[Scan]
initial_time=2016-01-18T22:15:36
final_time=2016-01-18T22:15:55
ip_count=19
run=1024
dataset=9
scan=698
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-7.55954E-1
ql1_imon=1.39329E-8
ql2_vset=
ql2_vmon=-7.34615E-1
ql2_imon=1.99478E-9
ql3_vset=
ql3_vmon=-9.19514E0
ql3_imon=5.87821E-11
ql4_vset=
ql4_vmon=-9.19006E0
ql4_imon=-1.91748E-10
mult1=-9.35509E-9
mult2=-2.7266E-9
rf_tmon=-3.5451E-3
rf_agc=3.37722E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.12464E-3
ql5_imon=1.68848E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6532E0
bslens_imon=2.4696E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19811E1
lens5a_imon=2.00925E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05023E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54135E1
cs_ef1b_imon=2.76395E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02095E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04657E1
cs_ea1_imon=2.5793E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38235E0
lens1_imon=2.74507E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64739E1
os_ef1alow_imon=2.96942E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03966E1
cs_ea2_imon=1.48475E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84338E1
cs_ef1a_imon=2.91366E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.21686E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11498E1
os_restr1_imon=4.27521E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15398E1
os_ea1_imon=2.40887E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63735E1
os_ef1bup_imon=3.06823E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24781E0
cs_ionrep_imon=1.16924E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93596E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0204E1
cs_anode1_imon=2.90729E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.21297E-8
tplens_vset=1.4E-1
tplens_vmon=1.65735E0
tplens_imon=-4.24703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.50752E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.59163E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98096E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=4.02894E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26006E0
ionrepsh_imon=1.75692E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33554E1
lens5b_imon=2.18262E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7457E1
cs_ef2b_imon=3.12661E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43575E0
os_ea2_imon=-9.02189E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06036E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71382E1
cs_ef2a_imon=3.16179E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0452E0
os_ef2alow_imon=-2.47701E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0886E-1
os_ef2bup_imon=-5.34757E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11273E1
os_restr2_imon=3.38672E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.29194E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.23101E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73255E1
iondef1_imon=1.11635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69078E1
iondef4_imon=1.09851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.78566E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.27825E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13451E0
cs_ionaccel_imon=-1.85948E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47353E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56324E1
einzel_imon=7.81883E-6
window_vset=0.0E0
window_vmon=2.4629E-1
window_imon=-7.40451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39155E-4
mask2_vset=0.0E0
mask2_vmon=-1.86213E1
mask2_imon=-6.13203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.58972E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.65679E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.0755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49242E0
defgridb_imon=6.3152E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.42807E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07223E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62586E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.96606E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62871E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63915E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.0016E-2
os_fil2_imon=-2.50656E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87849E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.67854E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35433E-1
cs_fil2_imon=-2.413E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.55721E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2203E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10533E-1
res40_imon=-2.60426E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-7.56097E-1	-7.34711E-1	-9.19507E0	-9.18968E0	4.17233E-3	9.51052E-2	2.73694E1	-3.26708E1	-3.26284E1	2.68395E1	1.20084E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.01475E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-7.56192E-1	-7.34735E-1	-9.19495E0	-9.18982E0	4.36306E-3	9.5129E-2	2.73112E1	-3.26634E1	-3.26254E1	2.68001E1	1.19697E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-7.56264E-1	-7.35068E-1	-9.19511E0	-9.19003E0	4.55379E-3	9.50813E-2	2.73144E1	-3.26654E1	-3.26011E1	2.68372E1	1.20226E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00824E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-7.56502E-1	-7.34806E-1	-9.19514E0	-9.18982E0	4.26769E-3	9.4986E-2	2.73538E1	-3.26482E1	-3.26506E1	2.68441E1	1.19953E-7	2.52492E-3	2.52492E-3	6.29128E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-7.56097E-1	-7.34568E-1	-9.19516E0	-9.18968E0	4.14848E-3	9.50098E-2	2.73351E1	-3.26807E1	-3.26416E1	2.6843E1	1.19902E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.56121E-1	-7.34806E-1	-9.1953E0	-9.18989E0	4.33922E-3	9.50813E-2	2.73357E1	-3.27029E1	-3.26248E1	2.68635E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00954E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-7.56001E-1	-7.34687E-1	-9.19514E0	-9.19025E0	4.48227E-3	9.50813E-2	2.73009E1	-3.26603E1	-3.25984E1	2.6843E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.56168E-1	-7.34901E-1	-9.19518E0	-9.19018E0	4.60148E-3	9.52959E-2	2.73045E1	-3.26472E1	-3.26012E1	2.67962E1	1.20278E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-7.56359E-1	-7.34925E-1	-9.19545E0	-9.18999E0	4.29153E-3	9.50813E-2	2.73073E1	-3.26931E1	-3.26156E1	2.68632E1	1.19749E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.56145E-1	-7.34901E-1	-9.19533E0	-9.18982E0	4.55379E-3	9.50575E-2	2.73617E1	-3.26553E1	-3.25967E1	2.68508E1	1.20194E-7	2.51823E-3	2.51823E-3	6.3074E-3	2.99339E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-7.56335E-1	-7.3483E-1	-9.19521E0	-9.18992E0	4.50611E-3	9.50575E-2	2.72968E1	-3.26726E1	-3.26443E1	2.67848E1	1.1995E-7	2.51874E-3	2.51874E-3	6.31321E-3	3.0147E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-7.56121E-1	-7.34782E-1	-9.19528E0	-9.18987E0	4.43459E-3	9.49144E-2	2.73222E1	-3.2667E1	-3.26248E1	2.68142E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.56001E-1	-7.34925E-1	-9.19514E0	-9.18977E0	4.29153E-3	9.5129E-2	2.73283E1	-3.26799E1	-3.26283E1	2.68221E1	1.20174E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-7.55906E-1	-7.34925E-1	-9.19516E0	-9.18987E0	4.43459E-3	9.4986E-2	2.73004E1	-3.26467E1	-3.26579E1	2.69031E1	1.19941E-7	2.50972E-3	2.50972E-3	6.32858E-3	2.99093E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-7.56121E-1	-7.34639E-1	-9.1949E0	-9.1898E0	3.98159E-3	9.4986E-2	2.73417E1	-3.26428E1	-3.26543E1	2.68352E1	1.19913E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.97445E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-7.56025E-1	-7.34758E-1	-9.19476E0	-9.19001E0	4.22001E-3	9.48191E-2	2.73462E1	-3.26677E1	-3.26295E1	2.68302E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.97647E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-7.56001E-1	-7.34663E-1	-9.19511E0	-9.18994E0	4.17233E-3	9.48668E-2	2.73232E1	-3.26491E1	-3.26179E1	2.68381E1	1.19953E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-7.55882E-1	-7.34806E-1	-9.19521E0	-9.18989E0	4.22001E-3	9.4986E-2	2.7321E1	-3.26685E1	-3.2626E1	2.68343E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00144E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.56168E-1	-7.34591E-1	-9.19528E0	-9.18984E0	4.17233E-3	9.4986E-2	2.73387E1	-3.26573E1	-3.2629E1	2.67445E1	1.2026E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-7.55954E-1	-7.34615E-1	-9.19514E0	-9.19006E0	4.12464E-3	9.50575E-2	2.73255E1	-3.26663E1	-3.26212E1	2.69078E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.99686E-1