[Scan]
initial_time=2016-01-18T22:22:15
final_time=2016-01-18T22:22:34
ip_count=19
run=1024
dataset=9
scan=713
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.0885E-4
ql1_vset=
ql1_vmon=-7.56168E-1
ql1_imon=1.40162E-8
ql2_vset=
ql2_vmon=-7.34758E-1
ql2_imon=1.98591E-9
ql3_vset=
ql3_vmon=-9.19507E0
ql3_imon=6.2263E-11
ql4_vset=
ql4_vmon=-9.18996E0
ql4_imon=-1.97315E-10
mult1=-9.69223E-9
mult2=-2.64875E-9
rf_tmon=-6.20074E-3
rf_agc=3.15371E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.68279E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.36471E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04851E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54271E1
cs_ef1b_imon=2.75205E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=2.60457E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34913E0
lens1_imon=2.56299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.49784E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.91747E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.20751E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15606E1
os_ea1_imon=2.4135E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6435E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=1.18133E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91934E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.9063E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=3.20025E-8
tplens_vset=1.4E-1
tplens_vmon=1.6168E0
tplens_imon=-6.1419E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26002E1
iondef3_imon=1.52092E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.55516E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.97993E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.03733E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=1.74262E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33778E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42213E0
os_ea2_imon=-9.23003E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.15641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04675E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.1639E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.38022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.23163E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72709E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68502E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.80903E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.24321E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09951E0
cs_ionaccel_imon=-1.76176E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.94372E-6
window_vset=0.0E0
window_vmon=2.62993E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86038E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.27106E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.74473E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34743E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.41165E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07083E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62504E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30913E1
cs_fil1_imon=9.95134E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63051E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63537E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.76154E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.02326E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32843E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22135E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49391E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=145
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.56001E-1	-7.34901E-1	-9.19514E0	-9.18977E0	4.62532E-3	9.5129E-2	2.73311E1	-3.2636E1	-3.26626E1	2.68713E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09665E0	-7.56264E-1	-7.34949E-1	-9.19511E0	-9.18994E0	4.64916E-3	9.50336E-2	2.73417E1	-3.26194E1	-3.26212E1	2.68647E1	1.2026E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09696E0	-7.56145E-1	-7.34615E-1	-9.19535E0	-9.19011E0	4.62532E-3	9.47952E-2	2.7334E1	-3.26549E1	-3.26054E1	2.68238E1	1.20137E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00144E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-7.56073E-1	-7.35021E-1	-9.19495E0	-9.18987E0	4.48227E-3	9.44614E-2	2.73225E1	-3.26753E1	-3.26374E1	2.68196E1	1.19841E-7	2.51287E-3	2.51287E-3	6.3074E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-7.56216E-1	-7.34878E-1	-9.19514E0	-9.18984E0	4.79221E-3	9.50336E-2	2.73204E1	-3.26419E1	-3.26054E1	2.68292E1	1.20226E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-7.5624E-1	-7.3483E-1	-9.19502E0	-9.18972E0	4.52995E-3	9.49621E-2	2.73321E1	-3.26819E1	-3.26458E1	2.68334E1	1.20106E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-7.56145E-1	-7.34878E-1	-9.19502E0	-9.18994E0	4.52995E-3	9.52482E-2	2.73123E1	-3.2641E1	-3.26176E1	2.68845E1	1.19809E-7	2.50898E-3	2.50898E-3	6.32936E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-7.56168E-1	-7.34758E-1	-9.19518E0	-9.18994E0	4.48227E-3	9.50098E-2	2.73093E1	-3.26512E1	-3.2596E1	2.68376E1	1.20017E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-7.55906E-1	-7.35044E-1	-9.19495E0	-9.1898E0	4.55379E-3	9.49144E-2	2.73113E1	-3.26823E1	-3.2646E1	2.68382E1	1.19913E-7	2.51334E-3	2.51334E-3	6.28552E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-7.56216E-1	-7.34711E-1	-9.19492E0	-9.18999E0	4.76837E-3	9.52005E-2	2.73321E1	-3.26336E1	-3.26649E1	2.67747E1	1.20126E-7	2.52283E-3	2.52283E-3	6.30111E-3	3.00557E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-7.56001E-1	-7.34568E-1	-9.19504E0	-9.19003E0	4.45843E-3	9.48191E-2	2.73193E1	-3.26921E1	-3.26213E1	2.68372E1	1.19967E-7	2.51244E-3	2.51244E-3	6.35863E-3	3.00392E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-7.56311E-1	-7.34735E-1	-9.19497E0	-9.18992E0	4.673E-3	9.50813E-2	2.73164E1	-3.26479E1	-3.26388E1	2.68491E1	1.20092E-7	2.51603E-3	2.51603E-3	6.32858E-3	2.99845E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.55978E-1	-7.34687E-1	-9.19511E0	-9.18996E0	4.55379E-3	9.50098E-2	2.73476E1	-3.26638E1	-3.2636E1	2.6887E1	1.20092E-7	2.51568E-3	2.51568E-3	6.31445E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.56311E-1	-7.34854E-1	-9.19526E0	-9.18996E0	4.33922E-3	9.50098E-2	2.73181E1	-3.26644E1	-3.26255E1	2.68006E1	1.20042E-7	2.52659E-3	2.52659E-3	6.3074E-3	2.99594E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-7.56216E-1	-7.34925E-1	-9.19492E0	-9.18987E0	4.14848E-3	9.51052E-2	2.73369E1	-3.26861E1	-3.26098E1	2.68298E1	1.20179E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01373E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-7.56097E-1	-7.3452E-1	-9.19485E0	-9.19001E0	4.673E-3	9.4986E-2	2.73111E1	-3.26591E1	-3.2608E1	2.68328E1	1.20226E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.9978E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-7.56097E-1	-7.34711E-1	-9.19485E0	-9.18984E0	4.673E-3	9.51767E-2	2.73107E1	-3.26327E1	-3.26517E1	2.6761E1	1.20017E-7	2.52647E-3	2.52647E-3	6.30192E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-7.56264E-1	-7.34711E-1	-9.1948E0	-9.18996E0	4.93526E-3	9.46999E-2	2.73624E1	-3.26037E1	-3.2661E1	2.68629E1	1.1987E-7	2.51956E-3	2.51956E-3	6.28703E-3	3.00635E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09333E0	-7.56216E-1	-7.34806E-1	-9.19478E0	-9.18961E0	4.93526E-3	9.50336E-2	2.72986E1	-3.26579E1	-3.26478E1	2.68917E1	1.19619E-7	2.51874E-3	2.51874E-3	6.33065E-3	3.00087E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-7.56168E-1	-7.34758E-1	-9.19507E0	-9.18996E0	4.8399E-3	9.4986E-2	2.72709E1	-3.26795E1	-3.26002E1	2.68502E1	1.19809E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1