[Scan]
initial_time=2016-01-18T22:12:29
final_time=2016-01-18T22:12:48
ip_count=19
run=1024
dataset=9
scan=691
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-7.56431E-1
ql1_imon=1.39815E-8
ql2_vset=
ql2_vmon=-7.34615E-1
ql2_imon=1.96903E-9
ql3_vset=
ql3_vmon=-9.19526E0
ql3_imon=8.42452E-11
ql4_vset=
ql4_vmon=-9.18961E0
ql4_imon=-1.94871E-10
mult1=-9.60007E-9
mult2=-2.81865E-9
rf_tmon=-4.63721E-3
rf_agc=3.30859E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.64733E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.38045E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19512E1
lens5a_imon=2.00315E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05001E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.76538E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=2.5645E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37079E0
lens1_imon=2.50079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03779E1
cs_ea2_imon=1.48604E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.90377E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.22635E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.2686E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14739E1
os_ea1_imon=2.40664E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.06847E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2167E0
cs_ionrep_imon=1.18413E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91957E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.93152E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.22511E-8
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-5.04173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26541E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26678E1
iondef2_imon=1.56391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98321E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.05982E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=1.75504E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.16171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74297E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4391E0
os_ea2_imon=-9.57217E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01028E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=3.38923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23011E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.23416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73132E1
iondef1_imon=1.09352E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6855E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.79963E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.33385E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-7.41837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86164E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=6.91443E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.32689E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.21174E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.01188E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.40396E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07311E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62654E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.94227E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62906E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63868E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.85107E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.64284E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.79714E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2208E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34322E-3
inlet_lpb_pmon=3.00392E-1
chamber_ion_pmon=1.20016E-7
chamber_cvt_pmon=2.5165E-3
foreline_cvt_pmon=2.5165E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.87523E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-7.56311E-1	-7.34425E-1	-9.19545E0	-9.18992E0	4.07696E-3	9.49621E-2	2.72937E1	-3.26561E1	-3.26182E1	2.68575E1	1.20142E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.01356E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-7.56359E-1	-7.34591E-1	-9.19542E0	-9.19032E0	4.79221E-3	9.50813E-2	2.73294E1	-3.26868E1	-3.26046E1	2.68809E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-7.56145E-1	-7.34925E-1	-9.19509E0	-9.19008E0	4.48227E-3	9.53197E-2	2.73277E1	-3.26554E1	-3.26511E1	2.67315E1	1.20243E-7	2.51393E-3	2.51393E-3	6.32858E-3	2.99594E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-7.55954E-1	-7.34663E-1	-9.19523E0	-9.18989E0	4.55379E-3	9.4986E-2	2.73219E1	-3.26469E1	-3.25988E1	2.68767E1	1.19978E-7	2.51025E-3	2.51025E-3	6.31299E-3	2.97499E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-7.56049E-1	-7.34687E-1	-9.1954E0	-9.18996E0	4.43459E-3	9.48668E-2	2.73033E1	-3.2626E1	-3.26162E1	2.68394E1	1.19697E-7	2.52599E-3	2.52599E-3	6.35601E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-7.56311E-1	-7.34711E-1	-9.19516E0	-9.18989E0	4.55379E-3	9.49144E-2	2.73243E1	-3.26284E1	-3.26218E1	2.678E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-7.56359E-1	-7.34711E-1	-9.19518E0	-9.19013E0	4.60148E-3	9.52005E-2	2.73093E1	-3.26416E1	-3.26633E1	2.69043E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-7.56383E-1	-7.34615E-1	-9.19511E0	-9.19013E0	4.26769E-3	9.52482E-2	2.73139E1	-3.26815E1	-3.258E1	2.68575E1	1.19965E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-7.56598E-1	-7.3483E-1	-9.19495E0	-9.18965E0	4.26769E-3	9.52005E-2	2.73087E1	-3.26657E1	-3.26122E1	2.67998E1	1.20158E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-7.56383E-1	-7.34711E-1	-9.1953E0	-9.18989E0	4.45843E-3	9.52244E-2	2.73139E1	-3.26537E1	-3.26413E1	2.68587E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-7.56741E-1	-7.34663E-1	-9.19538E0	-9.19015E0	4.22001E-3	9.49621E-2	2.73219E1	-3.26717E1	-3.26452E1	2.68448E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.98665E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-7.56574E-1	-7.34901E-1	-9.19549E0	-9.18987E0	4.24385E-3	9.50813E-2	2.73345E1	-3.26615E1	-3.26206E1	2.68334E1	1.19861E-7	2.52209E-3	2.52209E-3	6.29098E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.56717E-1	-7.34591E-1	-9.19554E0	-9.1898E0	4.12464E-3	9.47475E-2	2.73255E1	-3.26591E1	-3.26212E1	2.68292E1	1.20017E-7	2.50898E-3	2.50898E-3	6.31837E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-7.56001E-1	-7.34878E-1	-9.19507E0	-9.18949E0	4.55379E-3	9.49383E-2	2.73117E1	-3.26861E1	-3.25828E1	2.68046E1	1.19757E-7	2.51771E-3	2.51771E-3	6.28006E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-7.55811E-1	-7.34591E-1	-9.19492E0	-9.1898E0	4.17233E-3	9.47714E-2	2.73141E1	-3.26597E1	-3.2602E1	2.68538E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-7.56407E-1	-7.34639E-1	-9.19516E0	-9.18953E0	4.12464E-3	9.46999E-2	2.73139E1	-3.26756E1	-3.26502E1	2.68412E1	1.20226E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-7.56311E-1	-7.34949E-1	-9.19516E0	-9.1898E0	4.22001E-3	9.49383E-2	2.73502E1	-3.26897E1	-3.26194E1	2.68328E1	1.198E-7	2.52492E-3	2.52492E-3	6.3074E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-7.56335E-1	-7.34878E-1	-9.19504E0	-9.1898E0	4.50611E-3	9.47952E-2	2.72997E1	-3.26422E1	-3.26038E1	2.6855E1	1.19913E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-7.56383E-1	-7.34711E-1	-9.19511E0	-9.1897E0	4.3869E-3	9.48191E-2	2.73482E1	-3.26926E1	-3.26137E1	2.6783E1	1.20122E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-7.56431E-1	-7.34615E-1	-9.19526E0	-9.18961E0	4.62532E-3	9.51052E-2	2.73132E1	-3.26678E1	-3.26541E1	2.6855E1	1.20016E-7	2.5165E-3	2.5165E-3	6.34322E-3	3.00392E-1