[Scan]
initial_time=2016-01-18T22:21:22
final_time=2016-01-18T22:21:41
ip_count=19
run=1024
dataset=9
scan=711
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08742E-4
ql1_vset=
ql1_vmon=-7.56526E-1
ql1_imon=1.40455E-8
ql2_vset=
ql2_vmon=-7.34735E-1
ql2_imon=2.09649E-9
ql3_vset=
ql3_vmon=-9.19497E0
ql3_imon=2.43425E-11
ql4_vset=
ql4_vmon=-9.18994E0
ql4_imon=-1.84393E-10
mult1=-1.00786E-8
mult2=-2.74285E-9
rf_tmon=-4.12604E-3
rf_agc=3.48841E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.71068E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68476E0
bslens_imon=2.32146E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19634E1
lens5a_imon=2.02345E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.04765E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54145E1
cs_ef1b_imon=2.75241E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04585E1
cs_ea1_imon=2.60853E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34732E0
lens1_imon=2.68916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.48487E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.90341E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.20666E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.27797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.41783E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63299E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22025E0
cs_ionrep_imon=1.18421E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91962E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.89909E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.20534E-8
tplens_vset=1.4E-1
tplens_vmon=1.65946E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26478E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.54543E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.01049E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28815E0
ionrepsh_imon=1.73613E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3394E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.13839E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40891E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06057E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.17155E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.39031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.28018E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.22262E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72992E1
iondef1_imon=1.11175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68134E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.774E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.25449E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56543E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.49178E-1
window_imon=-8.42748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.87308E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=7.31792E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.81323E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31134E0
defgridb_imon=6.2112E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33339E1
os_fil1_imon=9.43243E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.05707E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62228E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30928E1
cs_fil1_imon=9.9663E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62624E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63372E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91204E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.08894E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21954E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.97394E-1
chamber_ion_pmon=1.20363E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82718E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-7.56097E-1	-7.34735E-1	-9.19528E0	-9.18994E0	4.55379E-3	9.45568E-2	2.73263E1	-3.26449E1	-3.26195E1	2.6837E1	1.20226E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9952E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-7.56145E-1	-7.34973E-1	-9.19542E0	-9.18977E0	4.43459E-3	9.48429E-2	2.73308E1	-3.26682E1	-3.26811E1	2.68659E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09333E0	-7.56168E-1	-7.34973E-1	-9.19521E0	-9.18996E0	4.72069E-3	9.51052E-2	2.73175E1	-3.26779E1	-3.2626E1	2.67619E1	1.2033E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-7.56192E-1	-7.35068E-1	-9.1953E0	-9.19018E0	4.8399E-3	9.4986E-2	2.73393E1	-3.26773E1	-3.26266E1	2.68352E1	1.19882E-7	2.52026E-3	2.52026E-3	6.30469E-3	2.99991E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09333E0	-7.5624E-1	-7.3483E-1	-9.19538E0	-9.18996E0	4.74453E-3	9.50098E-2	2.73314E1	-3.26909E1	-3.26027E1	2.68701E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-7.56311E-1	-7.3514E-1	-9.19514E0	-9.1902E0	4.41074E-3	9.50098E-2	2.73169E1	-3.26349E1	-3.25983E1	2.68653E1	1.2033E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-7.56145E-1	-7.35378E-1	-9.19521E0	-9.19027E0	4.3869E-3	9.50813E-2	2.73315E1	-3.26801E1	-3.26194E1	2.68148E1	1.20466E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.9841E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-7.56001E-1	-7.3514E-1	-9.19528E0	-9.19023E0	4.26769E-3	9.53436E-2	2.73406E1	-3.26548E1	-3.26076E1	2.681E1	1.19872E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.96973E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-7.56001E-1	-7.35068E-1	-9.19518E0	-9.19015E0	4.57764E-3	9.51767E-2	2.73281E1	-3.26325E1	-3.26366E1	2.68226E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-7.56121E-1	-7.35068E-1	-9.19518E0	-9.19032E0	4.52995E-3	9.50098E-2	2.72949E1	-3.26783E1	-3.2638E1	2.68611E1	1.19851E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.9943E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-7.56216E-1	-7.34758E-1	-9.19507E0	-9.19027E0	4.50611E-3	9.4986E-2	2.73252E1	-3.26632E1	-3.26366E1	2.68671E1	1.19819E-7	2.52139E-3	2.52139E-3	6.34099E-3	3.0041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.5624E-1	-7.34448E-1	-9.19507E0	-9.19027E0	4.19617E-3	9.46999E-2	2.73069E1	-3.2653E1	-3.26296E1	2.6831E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9943E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-7.56407E-1	-7.34949E-1	-9.19523E0	-9.19011E0	4.26769E-3	9.4533E-2	2.73063E1	-3.26488E1	-3.2653E1	2.68435E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-7.5624E-1	-7.34901E-1	-9.19518E0	-9.19023E0	4.81606E-3	9.4533E-2	2.73147E1	-3.26705E1	-3.26362E1	2.68028E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.03449E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-7.56526E-1	-7.34878E-1	-9.19514E0	-9.19003E0	4.64916E-3	9.50098E-2	2.73653E1	-3.26579E1	-3.2649E1	2.68352E1	1.19697E-7	2.52599E-3	2.52599E-3	6.3074E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-7.56383E-1	-7.35021E-1	-9.19509E0	-9.18999E0	4.45843E-3	9.48191E-2	2.73207E1	-3.26831E1	-3.26248E1	2.67884E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.97963E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-7.56431E-1	-7.3514E-1	-9.19545E0	-9.19008E0	4.60148E-3	9.50098E-2	2.73526E1	-3.26482E1	-3.26074E1	2.68803E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.97445E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-7.56192E-1	-7.34782E-1	-9.19516E0	-9.19003E0	4.55379E-3	9.55105E-2	2.73622E1	-3.26945E1	-3.26392E1	2.68382E1	1.20069E-7	2.52318E-3	2.52318E-3	6.27461E-3	2.95899E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-7.56288E-1	-7.34591E-1	-9.19509E0	-9.18996E0	4.81606E-3	9.51767E-2	2.73165E1	-3.27113E1	-3.26302E1	2.68064E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.56526E-1	-7.34735E-1	-9.19497E0	-9.18994E0	4.33922E-3	9.50336E-2	2.72992E1	-3.26614E1	-3.26478E1	2.68134E1	1.20363E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.97394E-1