[Scan]
initial_time=2016-01-18T22:21:48
final_time=2016-01-18T22:22:08
ip_count=19
run=1024
dataset=9
scan=712
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-7.5624E-1
ql1_imon=1.40005E-8
ql2_vset=
ql2_vmon=-7.3483E-1
ql2_imon=2.01648E-9
ql3_vset=
ql3_vmon=-9.19554E0
ql3_imon=9.76324E-11
ql4_vset=
ql4_vmon=-9.1897E0
ql4_imon=-2.06542E-10
mult1=-9.94508E-9
mult2=-2.84836E-9
rf_tmon=-5.40165E-3
rf_agc=3.24383E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.68415E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65953E0
bslens_imon=2.22773E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.7607E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=2.57573E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34853E0
lens1_imon=2.7937E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.47009E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=2.90233E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.20971E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=4.27977E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15197E1
os_ea1_imon=2.41639E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.07424E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=1.18493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=2.90161E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.20772E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-2.02012E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26086E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.55877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98166E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.01944E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.73541E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.15611E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44857E0
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00709E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05876E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.28162E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.23272E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73219E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69482E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.78407E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=7.25504E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56663E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.38966E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=6.97545E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=6.86009E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34743E0
defgridb_imon=6.1391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33349E1
os_fil1_imon=9.40198E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07269E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62205E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30935E1
cs_fil1_imon=9.93663E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62618E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63662E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.96363E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.83115E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29879E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22011E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.67101E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-7.5624E-1	-7.34615E-1	-9.19547E0	-9.19008E0	4.52995E-3	9.51529E-2	2.73039E1	-3.26509E1	-3.26301E1	2.67984E1	1.20031E-7	2.51581E-3	2.51581E-3	6.29067E-3	3.01209E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-7.5624E-1	-7.34806E-1	-9.19509E0	-9.18996E0	4.76837E-3	9.52005E-2	2.73163E1	-3.26744E1	-3.26189E1	2.68502E1	1.1993E-7	2.52613E-3	2.52613E-3	6.323E-3	3.02977E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-7.56478E-1	-7.35307E-1	-9.19514E0	-9.18999E0	4.48227E-3	9.52244E-2	2.73401E1	-3.26502E1	-3.26292E1	2.68593E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-7.56121E-1	-7.3514E-1	-9.19533E0	-9.18975E0	4.33922E-3	9.50098E-2	2.73177E1	-3.26536E1	-3.25948E1	2.68442E1	1.20045E-7	2.52293E-3	2.52293E-3	6.31879E-3	2.989E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-7.56192E-1	-7.34854E-1	-9.19504E0	-9.19008E0	4.3869E-3	9.52244E-2	2.73358E1	-3.26708E1	-3.26408E1	2.6828E1	1.19757E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.97704E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-7.56311E-1	-7.3483E-1	-9.19514E0	-9.19001E0	4.14848E-3	9.52244E-2	2.73261E1	-3.26705E1	-3.2629E1	2.68196E1	1.19953E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-7.56407E-1	-7.34806E-1	-9.19554E0	-9.19011E0	4.31538E-3	9.51767E-2	2.73249E1	-3.26633E1	-3.26428E1	2.68154E1	1.20084E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-7.56025E-1	-7.34925E-1	-9.19526E0	-9.18996E0	4.19617E-3	9.48906E-2	2.73021E1	-3.26416E1	-3.26134E1	2.68308E1	1.2026E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-7.56192E-1	-7.34854E-1	-9.1954E0	-9.19023E0	4.3869E-3	9.50813E-2	2.73116E1	-3.2652E1	-3.26207E1	2.68202E1	1.2033E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-7.55906E-1	-7.34806E-1	-9.19521E0	-9.19003E0	4.673E-3	9.50575E-2	2.73237E1	-3.26675E1	-3.26326E1	2.6849E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-7.55858E-1	-7.35021E-1	-9.19528E0	-9.19027E0	4.43459E-3	9.50813E-2	2.73249E1	-3.26771E1	-3.26332E1	2.68496E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-7.56049E-1	-7.35021E-1	-9.19518E0	-9.19015E0	4.36306E-3	9.51767E-2	2.73153E1	-3.26518E1	-3.26254E1	2.68214E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.56264E-1	-7.34806E-1	-9.19554E0	-9.19008E0	4.64916E-3	9.4986E-2	2.73028E1	-3.26254E1	-3.2604E1	2.68377E1	1.20278E-7	2.52867E-3	2.52867E-3	6.30192E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.55978E-1	-7.34591E-1	-9.19569E0	-9.18999E0	4.74453E-3	9.51767E-2	2.73435E1	-3.26669E1	-3.26368E1	2.6798E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01738E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-7.56121E-1	-7.34448E-1	-9.19564E0	-9.19006E0	4.3869E-3	9.52244E-2	2.73173E1	-3.26676E1	-3.26229E1	2.6816E1	1.20383E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9978E-1
1.9E1	1.0E0	1.0E0	7.68E2	5.29E2	-2.09464E0	-7.56049E-1	-7.34758E-1	-9.1954E0	-9.18961E0	4.43459E-3	9.48429E-2	2.72967E1	-3.26314E1	-3.2626E1	2.67938E1	1.19913E-7	2.51116E-3	2.51116E-3	6.29098E-3	3.00563E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-7.56383E-1	-7.34234E-1	-9.19526E0	-9.1898E0	4.52995E-3	9.51052E-2	2.73261E1	-3.26554E1	-3.2602E1	2.69043E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.03185E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-7.56431E-1	-7.34282E-1	-9.19521E0	-9.19003E0	4.3869E-3	9.50575E-2	2.73039E1	-3.26703E1	-3.26296E1	2.6822E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-7.56216E-1	-7.3483E-1	-9.19538E0	-9.19015E0	4.48227E-3	9.49144E-2	2.72937E1	-3.26404E1	-3.25996E1	2.68094E1	1.20055E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-7.5624E-1	-7.3483E-1	-9.19554E0	-9.1897E0	4.36306E-3	9.49621E-2	2.73219E1	-3.26801E1	-3.26086E1	2.69482E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1