876E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39201E-4
mask2_vset=0.0E0
mask2_vmon=-1.86185E1
mask2_imon=-7.72569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=6.79055E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.44015E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.13033E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30221E0
defgridb_imon=6.03665E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.43151E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06291E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63019E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30898E1
cs_fil1_imon=9.95284E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62502E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64092E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99037E-2
os_fil2_imon=-2.87991E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93826E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.44794E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34927E-1
cs_fil2_imon=-2.70299E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44878E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2207E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.83978E-1
res40_imon=-2.50994E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-7.56526E-1	-7.34878E-1	-9.19516E0	-9.18994E0	4.36306E-3	9.53913E-2	2.73305E1	-3.26579E1	-3.25959E1	2.68683E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99686E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-7.56812E-1	-7.34901E-1	-9.1953E0	-9.18989E0	4.52995E-3	9.52244E-2	2.73291E1	-3.26476E1	-3.2626E1	2.67601E1	1.20055E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-7.56645E-1	-7.34997E-1	-9.19523E0	-9.19027E0	4.31538E-3	9.50575E-2	2.73505E1	-3.26862E1	-3.26449E1	2.68904E1	1.20031E-7	2.51581E-3	2.51581E-3	6.30182E-3	3.00676E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-7.56884E-1	-7.34854E-1	-9.19535E0	-9.19006E0	4.33922E-3	9.5129E-2	2.73327E1	-3.26741E1	-3.26392E1	2.68569E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-7.56311E-1	-7.35068E-1	-9.19511E0	-9.19006E0	4.41074E-3	9.52005E-2	2.73275E1	-3.26472E1	-3.26231E1	2.68226E1	1.19595E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-7.56335E-1	-7.34806E-1	-9.1954E0	-9.18996E0	4.1008E-3	9.52244E-2	2.73496E1	-3.26771E1	-3.25984E1	2.67625E1	1.20004E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.56359E-1	-7.34782E-1	-9.1953E0	-9.18977E0	4.19617E-3	9.52244E-2	2.73263E1	-3.26343E1	-3.26756E1	2.6913E1	1.19872E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.01209E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.56335E-1	-7.35164E-1	-9.1954E0	-9.1898E0	4.41074E-3	9.51052E-2	2.73243E1	-3.26549E1	-3.26044E1	2.68058E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-7.56097E-1	-7.34925E-1	-9.1949E0	-9.1897E0	4.48227E-3	9.52005E-2	2.73265E1	-3.26683E1	-3.25779E1	2.68719E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.56145E-1	-7.34544E-1	-9.19521E0	-9.18972E0	4.26769E-3	9.52482E-2	2.7302E1	-3.26578E1	-3.26154E1	2.67945E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-7.56073E-1	-7.34687E-1	-9.19514E0	-9.1898E0	4.50611E-3	9.52244E-2	2.73057E1	-3.26254E1	-3.26356E1	2.68532E1	1.20045E-7	2.51498E-3	2.51498E-3	6.27901E-3	3.01065E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-7.56335E-1	-7.34854E-1	-9.19514E0	-9.18999E0	4.22001E-3	9.54151E-2	2.73394E1	-3.26744E1	-3.26597E1	2.68418E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09348E0	-7.56168E-1	-7.34591E-1	-9.1949E0	-9.19008E0	4.33922E-3	9.53436E-2	2.73552E1	-3.26762E1	-3.25947E1	2.6789E1	1.19965E-7	2.51334E-3	2.51334E-3	6.28006E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09248E0	-7.5624E-1	-7.34949E-1	-9.19521E0	-9.19025E0	4.3869E-3	9.5129E-2	2.73285E1	-3.26669E1	-3.26536E1	2.6825E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02511E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09325E0	-7.5655E-1	-7.34949E-1	-9.19495E0	-9.19011E0	4.50611E-3	9.5129E-2	2.73128E1	-3.26484E1	-3.26101E1	2.68713E1	1.20226E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09302E0	-7.5624E-1	-7.34878E-1	-9.19459E0	-9.19011E0	4.29153E-3	9.50813E-2	2.72721E1	-3.26347E1	-3.26503E1	2.68285E1	1.20158E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.01223E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09279E0	-7.56526E-1	-7.34758E-1	-9.1949E0	-9.19001E0	4.36306E-3	9.50336E-2	2.73235E1	-3.26731E1	-3.26401E1	2.68364E1	1.20209E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09271E0	-7.5624E-1	-7.34639E-1	-9.19476E0	-9.18982E0	4.33922E-3	9.49621E-2	2.73281E1	-3.26649E1	-3.25906E1	2.68388E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09255E0	-7.56383E-1	-7.34878E-1	-9.19495E0	-9.18987E0	4.24385E-3	9.52005E-2	2.73045E1	-3.25983E1	-3.25293E1	2.68302E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09217E0	-7.56359E-1	-7.34615E-1	-9.19499E0	-9.1902E0	4.07696E-3	9.49144E-2	2.73201E1	-3.26188E1	-3.26146E1	2.68701E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00453E-1