[Scan]
initial_time=2016-01-18T22:14:42
final_time=2016-01-18T22:15:02
ip_count=19
run=1024
dataset=9
scan=696
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08711E-4
ql1_vset=
ql1_vmon=-7.55858E-1
ql1_imon=1.40356E-8
ql2_vset=
ql2_vmon=-7.34806E-1
ql2_imon=2.01974E-9
ql3_vset=
ql3_vmon=-9.19528E0
ql3_imon=7.38621E-11
ql4_vset=
ql4_vmon=-9.19006E0
ql4_imon=-1.75524E-10
mult1=-9.94858E-9
mult2=-2.70562E-9
rf_tmon=-5.11117E-3
rf_agc=3.16456E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.71967E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.30258E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=2.00881E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05022E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53847E1
cs_ef1b_imon=2.76323E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02061E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04345E1
cs_ea1_imon=2.57936E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36489E0
lens1_imon=2.73085E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6513E1
os_ef1alow_imon=2.97001E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.50657E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.89564E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.21862E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.2708E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14904E1
os_ea1_imon=2.40699E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6305E1
os_ef1bup_imon=3.07253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.18271E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01711E1
cs_anode1_imon=2.91163E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.21159E-8
tplens_vset=1.4E-1
tplens_vmon=1.69334E0
tplens_imon=-4.51082E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26461E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2708E1
iondef2_imon=1.56532E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98204E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.00146E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=1.74937E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.16454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74849E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45148E0
os_ea2_imon=-7.37774E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.16184E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01749E0
os_ef2alow_imon=-2.61281E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9086E-1
os_ef2bup_imon=-5.18102E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11187E1
os_restr2_imon=3.38843E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.29008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01705E1
cs_anode2_imon=2.2409E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67174E1
iondef4_imon=1.09163E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.81584E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.30437E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-1.72315E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56226E1
einzel_imon=7.67394E-6
window_vset=0.0E0
window_vmon=2.50701E-1
window_imon=-7.36173E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39035E-4
mask2_vset=0.0E0
mask2_vmon=-1.86147E1
mask2_imon=-7.81352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.28607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.30919E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.19758E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.3931E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07213E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62635E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30917E1
cs_fil1_imon=9.958E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62378E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63812E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.5823E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98186E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.80609E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36144E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.42354E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22049E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.12493E-1
res40_imon=-2.32784E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.56407E-1	-7.35092E-1	-9.19511E0	-9.1903E0	4.72069E-3	9.48906E-2	2.73269E1	-3.26644E1	-3.26484E1	2.68268E1	1.19749E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01223E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09364E0	-7.56121E-1	-7.34735E-1	-9.19478E0	-9.19006E0	4.72069E-3	9.47952E-2	2.73455E1	-3.2664E1	-3.26272E1	2.68106E1	1.19749E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-7.56192E-1	-7.35044E-1	-9.19497E0	-9.18982E0	4.57764E-3	9.48429E-2	2.73594E1	-3.26892E1	-3.26585E1	2.6806E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.5655E-1	-7.35021E-1	-9.19535E0	-9.18996E0	4.45843E-3	9.48429E-2	2.73237E1	-3.26452E1	-3.26603E1	2.68725E1	1.19831E-7	2.51575E-3	2.51575E-3	6.31779E-3	2.98522E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-7.56526E-1	-7.34615E-1	-9.19523E0	-9.18977E0	4.36306E-3	9.49144E-2	2.73532E1	-3.26681E1	-3.25972E1	2.68995E1	1.20122E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-7.56431E-1	-7.34735E-1	-9.19516E0	-9.18961E0	4.55379E-3	9.50098E-2	2.73193E1	-3.26502E1	-3.26455E1	2.6828E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-7.56407E-1	-7.34854E-1	-9.19511E0	-9.18965E0	4.57764E-3	9.49621E-2	2.7321E1	-3.26309E1	-3.26425E1	2.68352E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-7.5655E-1	-7.34544E-1	-9.19552E0	-9.18996E0	4.79221E-3	9.48429E-2	2.72997E1	-3.26272E1	-3.25834E1	2.68575E1	1.20031E-7	2.51025E-3	2.51025E-3	6.30182E-3	3.00676E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-7.56454E-1	-7.34663E-1	-9.19549E0	-9.19003E0	4.76837E-3	9.46999E-2	2.72865E1	-3.26681E1	-3.26518E1	2.68418E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.56335E-1	-7.34782E-1	-9.19549E0	-9.1898E0	4.98295E-3	9.47475E-2	2.73297E1	-3.26693E1	-3.26308E1	2.6825E1	1.20435E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.98222E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-7.56359E-1	-7.34687E-1	-9.19518E0	-9.19013E0	4.79221E-3	9.48429E-2	2.73291E1	-3.26669E1	-3.26224E1	2.6855E1	1.20069E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.97963E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.56478E-1	-7.34925E-1	-9.19499E0	-9.19015E0	4.57764E-3	9.46999E-2	2.73508E1	-3.26831E1	-3.25966E1	2.6831E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9952E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-7.56311E-1	-7.34806E-1	-9.1949E0	-9.19025E0	4.19617E-3	9.48191E-2	2.7308E1	-3.26561E1	-3.2626E1	2.68989E1	1.19757E-7	2.51334E-3	2.51334E-3	6.35692E-3	2.9978E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.56025E-1	-7.34806E-1	-9.19526E0	-9.19001E0	4.45843E-3	9.52244E-2	2.73706E1	-3.26549E1	-3.2635E1	2.67175E1	1.1959E-7	2.51077E-3	2.51077E-3	6.31269E-3	3.02368E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-7.56311E-1	-7.34949E-1	-9.19535E0	-9.18999E0	4.14848E-3	9.53913E-2	2.73375E1	-3.26579E1	-3.25959E1	2.68401E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-7.56454E-1	-7.34806E-1	-9.19507E0	-9.18999E0	4.64916E-3	9.50098E-2	2.73455E1	-3.26731E1	-3.26021E1	2.68388E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-7.56216E-1	-7.34782E-1	-9.19516E0	-9.18999E0	4.57764E-3	9.52244E-2	2.73181E1	-3.26531E1	-3.25924E1	2.68082E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-7.56097E-1	-7.34496E-1	-9.19535E0	-9.19003E0	4.50611E-3	9.50813E-2	2.7337E1	-3.26313E1	-3.26231E1	2.68388E1	1.19749E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-7.56288E-1	-7.34544E-1	-9.19554E0	-9.1903E0	4.64916E-3	9.46045E-2	2.73009E1	-3.26338E1	-3.26627E1	2.69456E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.98481E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-7.55858E-1	-7.34806E-1	-9.19528E0	-9.19006E0	4.31538E-3	9.48906E-2	2.73216E1	-3.2708E1	-3.26461E1	2.67174E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.98665E-1