[Scan]
initial_time=2016-01-18T22:12:55
final_time=2016-01-18T22:13:15
ip_count=19
run=1024
dataset=9
scan=692
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-7.5624E-1
ql1_imon=1.40134E-8
ql2_vset=
ql2_vmon=-7.34615E-1
ql2_imon=2.05132E-9
ql3_vset=
ql3_vmon=-9.19521E0
ql3_imon=7.97391E-11
ql4_vset=
ql4_vmon=-9.18999E0
ql4_imon=-1.92106E-10
mult1=-9.66486E-9
mult2=-2.60763E-9
rf_tmon=-4.19093E-3
rf_agc=3.29434E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.70105E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69728E0
bslens_imon=2.49164E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19768E1
lens5a_imon=2.00044E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5388E1
cs_ef1b_imon=2.76957E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02077E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04651E1
cs_ea1_imon=2.60758E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36399E0
lens1_imon=2.57979E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.97541E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03953E1
cs_ea2_imon=1.47667E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=2.90542E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.2225E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11329E1
os_restr1_imon=4.28494E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14883E1
os_ea1_imon=2.42907E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63448E1
os_ef1bup_imon=3.08058E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23679E0
cs_ionrep_imon=1.16704E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93501E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0194E1
cs_anode1_imon=2.90804E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.2176E-8
tplens_vset=1.4E-1
tplens_vmon=1.64021E0
tplens_imon=-3.843E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26012E1
iondef3_imon=1.51303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26956E1
iondef2_imon=1.55821E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98217E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.00597E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=1.74884E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.1738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7447E1
cs_ef2b_imon=3.12998E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43575E0
os_ea2_imon=-9.68303E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71133E1
cs_ef2a_imon=3.16142E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05892E0
os_ef2alow_imon=-2.51818E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.57711E-1
os_ef2bup_imon=-5.30266E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11161E1
os_restr2_imon=3.37587E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.27835E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01902E1
cs_anode2_imon=2.24336E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.08807E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68383E1
iondef4_imon=1.10898E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.82167E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.31256E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15384E0
cs_ionaccel_imon=-1.72101E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56474E1
einzel_imon=7.73275E-6
window_vset=0.0E0
window_vmon=2.25082E-1
window_imon=-8.48986E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.38942E-4
mask2_vset=0.0E0
mask2_vmon=-1.86288E1
mask2_imon=-8.07817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92596E3
multa_neg_imon=7.65951E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.48783E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.35465E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2534E0
defgridb_imon=6.34091E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.42495E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07441E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62709E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.95608E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6221E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63729E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.74359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87849E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.74026E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33282E-1
cs_fil2_imon=-2.23211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02394E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21967E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.39226E-1
res40_imon=-2.64917E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.56097E-1	-7.34711E-1	-9.19526E0	-9.18968E0	4.64916E-3	9.49383E-2	2.73187E1	-3.26697E1	-3.25989E1	2.68569E1	1.19991E-7	2.52702E-3	2.52702E-3	6.30466E-3	3.00824E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-7.56311E-1	-7.34687E-1	-9.19528E0	-9.1897E0	4.62532E-3	9.51767E-2	2.7332E1	-3.26401E1	-3.26438E1	2.68438E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-7.56073E-1	-7.34973E-1	-9.19507E0	-9.18975E0	4.31538E-3	9.50336E-2	2.73155E1	-3.26498E1	-3.26017E1	2.68215E1	1.19872E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.01209E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-7.56574E-1	-7.34806E-1	-9.19535E0	-9.18992E0	4.31538E-3	9.48191E-2	2.73309E1	-3.26879E1	-3.2632E1	2.68412E1	1.19941E-7	2.51077E-3	2.51077E-3	6.3074E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09333E0	-7.56621E-1	-7.3483E-1	-9.19507E0	-9.18992E0	4.41074E-3	9.50575E-2	2.73339E1	-3.26861E1	-3.26164E1	2.68436E1	1.20435E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09317E0	-7.55835E-1	-7.34663E-1	-9.19528E0	-9.18987E0	4.26769E-3	9.50575E-2	2.73278E1	-3.26873E1	-3.26471E1	2.68204E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-7.56097E-1	-7.34687E-1	-9.19547E0	-9.19006E0	4.26769E-3	9.49383E-2	2.73318E1	-3.26505E1	-3.25856E1	2.69129E1	1.20047E-7	2.51334E-3	2.51334E-3	6.34509E-3	2.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09325E0	-7.56168E-1	-7.34353E-1	-9.19538E0	-9.19013E0	4.22001E-3	9.52005E-2	2.73472E1	-3.26464E1	-3.26206E1	2.68214E1	1.20101E-7	2.5199E-3	2.5199E-3	6.31398E-3	3.01138E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-7.56311E-1	-7.34854E-1	-9.19538E0	-9.19018E0	4.48227E-3	9.50575E-2	2.73363E1	-3.26591E1	-3.26464E1	2.68605E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-7.56454E-1	-7.34591E-1	-9.19552E0	-9.18999E0	4.48227E-3	9.50575E-2	2.73247E1	-3.26915E1	-3.2596E1	2.68563E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-7.56311E-1	-7.3452E-1	-9.19542E0	-9.18992E0	4.36306E-3	9.50336E-2	2.73676E1	-3.26975E1	-3.2641E1	2.6822E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-7.5655E-1	-7.34758E-1	-9.19538E0	-9.18987E0	4.43459E-3	9.52959E-2	2.73222E1	-3.26738E1	-3.26319E1	2.67962E1	1.19978E-7	2.5225E-3	2.5225E-3	6.29067E-3	3.00942E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-7.56598E-1	-7.34782E-1	-9.19507E0	-9.18977E0	4.52995E-3	9.50336E-2	2.73195E1	-3.26524E1	-3.2608E1	2.68147E1	1.20209E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09325E0	-7.56288E-1	-7.34758E-1	-9.19521E0	-9.18951E0	4.45843E-3	9.52482E-2	2.72937E1	-3.26585E1	-3.26368E1	2.68502E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09302E0	-7.56192E-1	-7.34663E-1	-9.19528E0	-9.18968E0	4.14848E-3	9.50336E-2	2.73417E1	-3.26663E1	-3.25996E1	2.68507E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9952E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-7.5624E-1	-7.34639E-1	-9.19511E0	-9.18996E0	4.22001E-3	9.50336E-2	2.73502E1	-3.26849E1	-3.2632E1	2.68208E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.97901E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09279E0	-7.56145E-1	-7.34711E-1	-9.19507E0	-9.19013E0	4.22001E-3	9.49621E-2	2.7308E1	-3.26514E1	-3.26549E1	2.68911E1	1.19925E-7	2.5225E-3	2.5225E-3	6.31299E-3	2.99879E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-7.56073E-1	-7.34687E-1	-9.19538E0	-9.18968E0	4.22001E-3	9.49383E-2	2.73204E1	-3.26402E1	-3.26319E1	2.67595E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09325E0	-7.56145E-1	-7.35092E-1	-9.19521E0	-9.18961E0	4.17233E-3	9.4986E-2	2.73357E1	-3.26506E1	-3.26068E1	2.68719E1	1.20055E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-7.5624E-1	-7.34615E-1	-9.19521E0	-9.18999E0	4.50611E-3	9.48906E-2	2.73069E1	-3.26956E1	-3.26012E1	2.68383E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00302E-1