[Scan]
initial_time=2016-01-18T22:22:42
final_time=2016-01-18T22:23:01
ip_count=19
run=1024
dataset=9
scan=714
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-7.56502E-1
ql1_imon=1.39988E-8
ql2_vset=
ql2_vmon=-7.34854E-1
ql2_imon=2.00403E-9
ql3_vset=
ql3_vmon=-9.19511E0
ql3_imon=7.32183E-11
ql4_vset=
ql4_vmon=-9.18975E0
ql4_imon=-2.25985E-10
mult1=-8.24849E-9
mult2=-2.63651E-9
rf_tmon=-6.27851E-3
rf_agc=3.11123E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.69485E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6845E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=1.97625E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1241E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.75024E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04339E1
cs_ea1_imon=2.58538E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33717E0
lens1_imon=2.98214E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.95639E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03826E1
cs_ea2_imon=1.49312E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=2.90882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.20766E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.28085E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14639E1
os_ea1_imon=2.40381E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.06811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24089E0
cs_ionrep_imon=1.19333E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.90738E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.20243E-8
tplens_vset=1.4E-1
tplens_vmon=1.61017E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25685E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26652E1
iondef2_imon=1.54196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98296E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.02354E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=1.73061E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3351E1
lens5b_imon=2.16207E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4975E0
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00495E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.1611E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52975E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11201E1
os_restr2_imon=3.38418E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23015E2
cs_ionfoca_imon=6.28194E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.24533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73694E1
iondef1_imon=1.11688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67824E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.75835E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81212E-1
olens1_imon=7.2556E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.45574E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86248E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.21528E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.63128E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.16927E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28449E0
defgridb_imon=6.05435E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=9.4057E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08038E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62269E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30911E1
cs_fil1_imon=9.92858E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62984E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63772E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90173E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7609E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.96302E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22002E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=2.98842E-1
chamber_ion_pmon=1.20192E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.00137E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09309E0	-7.55954E-1	-7.34758E-1	-9.19511E0	-9.19008E0	4.48227E-3	9.47237E-2	2.73381E1	-3.26815E1	-3.26219E1	2.6847E1	1.19953E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09286E0	-7.55882E-1	-7.34925E-1	-9.19495E0	-9.19011E0	4.57764E-3	9.4676E-2	2.735E1	-3.26578E1	-3.26223E1	2.69043E1	1.19953E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0934E0	-7.56097E-1	-7.34663E-1	-9.19509E0	-9.19003E0	4.48227E-3	9.45807E-2	2.73017E1	-3.26818E1	-3.26152E1	2.68204E1	1.19883E-7	2.51158E-3	2.51158E-3	6.30171E-3	3.00522E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-7.55811E-1	-7.34425E-1	-9.1953E0	-9.18963E0	4.45843E-3	9.50098E-2	2.73399E1	-3.26164E1	-3.26657E1	2.68829E1	1.19991E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-7.55906E-1	-7.34901E-1	-9.19528E0	-9.18972E0	4.72069E-3	9.49383E-2	2.73045E1	-3.26543E1	-3.26032E1	2.68695E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.56216E-1	-7.34854E-1	-9.19507E0	-9.18975E0	4.33922E-3	9.49144E-2	2.73117E1	-3.2647E1	-3.26104E1	2.67727E1	1.20069E-7	2.50898E-3	2.50898E-3	6.29098E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.56168E-1	-7.34782E-1	-9.19504E0	-9.18965E0	4.43459E-3	9.5129E-2	2.7347E1	-3.26791E1	-3.26585E1	2.68831E1	1.20278E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-7.56383E-1	-7.34854E-1	-9.19507E0	-9.18953E0	4.45843E-3	9.48906E-2	2.73129E1	-3.26585E1	-3.26506E1	2.68821E1	1.20122E-7	2.52647E-3	2.52647E-3	6.3074E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-7.56574E-1	-7.34663E-1	-9.19538E0	-9.18946E0	4.72069E-3	9.48191E-2	2.73399E1	-3.26488E1	-3.2623E1	2.67938E1	1.20122E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-7.56001E-1	-7.34687E-1	-9.1953E0	-9.18958E0	4.52995E-3	9.50813E-2	2.73532E1	-3.26843E1	-3.26434E1	2.69127E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9841E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-7.56478E-1	-7.34591E-1	-9.19511E0	-9.18968E0	4.64916E-3	9.52005E-2	2.7324E1	-3.26909E1	-3.26496E1	2.68004E1	1.19705E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-7.56741E-1	-7.34711E-1	-9.19509E0	-9.18963E0	4.57764E-3	9.49621E-2	2.73069E1	-3.26458E1	-3.26398E1	2.68274E1	1.20278E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.00563E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-7.56669E-1	-7.34591E-1	-9.19538E0	-9.19008E0	4.69685E-3	9.50575E-2	2.7361E1	-3.26711E1	-3.26056E1	2.68779E1	1.19646E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-7.56741E-1	-7.34591E-1	-9.19518E0	-9.18996E0	4.76837E-3	9.50098E-2	2.73476E1	-3.26272E1	-3.26408E1	2.68696E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-7.56359E-1	-7.34782E-1	-9.19542E0	-9.18951E0	4.64916E-3	9.48191E-2	2.73437E1	-3.2664E1	-3.26578E1	2.68496E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-7.56407E-1	-7.34472E-1	-9.19533E0	-9.18994E0	4.57764E-3	9.46045E-2	2.73351E1	-3.26573E1	-3.26416E1	2.6852E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-7.5655E-1	-7.34711E-1	-9.19521E0	-9.18982E0	4.69685E-3	9.46999E-2	2.7311E1	-3.26408E1	-3.2629E1	2.68166E1	1.20017E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-7.56574E-1	-7.34639E-1	-9.19511E0	-9.18992E0	5.22137E-3	9.46045E-2	2.73291E1	-3.2653E1	-3.26536E1	2.6825E1	1.20106E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.98156E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-7.5655E-1	-7.34687E-1	-9.19507E0	-9.1897E0	5.05447E-3	9.48906E-2	2.73097E1	-3.26324E1	-3.26335E1	2.69003E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-7.56502E-1	-7.34854E-1	-9.19511E0	-9.18975E0	4.64916E-3	9.49383E-2	2.73694E1	-3.26652E1	-3.25685E1	2.67824E1	1.20192E-7	2.51498E-3	2.51498E-3	6.32328E-3	2.98842E-1