[Scan]
initial_time=2016-01-18T22:19:09
final_time=2016-01-18T22:19:28
ip_count=19
run=1024
dataset=9
scan=706
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-7.56383E-1
ql1_imon=1.40203E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=2.0018E-9
ql3_vset=
ql3_vmon=-9.19523E0
ql3_imon=8.34942E-11
ql4_vset=
ql4_vmon=-9.18994E0
ql4_imon=-2.09045E-10
mult1=-9.66486E-9
mult2=-2.6723E-9
rf_tmon=-4.24992E-3
rf_agc=3.27369E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.66975E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67218E0
bslens_imon=2.56877E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.99897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.75497E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02048E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04939E1
cs_ea1_imon=2.58591E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39276E0
lens1_imon=2.65325E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64945E1
os_ef1alow_imon=2.96418E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0358E1
cs_ea2_imon=1.48549E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84357E1
cs_ef1a_imon=2.91066E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.20902E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11441E1
os_restr1_imon=4.2666E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14761E1
os_ea1_imon=2.40961E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63766E1
os_ef1bup_imon=3.07272E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27965E0
cs_ionrep_imon=1.19348E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01759E1
cs_anode1_imon=2.90767E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.20687E-8
tplens_vset=1.4E-1
tplens_vmon=1.6396E0
tplens_imon=-4.35722E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26331E1
iondef3_imon=1.50973E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26714E1
iondef2_imon=1.56409E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98019E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.00007E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29923E0
ionrepsh_imon=1.77271E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.1738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74726E1
cs_ef2b_imon=3.12511E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47003E0
os_ea2_imon=-7.44252E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71289E1
cs_ef2a_imon=3.1588E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07826E0
os_ef2alow_imon=-2.58929E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95137E-1
os_ef2bup_imon=-5.27646E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11155E1
os_restr2_imon=3.38597E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.26953E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.23513E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73275E1
iondef1_imon=1.1079E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68241E1
iondef4_imon=1.08353E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.73444E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.24575E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13575E0
cs_ionaccel_imon=-1.73598E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56461E1
einzel_imon=7.71404E-6
window_vset=0.0E0
window_vmon=2.53151E-1
window_imon=-8.60213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39155E-4
mask2_vset=0.0E0
mask2_vmon=-1.86288E1
mask2_imon=-7.2548E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=6.59435E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.46579E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.05714E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44032E0
defgridb_imon=6.24909E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33341E1
os_fil1_imon=9.40867E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06967E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62368E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30916E1
cs_fil1_imon=9.92695E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63058E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63579E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.89647E-2
os_fil2_imon=-2.63131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.70384E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.83351E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37047E-1
cs_fil2_imon=-2.56894E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.2473E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21951E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.84335E-1
res40_imon=-2.61548E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-7.56097E-1	-7.34782E-1	-9.19485E0	-9.18972E0	4.26769E-3	9.51529E-2	2.73491E1	-3.26822E1	-3.26185E1	2.68389E1	1.19913E-7	2.51007E-3	2.51007E-3	6.29645E-3	2.9952E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-7.56335E-1	-7.34997E-1	-9.19485E0	-9.18963E0	4.48227E-3	9.50098E-2	2.73486E1	-3.27117E1	-3.26266E1	2.68631E1	1.19851E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-7.56478E-1	-7.34758E-1	-9.19514E0	-9.18996E0	4.45843E-3	9.50813E-2	2.73213E1	-3.26805E1	-3.26104E1	2.68239E1	1.19925E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.00144E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-7.56288E-1	-7.3452E-1	-9.19528E0	-9.18994E0	4.3869E-3	9.52244E-2	2.73399E1	-3.26992E1	-3.2629E1	2.68569E1	1.1993E-7	2.51886E-3	2.51886E-3	6.33341E-3	3.01733E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-7.56311E-1	-7.34758E-1	-9.19554E0	-9.18975E0	4.43459E-3	9.49144E-2	2.73008E1	-3.26842E1	-3.26076E1	2.68388E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-7.56502E-1	-7.34568E-1	-9.1953E0	-9.18989E0	4.48227E-3	9.47237E-2	2.73075E1	-3.26472E1	-3.25871E1	2.68262E1	1.20278E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-7.56431E-1	-7.34663E-1	-9.19528E0	-9.18956E0	4.26769E-3	9.47475E-2	2.73093E1	-3.26392E1	-3.2623E1	2.67884E1	1.19653E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-7.56168E-1	-7.34758E-1	-9.19552E0	-9.18968E0	4.17233E-3	9.50336E-2	2.73111E1	-3.26573E1	-3.26284E1	2.6819E1	1.19953E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-7.56454E-1	-7.34878E-1	-9.19526E0	-9.19001E0	4.43459E-3	9.51767E-2	2.73399E1	-3.26573E1	-3.26254E1	2.68773E1	1.20244E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.00144E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-7.56335E-1	-7.34615E-1	-9.1953E0	-9.19013E0	4.43459E-3	9.48668E-2	2.73435E1	-3.26861E1	-3.25918E1	2.68094E1	1.19902E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.0148E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-7.56335E-1	-7.34544E-1	-9.19547E0	-9.18992E0	4.43459E-3	9.4986E-2	2.73314E1	-3.2668E1	-3.26478E1	2.69351E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-7.56192E-1	-7.34806E-1	-9.19514E0	-9.18992E0	4.69685E-3	9.52721E-2	2.73388E1	-3.26325E1	-3.26163E1	2.66804E1	1.2021E-7	2.51549E-3	2.51549E-3	6.33297E-3	3.00878E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-7.56598E-1	-7.34782E-1	-9.19526E0	-9.19015E0	4.43459E-3	9.51529E-2	2.72709E1	-3.25635E1	-3.26302E1	2.68983E1	1.19963E-7	2.51439E-3	2.51439E-3	6.3074E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-7.56645E-1	-7.34735E-1	-9.1954E0	-9.19025E0	4.41074E-3	9.51052E-2	2.73429E1	-3.26651E1	-3.26681E1	2.67229E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-7.56145E-1	-7.34949E-1	-9.19533E0	-9.18992E0	4.64916E-3	9.50813E-2	2.73316E1	-3.26791E1	-3.25924E1	2.68592E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-7.56288E-1	-7.34687E-1	-9.1953E0	-9.1898E0	4.29153E-3	9.50336E-2	2.73237E1	-3.26651E1	-3.26464E1	2.6795E1	1.19959E-7	2.51593E-3	2.51593E-3	6.32371E-3	2.97804E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-7.56073E-1	-7.3483E-1	-9.19514E0	-9.18994E0	4.81606E-3	9.5129E-2	2.72947E1	-3.26707E1	-3.26327E1	2.68238E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-7.56192E-1	-7.34878E-1	-9.19514E0	-9.18987E0	4.74453E-3	9.50575E-2	2.73228E1	-3.26478E1	-3.26313E1	2.68695E1	1.20122E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-7.56383E-1	-7.34949E-1	-9.19559E0	-9.18977E0	4.45843E-3	9.45807E-2	2.73216E1	-3.2662E1	-3.26142E1	2.68324E1	1.19861E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.56383E-1	-7.34711E-1	-9.19523E0	-9.18994E0	4.76837E-3	9.47952E-2	2.73275E1	-3.26714E1	-3.26331E1	2.68241E1	1.19749E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.99941E-1