[Scan]
initial_time=2016-01-18T22:15:09
final_time=2016-01-18T22:15:28
ip_count=19
run=1024
dataset=9
scan=697
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-7.56073E-1
ql1_imon=1.40348E-8
ql2_vset=
ql2_vmon=-7.34663E-1
ql2_imon=1.99251E-9
ql3_vset=
ql3_vmon=-9.19509E0
ql3_imon=7.7939E-11
ql4_vset=
ql4_vmon=-9.18989E0
ql4_imon=-1.91772E-10
mult1=-9.43674E-9
mult2=-2.70632E-9
rf_tmon=-5.01937E-3
rf_agc=3.32804E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.71353E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67388E0
bslens_imon=2.1787E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19205E1
lens5a_imon=2.00173E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53986E1
cs_ef1b_imon=2.79173E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=2.59741E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32183E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64655E1
os_ef1alow_imon=2.93734E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.47719E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84655E1
cs_ef1a_imon=2.91441E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.2181E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.28261E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14745E1
os_ea1_imon=2.39815E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63965E1
os_ef1bup_imon=3.05759E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=1.19545E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01624E1
cs_anode1_imon=2.91927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.21594E-8
tplens_vset=1.4E-1
tplens_vmon=1.6957E0
tplens_imon=-1.53771E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26057E1
iondef3_imon=1.49064E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26432E1
iondef2_imon=1.57559E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.97995E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=4.0013E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.72778E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33776E1
lens5b_imon=2.16738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74779E1
cs_ef2b_imon=3.10937E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46682E0
os_ea2_imon=-8.36877E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00768E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71484E1
cs_ef2a_imon=3.18165E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01054E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.66533E-1
os_ef2bup_imon=-5.1984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11048E1
os_restr2_imon=3.37522E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.26566E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01578E1
cs_anode2_imon=2.2482E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73132E1
iondef1_imon=1.11759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68629E1
iondef4_imon=1.11492E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.77425E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.30422E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17648E0
cs_ionaccel_imon=-2.10195E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5644E1
einzel_imon=7.60791E-6
window_vset=0.0E0
window_vmon=2.37958E-1
window_imon=-7.5355E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-7.11847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.24005E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93679E3
defgrida_imon=6.19947E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=6.9392E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33363E1
os_fil1_imon=9.4063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0657E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62617E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30932E1
cs_fil1_imon=9.94045E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64248E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63837E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.9777E-2
os_fil2_imon=-2.8082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.77572E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36519E-1
cs_fil2_imon=-2.68656E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21998E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71573E-1
res40_imon=-2.36259E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09348E0	-7.56025E-1	-7.34854E-1	-9.1954E0	-9.19018E0	4.19617E-3	9.50575E-2	2.73171E1	-3.26729E1	-3.26494E1	2.68358E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09364E0	-7.56097E-1	-7.34806E-1	-9.19538E0	-9.19003E0	4.57764E-3	9.50336E-2	2.73339E1	-3.26634E1	-3.26187E1	2.68724E1	1.20158E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-7.5593E-1	-7.35188E-1	-9.19564E0	-9.18996E0	4.45843E-3	9.50098E-2	2.73139E1	-3.26618E1	-3.26189E1	2.68266E1	1.19819E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.00144E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-7.56145E-1	-7.34901E-1	-9.19554E0	-9.18996E0	4.48227E-3	9.48906E-2	2.73787E1	-3.26666E1	-3.26144E1	2.67619E1	1.19919E-7	2.52058E-3	2.52058E-3	6.33809E-3	2.99906E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-7.56073E-1	-7.35044E-1	-9.1954E0	-9.18975E0	4.31538E-3	9.51052E-2	2.73442E1	-3.26536E1	-3.26206E1	2.6837E1	1.20042E-7	2.51077E-3	2.51077E-3	6.33919E-3	2.99594E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-7.55978E-1	-7.34806E-1	-9.19571E0	-9.18989E0	4.48227E-3	9.53674E-2	2.73045E1	-3.26667E1	-3.26154E1	2.68358E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09348E0	-7.56145E-1	-7.35116E-1	-9.19571E0	-9.18977E0	4.3869E-3	9.4986E-2	2.73231E1	-3.26614E1	-3.26469E1	2.68899E1	1.19653E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-7.56264E-1	-7.34878E-1	-9.19571E0	-9.19013E0	4.41074E-3	9.51529E-2	2.72991E1	-3.25972E1	-3.25876E1	2.68274E1	1.20042E-7	2.51077E-3	2.51077E-3	6.32328E-3	2.98592E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-7.56216E-1	-7.34878E-1	-9.19547E0	-9.19003E0	4.22001E-3	9.52005E-2	2.73568E1	-3.26669E1	-3.26002E1	2.67644E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-7.56264E-1	-7.34687E-1	-9.19571E0	-9.19018E0	4.17233E-3	9.51529E-2	2.73249E1	-3.26567E1	-3.26356E1	2.68754E1	1.20062E-7	2.51755E-3	2.51755E-3	6.3074E-3	3.02324E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-7.56001E-1	-7.34568E-1	-9.19547E0	-9.18989E0	4.24385E-3	9.52005E-2	2.73438E1	-3.26812E1	-3.26345E1	2.68563E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-7.56001E-1	-7.34901E-1	-9.19514E0	-9.19018E0	4.41074E-3	9.5129E-2	2.73293E1	-3.26356E1	-3.26095E1	2.69094E1	1.19782E-7	2.51575E-3	2.51575E-3	6.3126E-3	3.00741E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-7.56145E-1	-7.34568E-1	-9.19495E0	-9.18984E0	4.45843E-3	9.50336E-2	2.73321E1	-3.265E1	-3.26266E1	2.6843E1	1.1995E-7	2.5199E-3	2.5199E-3	6.33648E-3	3.01748E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-7.56264E-1	-7.34591E-1	-9.19509E0	-9.19013E0	4.31538E-3	9.51529E-2	2.73021E1	-3.26879E1	-3.26386E1	2.68783E1	1.20226E-7	2.51443E-3	2.51443E-3	6.3514E-3	2.9978E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-7.56311E-1	-7.34687E-1	-9.19509E0	-9.19006E0	4.43459E-3	9.50575E-2	2.7334E1	-3.26602E1	-3.26673E1	2.6813E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-7.56168E-1	-7.34663E-1	-9.19499E0	-9.19006E0	4.26769E-3	9.51529E-2	2.73267E1	-3.26524E1	-3.2608E1	2.68466E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-7.55906E-1	-7.34663E-1	-9.19509E0	-9.19013E0	4.22001E-3	9.52244E-2	2.73393E1	-3.26514E1	-3.26384E1	2.68202E1	1.20069E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-7.55978E-1	-7.34854E-1	-9.19497E0	-9.18982E0	4.41074E-3	9.4986E-2	2.73213E1	-3.26434E1	-3.26314E1	2.6807E1	1.2033E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-7.56264E-1	-7.34687E-1	-9.19514E0	-9.1898E0	4.3869E-3	9.4986E-2	2.7341E1	-3.26932E1	-3.26214E1	2.68377E1	1.20055E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-7.56073E-1	-7.34663E-1	-9.19509E0	-9.18989E0	4.29153E-3	9.5129E-2	2.73132E1	-3.26432E1	-3.26057E1	2.68629E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99175E-1