[Scan]
initial_time=2016-01-18T22:23:08
final_time=2016-01-18T22:23:28
ip_count=19
run=1024
dataset=9
scan=715
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08839E-4
ql1_vset=
ql1_vmon=-7.56669E-1
ql1_imon=1.40546E-8
ql2_vset=
ql2_vmon=-7.34758E-1
ql2_imon=2.05234E-9
ql3_vset=
ql3_vmon=-9.19485E0
ql3_imon=7.37906E-11
ql4_vset=
ql4_vmon=-9.18975E0
ql4_imon=-2.09093E-10
mult1=-9.27081E-9
mult2=-2.67669E-9
rf_tmon=-4.52444E-3
rf_agc=3.26607E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.69517E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=2.0047E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54103E1
cs_ef1b_imon=2.76322E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04231E1
cs_ea1_imon=2.59411E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37256E0
lens1_imon=2.47286E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.48306E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.90161E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.20545E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11556E1
os_restr1_imon=4.27256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14687E1
os_ea1_imon=2.4254E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.17232E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93658E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.90125E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.19642E-8
tplens_vset=1.4E-1
tplens_vmon=1.70332E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26554E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.53353E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98176E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=4.0261E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24128E0
ionrepsh_imon=1.73289E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.15539E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45097E0
os_ea2_imon=-7.752E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00262E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.16686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01491E0
os_ef2alow_imon=-2.38525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.37481E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.28739E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.23452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.12185E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68575E1
iondef4_imon=1.0935E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.7565E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.23849E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.56386E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92596E3
multa_neg_imon=7.07278E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.24943E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5369E0
defgridb_imon=6.27248E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.42889E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07143E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6219E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.95164E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62618E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63077E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00233E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.01418E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.578E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21895E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31012E-3
inlet_lpb_pmon=2.99088E-1
chamber_ion_pmon=1.20036E-7
chamber_cvt_pmon=2.5208E-3
foreline_cvt_pmon=2.5208E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.36467E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-7.55978E-1	-7.35188E-1	-9.19538E0	-9.19006E0	4.26769E-3	9.53674E-2	2.73252E1	-3.26673E1	-3.26054E1	2.67346E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09627E0	-7.55835E-1	-7.34973E-1	-9.19514E0	-9.18996E0	4.41074E-3	9.52959E-2	2.73243E1	-3.26849E1	-3.2605E1	2.69785E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-7.56168E-1	-7.34878E-1	-9.19499E0	-9.19011E0	4.55379E-3	9.49383E-2	2.73358E1	-3.26714E1	-3.26449E1	2.68302E1	1.2035E-7	2.52027E-3	2.52027E-3	6.33538E-3	2.9829E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-7.55954E-1	-7.34901E-1	-9.19499E0	-9.18984E0	4.43459E-3	9.50336E-2	2.73321E1	-3.26693E1	-3.26338E1	2.68112E1	1.20042E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-7.56288E-1	-7.35021E-1	-9.1948E0	-9.18984E0	4.57764E-3	9.51529E-2	2.7357E1	-3.26927E1	-3.25983E1	2.69061E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-7.56431E-1	-7.35116E-1	-9.19504E0	-9.19023E0	4.52995E-3	9.51529E-2	2.7291E1	-3.26487E1	-3.26291E1	2.68617E1	1.19749E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.56121E-1	-7.3483E-1	-9.19504E0	-9.19008E0	4.3869E-3	9.52482E-2	2.73093E1	-3.26494E1	-3.26422E1	2.68448E1	1.19978E-7	2.5147E-3	2.5147E-3	6.30182E-3	2.99348E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.55954E-1	-7.34305E-1	-9.19507E0	-9.19018E0	4.69685E-3	9.51529E-2	2.73228E1	-3.26461E1	-3.26148E1	2.68989E1	1.20122E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-7.56097E-1	-7.34615E-1	-9.19526E0	-9.19001E0	4.62532E-3	9.50098E-2	2.73466E1	-3.26615E1	-3.26242E1	2.66827E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9892E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-7.56216E-1	-7.34377E-1	-9.19509E0	-9.18968E0	4.673E-3	9.46522E-2	2.73493E1	-3.2664E1	-3.2607E1	2.6891E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.98222E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-7.56121E-1	-7.34591E-1	-9.19509E0	-9.19006E0	4.64916E-3	9.4986E-2	2.73501E1	-3.26227E1	-3.26585E1	2.67946E1	1.20064E-7	2.5165E-3	2.5165E-3	6.33297E-3	2.99906E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-7.56335E-1	-7.34711E-1	-9.19516E0	-9.19023E0	4.14848E-3	9.4986E-2	2.73496E1	-3.26434E1	-3.26561E1	2.69361E1	1.20034E-7	2.52191E-3	2.52191E-3	6.33767E-3	3.00025E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09325E0	-7.56383E-1	-7.34544E-1	-9.19495E0	-9.1903E0	4.31538E-3	9.49621E-2	2.7295E1	-3.26389E1	-3.26417E1	2.67897E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-7.56311E-1	-7.34758E-1	-9.19497E0	-9.19011E0	4.33922E-3	9.48191E-2	2.73286E1	-3.26661E1	-3.26025E1	2.69146E1	1.20064E-7	2.5165E-3	2.5165E-3	6.31761E-3	3.01121E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09356E0	-7.55858E-1	-7.34901E-1	-9.19502E0	-9.1902E0	4.43459E-3	9.50098E-2	2.73412E1	-3.26468E1	-3.26254E1	2.67854E1	1.20337E-7	2.5199E-3	2.5199E-3	6.32483E-3	3.00087E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09325E0	-7.56097E-1	-7.34806E-1	-9.19502E0	-9.18968E0	4.36306E-3	9.5129E-2	2.72951E1	-3.26378E1	-3.26254E1	2.68545E1	1.19819E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.0041E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-7.55954E-1	-7.34878E-1	-9.19509E0	-9.18987E0	4.48227E-3	9.51052E-2	2.72922E1	-3.26327E1	-3.26376E1	2.67957E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.98156E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-7.56121E-1	-7.34878E-1	-9.19516E0	-9.19003E0	4.48227E-3	9.49144E-2	2.73275E1	-3.26478E1	-3.2659E1	2.6829E1	1.20137E-7	2.52362E-3	2.52362E-3	6.31858E-3	2.98554E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.56645E-1	-7.34878E-1	-9.19516E0	-9.18984E0	4.22001E-3	9.51052E-2	2.73204E1	-3.26337E1	-3.25936E1	2.6801E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-7.56669E-1	-7.34758E-1	-9.19485E0	-9.18975E0	4.24385E-3	9.50336E-2	2.73201E1	-3.26609E1	-3.26554E1	2.68575E1	1.20036E-7	2.5208E-3	2.5208E-3	6.31012E-3	2.99088E-1