[Scan]
initial_time=2016-01-18T22:20:55
final_time=2016-01-18T22:21:14
ip_count=19
run=1024
dataset=9
scan=710
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-7.56192E-1
ql1_imon=1.40001E-8
ql2_vset=
ql2_vmon=-7.34782E-1
ql2_imon=2.00068E-9
ql3_vset=
ql3_vmon=-9.19521E0
ql3_imon=3.47257E-11
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-1.93286E-10
mult1=-9.74761E-9
mult2=-2.7017E-9
rf_tmon=-3.90188E-3
rf_agc=3.38636E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.6778E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63436E0
bslens_imon=2.53972E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.99395E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=2.7607E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04575E1
cs_ea1_imon=2.58821E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37846E0
lens1_imon=2.49371E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03649E1
cs_ea2_imon=1.49347E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=2.89332E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.21029E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.27797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14503E1
os_ea1_imon=2.40452E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.06091E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.1774E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91945E2
cs_nozzle_imon=1.93494E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.91495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.20614E-8
tplens_vset=1.4E-1
tplens_vmon=1.6668E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26018E1
iondef3_imon=1.48852E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.54019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.97981E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.03005E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30165E0
ionrepsh_imon=1.74689E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33699E1
lens5b_imon=2.16136E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47626E0
os_ea2_imon=-7.80247E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13642E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=3.38382E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.28052E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.2356E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73352E1
iondef1_imon=1.10591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68641E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.74644E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.27071E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.76897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.50379E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86194E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.80282E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.70914E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.28961E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31697E0
defgridb_imon=5.93401E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.41994E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62398E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.94978E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62336E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63438E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92705E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.79723E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.8572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2183E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29067E-3
inlet_lpb_pmon=3.00942E-1
chamber_ion_pmon=1.20084E-7
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-7.56025E-1	-7.35068E-1	-9.19509E0	-9.18984E0	4.43459E-3	9.50336E-2	2.73187E1	-3.26909E1	-3.26189E1	2.68945E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01995E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-7.56001E-1	-7.34973E-1	-9.19514E0	-9.18994E0	4.26769E-3	9.51767E-2	2.73417E1	-3.2635E1	-3.2635E1	2.68163E1	1.198E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-7.55954E-1	-7.35068E-1	-9.19509E0	-9.19013E0	4.24385E-3	9.52244E-2	2.73319E1	-3.26852E1	-3.26186E1	2.68362E1	1.19925E-7	2.52473E-3	2.52473E-3	6.32978E-3	3.00144E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-7.56073E-1	-7.35211E-1	-9.1949E0	-9.19011E0	4.48227E-3	9.50575E-2	2.734E1	-3.2645E1	-3.25942E1	2.6797E1	1.20161E-7	2.5216E-3	2.5216E-3	6.34322E-3	3.00149E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-7.55954E-1	-7.34901E-1	-9.19514E0	-9.18996E0	4.43459E-3	9.53197E-2	2.73087E1	-3.26416E1	-3.2632E1	2.69003E1	1.19829E-7	2.52066E-3	2.52066E-3	6.3131E-3	3.00794E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-7.55906E-1	-7.34758E-1	-9.19509E0	-9.18992E0	4.45843E-3	9.52959E-2	2.72985E1	-3.26687E1	-3.2641E1	2.66742E1	1.19783E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9939E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-7.56145E-1	-7.34782E-1	-9.19542E0	-9.19011E0	4.72069E-3	9.50813E-2	2.73039E1	-3.26675E1	-3.2623E1	2.68298E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-7.56049E-1	-7.34687E-1	-9.19511E0	-9.19006E0	4.45843E-3	9.52005E-2	2.73279E1	-3.26651E1	-3.26026E1	2.67819E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-7.55978E-1	-7.34901E-1	-9.19509E0	-9.18961E0	4.74453E-3	9.50336E-2	2.73099E1	-3.26512E1	-3.26188E1	2.6843E1	1.20191E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.01209E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-7.55954E-1	-7.34997E-1	-9.19521E0	-9.1897E0	4.36306E-3	9.52482E-2	2.73207E1	-3.265E1	-3.26134E1	2.68787E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.98665E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-7.55858E-1	-7.34973E-1	-9.19511E0	-9.18989E0	4.17233E-3	9.4986E-2	2.7327E1	-3.26532E1	-3.2652E1	2.68431E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.55858E-1	-7.35021E-1	-9.19518E0	-9.1897E0	4.26769E-3	9.49144E-2	2.73339E1	-3.26529E1	-3.2637E1	2.68737E1	1.19822E-7	2.52564E-3	2.52564E-3	6.34497E-3	2.97959E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-7.55882E-1	-7.34925E-1	-9.19516E0	-9.18975E0	4.3869E-3	9.48191E-2	2.739E1	-3.27369E1	-3.26183E1	2.68587E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-7.56025E-1	-7.35116E-1	-9.19535E0	-9.18994E0	4.1008E-3	9.50098E-2	2.73237E1	-3.26807E1	-3.26224E1	2.68354E1	1.20174E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00041E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.56097E-1	-7.3514E-1	-9.19526E0	-9.19008E0	4.19617E-3	9.47714E-2	2.73198E1	-3.26549E1	-3.25883E1	2.68214E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01738E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-7.56288E-1	-7.3483E-1	-9.19502E0	-9.18994E0	4.1008E-3	9.46522E-2	2.73345E1	-3.2664E1	-3.26493E1	2.68064E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-7.55954E-1	-7.35188E-1	-9.19516E0	-9.19003E0	4.62532E-3	9.50813E-2	2.73358E1	-3.26555E1	-3.26178E1	2.68442E1	1.20122E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-7.56192E-1	-7.34854E-1	-9.19502E0	-9.18975E0	4.62532E-3	9.49144E-2	2.73428E1	-3.26666E1	-3.26463E1	2.68783E1	1.19913E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-7.56073E-1	-7.35188E-1	-9.19535E0	-9.18968E0	4.55379E-3	9.4676E-2	2.72818E1	-3.26278E1	-3.26438E1	2.68556E1	1.20028E-7	2.50852E-3	2.50852E-3	6.3282E-3	3.01733E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-7.56192E-1	-7.34782E-1	-9.19521E0	-9.18987E0	4.50611E-3	9.47952E-2	2.73352E1	-3.26726E1	-3.26018E1	2.68641E1	1.20084E-7	2.52027E-3	2.52027E-3	6.29067E-3	3.00942E-1