[Scan]
initial_time=2016-01-18T22:20:28
final_time=2016-01-18T22:20:48
ip_count=19
run=1024
dataset=9
scan=709
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-7.56121E-1
ql1_imon=1.40128E-8
ql2_vset=
ql2_vmon=-7.34472E-1
ql2_imon=2.00443E-9
ql3_vset=
ql3_vmon=-9.19516E0
ql3_imon=7.59244E-11
ql4_vset=
ql4_vmon=-9.19001E0
ql4_imon=-2.11012E-10
mult1=-9.5959E-9
mult2=-2.55493E-9
rf_tmon=-4.08584E-3
rf_agc=3.27147E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.67772E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68777E0
bslens_imon=2.36111E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19322E1
lens5a_imon=2.00218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54085E1
cs_ef1b_imon=2.75277E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04658E1
cs_ea1_imon=2.57681E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37917E0
lens1_imon=2.68916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.47802E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.90666E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.21109E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.28193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15059E1
os_ea1_imon=2.43153E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02103E1
cs_anode1_imon=2.90413E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.19786E-8
tplens_vset=1.4E-1
tplens_vmon=1.65285E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26873E1
iondef2_imon=1.55408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.47237E-2
ql6_imon=4.00128E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29896E0
ionrepsh_imon=1.73757E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33405E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43956E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.15173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04435E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11508E1
os_restr2_imon=3.38923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23012E2
cs_ionfoca_imon=6.28703E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.24893E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73321E1
iondef1_imon=1.10743E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68472E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.86171E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.26374E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14756E0
cs_ionaccel_imon=-1.55633E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.74405E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86152E1
mask2_imon=-8.39144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.75412E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.75555E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.24582E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29028E0
defgridb_imon=6.16073E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.40306E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07101E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62739E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30932E1
cs_fil1_imon=9.94678E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62714E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63512E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01522E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.74865E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22002E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.68612E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-7.56145E-1	-7.34711E-1	-9.19514E0	-9.18956E0	4.72069E-3	9.48429E-2	2.73246E1	-3.2675E1	-3.26325E1	2.68328E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-7.56168E-1	-7.34949E-1	-9.19547E0	-9.18984E0	4.64916E-3	9.48906E-2	2.73255E1	-3.26615E1	-3.2605E1	2.68635E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-7.55954E-1	-7.35164E-1	-9.19533E0	-9.18989E0	4.62532E-3	9.49621E-2	2.73363E1	-3.26554E1	-3.26212E1	2.68569E1	1.20174E-7	2.50898E-3	2.50898E-3	6.35692E-3	3.00563E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-7.56121E-1	-7.35307E-1	-9.19557E0	-9.19003E0	4.52995E-3	9.49383E-2	2.73312E1	-3.26521E1	-3.26272E1	2.68358E1	1.19902E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-7.56097E-1	-7.34997E-1	-9.19528E0	-9.18996E0	4.60148E-3	9.49383E-2	2.73213E1	-3.26549E1	-3.26488E1	2.68436E1	1.20055E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.55858E-1	-7.35211E-1	-9.19504E0	-9.18994E0	4.26769E-3	9.48906E-2	2.73081E1	-3.26609E1	-3.262E1	2.68016E1	1.20122E-7	2.50898E-3	2.50898E-3	6.30192E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-7.55906E-1	-7.35092E-1	-9.19518E0	-9.18992E0	4.33922E-3	9.48191E-2	2.72853E1	-3.26458E1	-3.26326E1	2.68563E1	1.19913E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-7.56145E-1	-7.35378E-1	-9.19487E0	-9.18994E0	4.74453E-3	9.48668E-2	2.73327E1	-3.26554E1	-3.25924E1	2.68389E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-7.56216E-1	-7.35092E-1	-9.19514E0	-9.19015E0	4.74453E-3	9.51052E-2	2.73033E1	-3.26164E1	-3.26248E1	2.68358E1	1.20209E-7	2.51417E-3	2.51417E-3	6.28056E-3	3.01738E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-7.56097E-1	-7.3514E-1	-9.19504E0	-9.18996E0	4.57764E-3	9.5129E-2	2.73003E1	-3.26452E1	-3.26218E1	2.68148E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00563E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-7.56264E-1	-7.34973E-1	-9.19504E0	-9.18996E0	4.60148E-3	9.53913E-2	2.73111E1	-3.26663E1	-3.26188E1	2.6852E1	1.20174E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-7.56168E-1	-7.34949E-1	-9.19514E0	-9.19008E0	4.45843E-3	9.50575E-2	2.73092E1	-3.26661E1	-3.26278E1	2.6834E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-7.56073E-1	-7.34949E-1	-9.19502E0	-9.19013E0	4.33922E-3	9.50336E-2	2.73271E1	-3.26909E1	-3.26915E1	2.68502E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-7.56168E-1	-7.34878E-1	-9.19495E0	-9.19003E0	4.41074E-3	9.47952E-2	2.73478E1	-3.26873E1	-3.26038E1	2.68845E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9874E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.56001E-1	-7.34878E-1	-9.19514E0	-9.18996E0	4.86374E-3	9.48191E-2	2.72883E1	-3.26332E1	-3.26374E1	2.68106E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.98222E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-7.56192E-1	-7.34615E-1	-9.19514E0	-9.1898E0	4.36306E-3	9.47475E-2	2.73364E1	-3.26189E1	-3.26148E1	2.68226E1	1.19757E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9952E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-7.56001E-1	-7.34687E-1	-9.19514E0	-9.18996E0	4.29153E-3	9.48906E-2	2.73466E1	-3.26777E1	-3.26326E1	2.68514E1	1.20017E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-7.56025E-1	-7.34448E-1	-9.19521E0	-9.19015E0	4.07696E-3	9.45807E-2	2.73027E1	-3.2626E1	-3.2613E1	2.6837E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02922E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-7.56001E-1	-7.3452E-1	-9.19497E0	-9.18984E0	4.43459E-3	9.47952E-2	2.73358E1	-3.26673E1	-3.26178E1	2.6854E1	1.19646E-7	2.52276E-3	2.52276E-3	6.28592E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-7.56121E-1	-7.34472E-1	-9.19516E0	-9.19001E0	4.43459E-3	9.47237E-2	2.73321E1	-3.26873E1	-3.2635E1	2.68472E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.9943E-1