[Scan]
initial_time=2016-01-18T22:12:02
final_time=2016-01-18T22:12:22
ip_count=19
run=1024
dataset=9
scan=690
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-7.56431E-1
ql1_imon=1.39985E-8
ql2_vset=
ql2_vmon=-7.34949E-1
ql2_imon=2.03315E-9
ql3_vset=
ql3_vmon=-9.19557E0
ql3_imon=7.88808E-11
ql4_vset=
ql4_vmon=-9.18975E0
ql4_imon=-1.82092E-10
mult1=-9.28629E-9
mult2=-2.70977E-9
rf_tmon=-5.43941E-3
rf_agc=3.26057E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.67994E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19606E1
lens5a_imon=1.9989E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05206E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54121E1
cs_ef1b_imon=2.76394E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=2.58078E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36607E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.5048E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=2.89008E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.22844E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11093E1
os_restr1_imon=4.29238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.40239E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64014E1
os_ef1bup_imon=3.06379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=1.1859E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93636E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=2.92179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.22532E-8
tplens_vset=1.4E-1
tplens_vmon=1.66149E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26044E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26507E1
iondef2_imon=1.57134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98119E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=4.01953E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32407E0
ionrepsh_imon=1.75787E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.15994E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74856E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46328E0
os_ea2_imon=-5.67882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.15137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08399E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.5279E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.36832E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.28442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.22479E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73422E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68043E1
iondef4_imon=1.11657E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.80471E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.36225E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11092E0
cs_ionaccel_imon=-2.11855E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.475E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=2.30557E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.85924E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.78512E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.00645E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22838E0
defgridb_imon=5.93755E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.43784E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06717E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6295E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30932E1
cs_fil1_imon=9.95434E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62636E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64124E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.85107E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.49604E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.90623E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2205E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99562E-1
chamber_ion_pmon=1.20196E-7
chamber_cvt_pmon=2.51736E-3
foreline_cvt_pmon=2.51736E-3
chamber_tmon=1.40034E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.22962E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-7.56001E-1	-7.35092E-1	-9.19523E0	-9.19001E0	4.98295E-3	9.51767E-2	2.73375E1	-3.26933E1	-3.26272E1	2.68708E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99941E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-7.56288E-1	-7.34568E-1	-9.19557E0	-9.19006E0	4.62532E-3	9.50336E-2	2.73161E1	-3.26762E1	-3.26315E1	2.6845E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.97901E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-7.56335E-1	-7.3483E-1	-9.19545E0	-9.18982E0	4.52995E-3	9.4986E-2	2.73269E1	-3.26579E1	-3.26467E1	2.6807E1	1.20084E-7	2.50914E-3	2.50914E-3	6.28511E-3	2.98819E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-7.56168E-1	-7.34854E-1	-9.19552E0	-9.19008E0	4.673E-3	9.50336E-2	2.73369E1	-3.265E1	-3.26176E1	2.67283E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-7.56216E-1	-7.34544E-1	-9.1953E0	-9.18987E0	4.43459E-3	9.52959E-2	2.73243E1	-3.26759E1	-3.26645E1	2.68244E1	1.19809E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-7.56407E-1	-7.34663E-1	-9.19549E0	-9.18992E0	4.26769E-3	9.52005E-2	2.72913E1	-3.26753E1	-3.26152E1	2.6849E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09379E0	-7.56359E-1	-7.3452E-1	-9.19549E0	-9.19003E0	4.62532E-3	9.52244E-2	2.73213E1	-3.26693E1	-3.26236E1	2.67752E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-7.56121E-1	-7.34901E-1	-9.1953E0	-9.19006E0	4.79221E-3	9.52959E-2	2.73303E1	-3.26687E1	-3.26152E1	2.69403E1	1.19913E-7	2.52538E-3	2.52538E-3	6.33486E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09325E0	-7.56359E-1	-7.34854E-1	-9.19511E0	-9.18958E0	4.50611E-3	9.52244E-2	2.7301E1	-3.26573E1	-3.2649E1	2.68328E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-7.56478E-1	-7.34663E-1	-9.19514E0	-9.18996E0	4.74453E-3	9.51529E-2	2.73472E1	-3.26639E1	-3.26266E1	2.68382E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.03286E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-7.56407E-1	-7.34973E-1	-9.19516E0	-9.18989E0	4.26769E-3	9.50336E-2	2.73321E1	-3.2647E1	-3.26188E1	2.6828E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.02545E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-7.56598E-1	-7.35164E-1	-9.19523E0	-9.18999E0	4.33922E-3	9.4986E-2	2.73231E1	-3.26783E1	-3.26374E1	2.68262E1	1.19953E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.02511E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-7.56502E-1	-7.35116E-1	-9.19521E0	-9.18994E0	4.3869E-3	9.52482E-2	2.73285E1	-3.26591E1	-3.26452E1	2.68424E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.04241E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-7.56621E-1	-7.35021E-1	-9.19561E0	-9.1898E0	4.74453E-3	9.53674E-2	2.73315E1	-3.26386E1	-3.26524E1	2.6834E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-7.56216E-1	-7.35307E-1	-9.19514E0	-9.18965E0	4.81606E-3	9.51052E-2	2.73249E1	-3.26609E1	-3.26302E1	2.68508E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-7.56335E-1	-7.34925E-1	-9.19552E0	-9.18977E0	4.62532E-3	9.53197E-2	2.73165E1	-3.26675E1	-3.26194E1	2.67974E1	1.19809E-7	2.52538E-3	2.52538E-3	6.34588E-3	3.01085E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09549E0	-7.56526E-1	-7.35283E-1	-9.1954E0	-9.18956E0	4.64916E-3	9.51767E-2	2.73195E1	-3.26675E1	-3.26428E1	2.68623E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09642E0	-7.56526E-1	-7.35068E-1	-9.19552E0	-9.18992E0	4.48227E-3	9.55343E-2	2.73275E1	-3.26653E1	-3.26127E1	2.68734E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-7.56526E-1	-7.34901E-1	-9.19578E0	-9.18984E0	4.62532E-3	9.53197E-2	2.73574E1	-3.26867E1	-3.26386E1	2.67636E1	1.20217E-7	2.51734E-3	2.51734E-3	6.31332E-3	2.99916E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.56431E-1	-7.34949E-1	-9.19557E0	-9.18975E0	4.76837E-3	9.52005E-2	2.73422E1	-3.26507E1	-3.26044E1	2.68043E1	1.20196E-7	2.51736E-3	2.51736E-3	6.3074E-3	2.99562E-1